IP Library › Granted Patent US 10,878,165
Granted Patent B2
US 10,878,165 · App. 16/445,931 · Granted Dec 29, 2020

Method for generating layout diagram including protruding pin cell regions and semiconductor device based on same

Inventors: Fong-Yuan Chang (Hsinchu, TW); Chin-Chou Liu (Jhubei, TW); Sheng-Hsiung Chen (Zhubei, TW); Po-Hsiang Huang (Tainan, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G06F30/398G03F1/70G06F30/392G06F30/394
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,878,165
App. No.
16/445,931
Granted
Dec 29, 2020
Kind
B2
Abstract

A method (of generating a layout diagram) includes: generating a cell (which represents a circuit) including first and second side boundaries which are substantially parallel and extend in a first direction, a first wiring pattern which is an intra-cell wiring pattern that extends in a second direction (substantially perpendicular to the first direction) and represents a conductor of a first signal which is internal to the circuit, and a second wiring pattern which extends in the first direction and represents a conductor of a second signal of the circuit; configuring the intra-cell wiring pattern so that a first end is located substantially a minimum boundary offset interior to the first side boundary; and configuring the second wiring pattern so that a portion thereof has a first end which extends exterior to the first side boundary by a protrusion length which is substantially greater than the minimum boundary offset.

Claims (76)

1. A method of generating a layout diagram, the layout diagram being stored on a non-transitory computer-readable medium, the method comprising:

generating a cell which represents a circuit, the cell including:

first and second side boundaries which are substantially parallel and extend in a first direction;

a first wiring pattern which is an intra-cell wiring pattern that extends in a second direction and represents a conductor of a first signal which is internal to the circuit, the second direction being substantially perpendicular to the first direction;

a second wiring pattern which extends in the first direction and represents a conductor of a second signal of the circuit;

configuring the intra-cell wiring pattern so that a first end thereof is located substantially a minimum boundary offset interior to the first side boundary; and

configuring the second wiring pattern so that a portion thereof has a first end which extends exterior to the first side boundary by a protrusion length which is substantially greater than the minimum boundary offset.

2. The method of claim 1 , wherein:

the minimum boundary offset is substantially half of a minimum end-to-end spacing for substantially collinear wiring patterns.

3. The method of claim 1 , further comprising:

configuring the second wiring pattern to leave a gap between a second end thereof and the second side boundary, a size of the gap in the second direction being substantially greater than the minimum boundary offset.

4. The method of claim 3 , further comprising:

substantially filling the gap with a dummy pattern;

configuring the dummy pattern so that a first end thereof substantially abuts a second end of the second wiring pattern; and

further configuring the dummy pattern so that a second end thereof is located substantially the minimum boundary offset interior to the second side boundary.

5. The method of claim 1 , further comprising:

further configuring the intra-cell wiring pattern so that a second end of the intra-cell wiring pattern is located substantially the minimum boundary offset from the second side boundary of the cell.

6. The method of claim 1 , further comprising:

further configuring the intra-cell wiring pattern to leave a gap between a second end of the intra-cell wiring pattern and the second side boundary of the cell, a size of the gap in the second direction being substantially greater than the minimum boundary offset.

7. The method of claim 1 , wherein:

the intra-cell wiring pattern is a first intra-cell wiring pattern; and

the method further comprises:

adding, to the cell, a third wiring pattern which is a second intra-cell wiring pattern and which extends in the second direction; and

adding, to the cell, a cut pattern which extends in the first direction and which, in effect, divides the second intra-cell wiring pattern into first and second portions.

8. The method of claim 1 , wherein one of the following is true:

the second wiring pattern is a pin pattern which extends in the first direction and further represents an input/output (I/O) terminal of the circuit; or

the second wiring pattern is a trans-boundary intra-cell wiring pattern.

9. The method of claim 1 , further comprising:

fabricating, based on the layout diagram, at least one of (A) one or more semiconductor masks or (B) at least one component in a layer of a semiconductor device.

