IP Library Granted Patent US 10,883,165
Granted Patent B2
US 10,883,165 · App. 16/169,693 · Granted Jan 5, 2021

Mask sheet and manufacturing method for the same

Inventors: In-bae Kim (Daejeon, KR); Minho Moon (Anyang-si, KR); Sungsoon Im (Suwon-si, KR); Kyuhwan Hwang (Seongnam-si, KR)
Assignee: Samsung Display Co., Ltd.
C23C14/042B23K26/0661B23K31/02C21D6/001C22C38/40
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Quick Facts
Patent No.
US 10,883,165
App. No.
16/169,693
Granted
Jan 5, 2021
Kind
B2
Abstract

A mask sheet and a method for manufacturing the same are provided. A mask sheet includes one or more openings defined therein, and an alloy of nickel and iron, and a particle of the alloy has a single crystalline structure. A method for manufacturing a mask sheet includes preparing a base sheet including an alloy of nickel and iron, performing a heat treatment on the entire base sheet; and forming one or more openings in the heat-treated base sheet.

Claims (15)

1. A method for manufacturing a mask sheet, the method comprising:

preparing a base sheet comprising an alloy of nickel and iron;

performing a heat treatment on the entire base sheet; and

forming one or more openings in the heat-treated base sheet,

wherein the heat treatment is performed at a temperature in a range from about 520° C. to about 580° C. for about one hour to about two hours.

2. The method of claim 1 , wherein the heat treatment is performed under a nitrogen and hydrogen atmosphere, and

a ratio of the nitrogen and the hydrogen is about 95:5 to about 99:1.

3. The method of claim 1 , wherein a content of the nickel in the alloy is in a range from about 33 wt % to about 37 wt %.

4. The method of claim 1 , wherein the preparing the base sheet comprises forming the base sheet by electroforming.

5. The method of claim 1 , wherein the forming the one or more openings is performed by laser radiation.

6. The method of claim 1 , wherein the preparing the base sheet comprises preparing the base sheet having a thickness of about 30 μm or less.

7. The method of claim 1 , wherein the preparing the base sheet comprises preparing the base sheet in which a crystal structure of the alloy comprises a polycrystalline structure.

8. The method of claim 1 , wherein a crystal structure of the alloy in the heat-treated base sheet comprises a single crystalline structure.

9. The method of claim 8 , wherein the single crystalline structure has only a face centered cubic structure.

10. The method of claim 1 , wherein a size of crystal grains in a crystal structure in the heat-treated base sheet is in micro-scale.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2018
From: KIM, IN-BAE; MOON, MINHO; IM, SUNGSOON; HWANG, KYUHWAN
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 047299/0801 →
Priority Claims (1)
KR 10-2017-0168682 · Dec 8, 2017 · national
Continuity (1)
Related Publication 20190177830A1 · Jun 13, 2019
Cited By (2)
US 12,364,010 US 12,611,726