IP Library Granted Patent US 10,872,928
Granted Patent B2
US 10,872,928 · App. 16/549,392 · Granted Dec 22, 2020

Method of manufacturing an enhanced high performance image sensor device

Inventors: Robert Rodriquez (Colorado Springs, CO); Shawn Michael O'Rourke (Colorado Springs, CO); Ick-Hwan Ko (Colorado Springs, CO); Paul Carey (Mountain View, CA)
Assignee: DPIX, LLC
H01L27/307H01L51/0003H01L51/4253H01L51/448
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Quick Facts
Patent No.
US 10,872,928
App. No.
16/549,392
Granted
Dec 22, 2020
Kind
B2
Abstract

An image sensor includes a substrate, a thin film transistor on the substrate, a dielectric layer over the thin film transistor, a stacked metal layer on and extending through the dielectric layer to the thin film transistor, a bulk heterojunction layer directly coupled to the stacked metal layer, either a hole transport layer directly coupled to the bulk heterojunction layer, and a top contact layer directly coupled to the hole transport layer, or a top contact layer directly coupled to the bulk heterojunction layer. The bulk heterojunction layer includes an electron donor/acceptor material, the hole transport layer includes a transparent conductive polymer material, and the top contact layer includes a transparent conductive material. The image sensor includes a moisture barrier layer directly coupled to the top contact layer, including an optically clear adhesive and a laminated transparent barrier film.

Claims (40)

1. An image sensor comprising:

a substrate;

a thin film transistor on the substrate;

a dielectric layer over the thin film transistor;

a stacked metal layer on and extending through the dielectric layer to the thin film transistor;

a bulk heterojunction layer directly contacting a top layer of the stacked metal layer, wherein the bulk heterojunction layer comprises a single material layer and directly contacts the top layer of the stacked metal layer without an intervening electron transport layer;

a hole transport layer directly contacting the bulk heterojunction layer; and

a top contact layer directly contacting the hole transport layer.

2. The image sensor of claim 1 , wherein the bulk heterojunction layer comprises an electron donor/acceptor material.

3. The image sensor of claim 1 , wherein the hole transport layer comprises a transparent conductive polymer material.

4. The image sensor of claim 1 , wherein the top contact layer comprises a transparent conductive material.

5. The image sensor of claim 1 , further comprising a moisture barrier layer directly coupled to the top contact layer.

6. The image sensor of claim 5 , wherein the moisture barrier layer comprises an optically clear adhesive and a laminated transparent barrier film.

7. The image sensor of claim 1 , wherein the bulk heterojunction layer and the hole transport layer comprise a photodiode having an anode coupled to a bias line of the image sensor.

8. An image sensor comprising:

a substrate;

a thin film transistor on the substrate;

a dielectric layer over the thin film transistor;

a stacked metal layer on and extending through the dielectric layer to the thin film transistor;

a hole transport layer directly contacting a top layer of the stacked metal layer;

a bulk heterojunction layer directly contacting the hole transport layer; and

a top contact layer directly contacting the bulk heterojunction layer.

9. The image sensor of claim 8 , wherein the hole transport layer comprises a conductive polymer material.

10. The image sensor of claim 8 , wherein the bulk heterojunction layer comprises an electron donor/acceptor material.

11. The image sensor of claim 8 , wherein the top contact layer comprises a transparent conductive material.

12. The image sensor of claim 8 , further comprising a moisture barrier layer directly coupled to the top contact layer.

13. The image sensor of claim 12 , wherein the moisture barrier layer comprises an optically clear adhesive and a laminated transparent barrier film.

14. The image sensor of claim 8 , wherein the bulk heterojunction layer and the hole transport layer comprise a photodiode having a cathode coupled to a bias line of the image sensor.

15. An image sensor comprising:

a substrate;

a thin film transistor on the substrate;

a dielectric layer over the thin film transistor;

a stacked metal layer on and extending through the dielectric layer to the thin film transistor;

a bulk heterojunction layer directly contacting a top layer of the stacked metal layer, wherein the bulk heterojunction layer comprises a single material layer and directly contacts the top layer of the stacked metal layer without an intervening electron transport layer;

and a top contact layer directly contacting the bulk heterojunction layer.

16. The image sensor of claim 15 , wherein the bulk heterojunction layer comprises an electron donor/acceptor material.

17. The image sensor of claim 15 , wherein the top contact layer comprises a transparent conductive material.

18. The image sensor of claim 15 , further comprising a moisture barrier layer directly coupled to the top contact layer.

19. The image sensor of claim 18 , wherein the moisture barrier layer comprises an optically clear adhesive and a laminated transparent barrier film.

20. The image sensor of claim 15 , wherein the bulk heterojunction layer comprises a photodiode coupled to a bias line of the image sensor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 18, 2019
From: RODRIQUEZ, ROBERT; O'ROURKE, SHAWN MICHAEL; KO, ICK-HWAN; CAREY, PAUL
To: DPIX, LLC
Reel/Frame 050759/0829 →
Continuity (2)
Provisional Application 62725147 · Aug 30, 2018
Related Publication 20200075678A1 · Mar 5, 2020