Semiconductor structures with two-dimensional materials
View Patent ↗The current disclosure describes semiconductor devices, e.g., transistors, including a substrate, a semiconductor region including, at the surface, monolayer MoS 2 and/or other monolayer material over the substrate, and a terminal structure over the semiconductor region, which includes a different monolayer material grown directly over the semiconductor region.
1. A method, comprising:
receiving a wafer including a substrate and a first layer of a first two-dimensional material over the substrate;
forming a first pattern of the first two-dimensional material by patterning the first layer; and
selectively forming a second layer of a second two-dimensional material over the first pattern, the second layer of the second two-dimensional material overlapping only the first pattern.
2. The method of claim 1 , further comprising thinning the first layer of the first two-dimensional material such that the first layer of the first two-dimensional material exhibits a semiconductor property.
3. The method of claim 2 , further comprising heating the substrate and the first pattern of the first two dimensional material before forming the second layer of the second two-dimensional material.
4. The method of claim 1 , wherein the first two-dimensional material is a transition metal dichalcogenide (TMD) material.
5. The method of claim 1 , wherein the first two-dimensional material exhibits a semiconductor property.
6. The method of claim 1 , wherein the first two-dimensional material is molybdenum disulfide with a thickness ranging from about two monolayers of two-dimensional molybdenum disulfide to about six monolayers of two-dimensional molybdenum disulfide.
7. The method of claim 1 , wherein the selectively forming the second layer of the second two-dimensional material over the first pattern includes growing the second two-dimensional material globally over the wafer with a growth condition that prevents the second two-dimensional material from bonding to a surface of the wafer outside the first pattern.
8. The method of claim 7 , wherein the second two-dimensional material is antimonene and the growth condition includes a growth temperature higher than 150° C.
9. A method, comprising:
receiving a wafer including a substrate and a first layer of a first two-dimensional material over the substrate;
forming a first pattern of the first two-dimensional material by patterning the first layer of the first two-dimensional material, the first pattern of the first two-dimensional material exhibiting a semiconductor property;
forming a second layer of a second two-dimensional material over the first pattern of the first two-dimensional material, the second layer of the second two-dimensional material having sidewalls that are coterminous with sidewalls of the first pattern;
forming a conductive layer over the second layer of the second two-dimensional material;
patterning the conductive layer and the second layer of the second two-dimensional material to form a source structure and a drain structure and an exposed portion of the first pattern between the source structure and the drain structure; and
forming a gate structure over the exposed portion of the first pattern.
10. The method of claim 9 , further comprising treating the second layer of the second two-dimensional material such that the second layer exhibits a semimetal property.
11. The method of claim 9 , wherein the first two-dimensional material is molybdenum disulfide.
12. The method of claim 9 , wherein the second two-dimensional material is antimonene.
13. The method of claim 9 , further comprising annealing the second layer of the second two-dimensional material.
14. The method of claim 13 , wherein the annealing is conducted after the conductive layer is formed.
15. The method of claim 9 , further comprising reducing a thickness of the first layer of the first two-dimensional material.
16. The method of claim 1 , wherein the second-two dimensional material exhibits a semimetal property.
17. The method of claim 8 , wherein the second two-dimensional material is a β allotrope of antimonene.
18. The method of claim 1 , further comprising forming a conductive layer over the second two-dimensional material.
19. The method of claim 18 , further comprising patterning the conductive layer and the second two-dimensional material together to form a source/drain structure.
20. The method of claim 12 , wherein the second two-dimensional material is a β allotrope of antimonene.