IP Library › Granted Patent US 10,876,979
Granted Patent B2
US 10,876,979 · App. 15/618,433 · Granted Dec 29, 2020

Processing method, processing apparatus and processing program configured to determine conditions of pole figure measurement by X-ray diffraction

Inventors: Hisashi Konaka (Akiruno, JP); Akihiro Himeda (Akishima, JP); Toru Mitsunaga (Hachioji, JP); Keigo Nagao (Saitama, JP)
Assignee: RIGAKU CORPORATION
G01N23/2055G01N23/20G01N23/205G01N23/207G01N23/20008G01N23/20016G01N23/20025
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Quick Facts
Patent No.
US 10,876,979
App. No.
15/618,433
Granted
Dec 29, 2020
Kind
B2
Abstract

Provided are a processing method, a processing apparatus and a processing program which can perform pole figure measurement continuously without overlapping of an angle a in a pole figure with the small number of times of ϕ scan, thereby enabling the efficient measurement. The processing method for determining conditions of pole figure measurement by X-ray diffraction, includes the steps of. receiving input of a diffraction angle 2θ; and determining an angle ω formed by an incident X-ray and an x-axis, and a tilt angle χ of a sample in each ϕ scan for a rotation angle ϕ within a sample plane so as to make a range of an angle a continuous from α=90° to α=0° without overlapping, the angle α being formed by the sample plane and a scattering vector, the range of the angle α are detectable at a time on a two-dimensional detection plane in the pole figure measurement at the diffraction angle 2θ, in which determining the angle ω and the tilt angle χ is repeated.

Claims (17)

1. A processing method for determining conditions of a pole figure measurement by X-ray diffraction, comprising the steps of:

receiving an input of a diffraction angle 2θ; and

determining an angle ω formed by an incident X-ray and an x-axis, and a tilt angle χ of a sample in each ϕ scan for a rotation angle ϕ within a sample plane so as to make a range of an angle α continuous from α=90° to α=0° without overlapping, the angle α being formed by the sample plane and a scattering vector, the range of the angle α are detectable at a time on a two-dimensional detection plane in the pole figure measurement at the diffraction angle 2θ, by calculating the range of the angle α based on an arrangement of the sample and the two-dimensional detection plane, and also a size of the two-dimensional detection plane,

wherein determining the angle ω and the tilt angle χ is repeated.

2. The processing method according to claim 1 , wherein the determining the angle ω and the tilt angle χ comprises determining the angle ω and the tilt angle χ in a first ϕ scan so that one end of an arc representing the range of the angle α that is detectable at a time on the two-dimensional detection plane, when the rotation angle ϕ within the sample plane is set to be constant, comes in contact with a position at which the angle α is 90°.

3. The processing method according to claim 1 , wherein the determining the angle ω and the tilt angle χ comprises determining the angle ω and the tilt angle χ in a second or subsequent ϕ scan so that one end of an arc representing the range of the angle α detectable at a time on the two-dimensional detection plane, when the rotation angle ϕ is set to be constant, comes in contact with one end of an arc in an immediately preceding measurement stage.

4. The processing method according to claim 1 , further comprising;

preliminary displaying the range of the angle α detectable at a time on the two-dimensional detection plane in each ϕ scan, based on the determined angle ω and the determined tilt angle χ.

5. A processing apparatus that determines conditions of a pole figure measurement by X-ray diffraction, comprising:

a processor configured to be controlled by a program to:

receive an input of a diffraction angle 2θ;

determine an angle ω formed by an incident X-ray and an x-axis, and a tilt angle χ of a sample in each ϕ scan for a rotation angle ϕ within a sample plane so as to make a range of an angle α continuous from α=90° to α=0° without overlapping, the angle α being formed by the sample plane and a scattering vector, the range of the angle α are detectable at a time on a two-dimensional detection plane in the pole figure measurement at the diffraction angle 2θ by calculating the range of the angle α based on the arrangement of the sample and the two-dimensional detection plane, and also a size of the two-dimensional detection plane; and

repeatedly determines the angle ω and the tilt angle χ.

6. A non-transitory computer readable recording medium having recorded thereon a processing program for determining conditions of a pole figure measurement by X-ray diffraction, the processing program causing a computer to execute processes of:

receiving an input of a diffraction angle 2θ; and

determining an angle ω formed by an incident X-ray and an x-axis, and a tilt angle χ of a sample in each ϕ scan for a rotation angle ϕ within a sample plane so as to make a range of an angle α continuous from α=90° to α=0° without overlapping, the angle α being formed by the sample plane and a scattering vector, the range of the angle α are detectable at a time on a two-dimensional detection plane in the pole figure measurement at the diffraction angle 2θ by calculating the range of the angle α based on the arrangement of the sample and the two-dimensional detection plane, and also a size of the two-dimensional detection plane,

wherein determining the angle ω and the tilt angle χ is repeated.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 12, 2017
From: KONAKA, HISASHI; HIMEDA, AKIHIRO; MITSUNAGA, TORU; NAGAO, KEIGO
To: RIGAKU CORPORATION
Reel/Frame 042678/0859 →
Priority Claims (1)
JP 2016-125248 · Jun 24, 2016 · national
Continuity (1)
Related Publication 20170370860A1 · Dec 28, 2017