IP Library › Granted Patent US 10,875,020
Granted Patent B2
US 10,875,020 · App. 15/756,860 · Granted Dec 29, 2020

Reconfigurable microvalve optical waveguide

Inventor: Holger Schmidt (Capitola, CA)
Assignee: The Regents of the University of California
B01L3/502738F16K99/0011F16K99/0015F16K99/0034F16K99/0059G01N15/1436G01N15/1456G01N15/1484G01N21/05G02B6/2804G02B6/3536G02B6/3538G02B6/3574H01P3/12B01L2200/0668B01L2300/0654B01L2300/0816B01L2300/123B01L2400/0481B01L2400/0655F16K2099/0084G01N2015/1454G01N2021/0346G01N2021/0364G01N2021/6482G02B2006/0325
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Quick Facts
Patent No.
US 10,875,020
App. No.
15/756,860
Granted
Dec 29, 2020
Kind
B2
Abstract

An optical waveguide comprises multiple layers of solid-state material disposed on a substrate. One of the layers is a lifting-gate valve made of a high refractive index material. The device provides for better optical confinement in microfluidic channels, and has the capability to integrate both optical signals and fluid sample processing. The optical paths on the chip are reconfigurable because of the use of a movable microvalve that guides light in one of its positions.

Claims (28)

1. An optical waveguide ( 300 ), comprising:

a substrate ( 310 ) characterized by a first refractive index;

a pneumatic layer ( 330 ) disposed on the substrate and characterized by a second refractive index;

a channel ( 340 ) between the substrate and the pneumatic layer and configured to receive a sample fluid;

a pneumatically actuated micro-valve ( 320 ) comprising a gate ( 320 a ) characterized by a third refractive index, wherein the third refractive index is greater than the first refractive index and the second refractive index; and

an optical channel ( 450 ) configured to guide an optical signal between the substrate and the pneumatic layer transversely to the channel;

wherein the micro-valve is configured to be pneumatically actuated to switch from a first state in which the gate is positioned to block fluid flow in the channel, and a second state in which the gate is sufficiently withdrawn from the channel to permit fluid flow in the channel; and

wherein the gate is configured for guiding the optical signal transversely through the channel when in the first state.

2. The optical waveguide of claim 1 , wherein the substrate comprises at least one of silicon, polydimethylsiloxane (PDMS), or glass.

3. The optical waveguide of claim 1 , wherein the pneumatic layer comprises at least one of SiO2, SiN, or polydimethylsiloxane (PDMS).

4. The optical waveguide of claim 1 , wherein the optical waveguide is configured to actuate the micro-valve to function as an on-off switch ( 410 ).

5. The optical waveguide of claim 1 , wherein the optical waveguide is configured to actuate the micro-valve to function as an optical signal splitter ( 412 ).

6. The optical waveguide of claim 1 , wherein the optical waveguide is configured to actuate the micro-valve to function as a multi-mode interferometer (MMI, 430 ).

7. The optical waveguide of claim 1 , wherein the optical waveguide is configured to function as a physical trap ( 435 ) for particles that can then be interrogated using light.

8. The optical waveguide of claim 7 , wherein a lifting-gate valve has the topological shape of a ring, and is configured to physically enclose the particles, and wherein light is carried to or collected from the enclosed area by one or more waveguides.

9. The optical waveguide of claim 1 , wherein the substrate comprises at least one of silicon, polydimethylsiloxane (PDMS), or glass; wherein the pneumatic layer comprises at least one of SiO2, SiN, or polydimethylsiloxane (PDMS); and wherein the optical waveguide is configured to actuate the micro-valve to function as one of an on-off switch ( 410 ), an optical signal splitter ( 412 ), a multi-mode interferometer (MMI, 430 ), and a physical trap ( 435 ) for particles that can then be interrogated using light.

10. A method for operating an optical waveguide ( 300 ), comprising:

injecting an optical signal into the optical waveguide, wherein the optical waveguide comprises a substrate ( 310 ) characterized by a first refractive index; a pneumatic layer ( 330 ) disposed on the substrate and characterized by a second refractive index; a channel ( 340 ) between the substrate and the pneumatic layer and configured to receive a sample fluid; a pneumatically actuated micro-valve ( 320 ) comprising a gate ( 320 a ) characterized by a third refractive index, wherein the third refractive index is greater than the first refractive index and the second refractive index; and an optical channel ( 450 ) configured to guide the optical signal between the substrate and the pneumatic layer transversely to the channel;

pneumatically actuating the micro-valve to switch from a state in which the gate is sufficiently withdrawn from the channel to permit fluid flow in the channel to a state in which the gate is positioned to block fluid flow in the channel; and

guiding the optical signal transversely through the channel when the gate is positioned to block fluid flow in the channel.

11. The method of claim 10 , wherein the substrate comprises at least one of silicon, polydimethylsiloxane (PDMS), or glass.

12. The method of claim 10 , wherein the pneumatic layer comprises at least one of SiO2, SiN, or polydimethylsiloxane (PDMS).

13. The method of claim 10 , wherein the optical waveguide is configured to actuate the micro-valve to function as an on-off switch ( 410 ).

14. The method of claim 10 , wherein the optical waveguide is configured to actuate the micro-valve to function as an optical signal splitter ( 412 ).

15. The method of claim 10 , wherein the optical waveguide is configured to actuate the micro-valve to function as a multi-mode interferometer (MMI, 430 ).

16. The method of claim 10 , wherein the optical waveguide is configured to function as a physical trap ( 435 ) for particles that can then be interrogated using light.

17. The method of claim 16 , wherein a lifting-gate valve has the topological shape of a ring, and is configured to physically enclose the particles, and wherein light is carried to or collected from the enclosed area by one or more waveguides.

18. The method of claim 10 , wherein the substrate comprises at least one of silicon, polydimethylsiloxane (PDMS), or glass; wherein the pneumatic layer comprises at least one of SiO2, SiN, or polydimethylsiloxane (PDMS); and wherein the optical waveguide is configured to actuate the micro-valve to function as one of an on-off switch ( 410 ), an optical signal splitter ( 412 ), a multi-mode interferometer (MMI, 430 ), and a physical trap ( 435 ) for particles that can then be interrogated using light.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2018
From: SCHMIDT, HOLGER
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 045243/0498 →
Continuity (2)
Provisional Application 62213022 · Sep 1, 2015
Related Publication 20180243740A1 · Aug 30, 2018
Cited By (1)
US 12,704,503