10. A semiconductor device comprising:

a cell region which includes components representing a circuit, the components being arranged such that a virtual perimeter is drawable around substantially all of the components, the virtual perimeter being rectangular and including:

first and second virtual side boundaries which are substantially parallel and extend in a first direction;

wherein the components of the cell region include:

a first conductor which is an intra-cell conductor of a first signal which is internal to the circuit;

the intra-cell conductor extending in a second direction, the second direction being substantially perpendicular to the first direction; and

a first end of the intra-cell conductor being located substantially a minimum virtual boundary offset interior to the first virtual side boundary; and

a second conductor of a second signal of the circuit;

the second conductor extending in the first direction; and

a portion of the second conductor having a first end which extends exterior to the first virtual side boundary by a protrusion length which is substantially greater than the minimum virtual boundary offset.

11. The semiconductor device of claim 10 , wherein:

the minimum virtual boundary offset is substantially half of a minimum virtual end-to-end spacing for substantially collinear conductors.

12. The semiconductor device of claim 10 , wherein:

a second end of the intra-cell conductor is located substantially the minimum virtual boundary offset from the second virtual side boundary of the cell region.

13. The semiconductor device of claim 10 , wherein:

the second conductor has a length in the second direction which results in a gap between a second end of the second conductor and the second virtual side boundary, a size of the gap in the second direction being substantially greater than the minimum virtual boundary offset; and

the components of the cell region further include:

a dummy structure which is substantially collinear with the second conductor and which substantially fills the gap;

a first end of the dummy structure substantially abutting a second end of the second conductor; and

a second end of the dummy structure being located substantially the minimum virtual boundary offset interior to the second virtual side boundary.

14. The semiconductor device of claim 10 , wherein:

the intra-cell conductor has a length in the second direction which results in a gap between a second end of the intra-cell conductor and the second virtual side boundary of the cell region, a size of the gap in the second direction being substantially greater than the minimum virtual boundary offset; and

the components of the cell region further include:

a dummy structure which is substantially collinear with the intra-cell conductor and which substantially fills the gap;

a first end of the dummy structure substantially abutting a second end of the intra-cell conductor; and

a second end of the dummy structure being located substantially the minimum virtual boundary offset interior to the second virtual side boundary.

15. A method of generating a layout diagram, the layout diagram being stored on a non-transitory computer-readable medium, the method comprising:

generating a cell which represents a circuit, the cell including:

first and second side boundaries which are substantially parallel and extend in a first direction;

a first wiring pattern which is an intra-cell wiring pattern that extends in a second direction and represents a conductor of a first signal which is internal to the circuit, the second direction being substantially perpendicular to the first direction;

a second wiring pattern which extends in the first direction and represents a conductor of a second signal of the circuit;

configuring the intra-cell wiring pattern so that a first end thereof is located substantially a minimum boundary offset interior to the first side boundary; and

configuring the second wiring pattern as follows:

so that a portion thereof has a first end which extends exterior to the first side boundary by a protrusion length which is substantially greater than the minimum boundary offset; and

so that a gap remains between a second end thereof and the second side boundary, a size of the gap in the second direction being substantially greater than the minimum boundary offset.

16. The method of claim 15 , wherein:

the minimum boundary offset is substantially half of a minimum end-to-end spacing for substantially collinear wiring patterns.

17. The method of claim 15 , further comprising:

substantially filling the gap with a dummy pattern;

configuring the dummy pattern so that a first end thereof substantially abuts a second end of the second wiring pattern; and

further configuring the dummy pattern so that a second end thereof is located substantially the minimum boundary offset interior to the second side boundary.

18. The method of claim 15 , further comprising:

further configuring the intra-cell wiring pattern so that a second end of the intra-cell wiring pattern is located substantially the minimum boundary offset from the second side boundary of the cell.

19. The method of claim 15 , further comprising:

further configuring the intra-cell wiring pattern to leave a gap between a second end of the intra-cell wiring pattern and the second side boundary of the cell, a size of the gap in the second direction being substantially greater than the minimum boundary offset.

20. The method of claim 15 , further comprising:

fabricating, based on the layout diagram, at least one of (A) one or more semiconductor masks or (B) at least one component in a layer of a semiconductor device.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 5, 2019
From: CHANG, FONG-YUAN; LIU, CHIN-CHOU; CHEN, SHENG-HSIUNG; HUANG, PO-HSIANG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 049677/0059 →
Continuity (2)
Provisional Application 62698779 · Jul 16, 2018
Related Publication 20200019670A1 · Jan 16, 2020
Cited By (4)
US 12,307,185 US 12,450,417 US 12,501,685 US 12,713,684