Methods of manufacturing devices including a buried gate cell and a bit line structure including a thermal oxide buffer pattern
A memory device includes cell transistors on active regions defined by a device isolation layer on a substrate such that each cell transistor has a buried cell gate and a junction portion adjacent to and at least partially distal to the substrate in relation to the buried cell gate, an insulation pattern on the substrate and covering the cell transistors and the device isolation layer, and a bit line structure on the insulation pattern and connected to the junction portion. The bit line structure includes a buffer pattern on the pattern and having a thermal oxide pattern, a conductive line on the buffer pattern, and a contact extending from the conductive line to the junction portion through the buffer pattern and the insulation pattern.
1. A method of manufacturing a semiconductor device, comprising:
providing a substrate including a plurality of cell transistors on a plurality of active regions defined by a device isolation layer, each cell transistor of the plurality of cell transistors including a buried cell gate in the substrate and a junction portion adjacent to the buried cell gate and at least partially distal to the substrate in relation to the buried cell gate;
sequentially forming an insulation layer and a buffer layer on the substrate, the buffer layer including a thermal oxide layer;
forming a preliminary contact penetrating through the buffer layer and the insulation layer such that the preliminary contact makes contact with the junction portion under a top surface of the device isolation layer and is enclosed by the device isolation layer, an insulation pattern and a preliminary buffer pattern;
forming a conductive layer on the preliminary buffer pattern and the preliminary contact; and
forming a bit line structure extending on the insulation pattern based on partially removing the conductive layer, the preliminary buffer pattern and the preliminary contact, the bit line structure having a buffer pattern on the insulation pattern, a conductive line on the buffer pattern and a contact connecting with the junction portion and the conductive line, the buffer pattern including a thermal oxide pattern.
2. The method of claim 1 , wherein the sequentially forming the insulation layer and the buffer layer includes
depositing insulation materials onto the substrate along a cell area on which the cell transistors are arranged and a peripheral area on which at least a peripheral transistor is to be arranged, thereby forming the insulation layer on an entirety of the substrate;
forming a semiconductor layer on the insulation layer in the cell area such that the substrate is exposed in the peripheral area;
at least partially thermally oxidizing the substrate to form the thermal oxide layer from the semiconductor layer in the cell area simultaneously with forming a peripheral gate insulation layer on an active region in the peripheral area; and
forming a buffer conductive layer on the thermal oxide layer and the peripheral gate insulation layer.
3. The method of claim 2 , wherein the forming the semiconductor layer on the insulation layer in the cell area includes
sequentially forming the semiconductor layer and a sacrificial layer on the insulation layer across the cell area and the peripheral area of the substrate;
partially removing the sacrificial layer and the semiconductor layer from the substrate such that the insulation layer is exposed in the peripheral area and the sacrificial layer and the semiconductor layer are restricted to the cell area;
removing an upper portion of the insulation layer from the peripheral area based on an etching process having an etching selectivity with respect to the sacrificial layer of the cell area; and
simultaneously removing a lower portion of the insulation layer and the sacrificial layer from the peripheral area and the cell area, respectively, such that the cell area is covered by the semiconductor layer and a top surface of the peripheral area of the substrate is exposed.
4. The method of claim 3 , wherein the semiconductor layer includes polysilicon and the sacrificial layer includes oxide.
5. The method of claim 2 , wherein the substrate includes single crystalline silicon and the semiconductor layer includes polysilicon such that the thermal oxide layer has a thickness greater than the peripheral gate insulation layer.
6. The method of claim 2 , further comprising:
simultaneously forming a hardening layer on the thermal oxide layer in the cell area and on the peripheral gate insulation layer in the peripheral area according to a nitriding process.
7. The method of claim 2 , wherein forming the preliminary contact includes:
partially removing the buffer layer, the insulation layer and the junction portion underlying the insulation layer to form a contact hole and a junction recess, the contact hole defined by the preliminary buffer pattern and the insulation pattern, the junction recess defined by the device isolation layer such that a lower junction having a top surface lower than the top surface of the device isolation layer is exposed through the junction recess and the contact hole, the preliminary buffer pattern including a preliminary thermal oxide pattern and a preliminary buffer conductive pattern; and
filling the contact hole and the junction recess with conductive materials to form the preliminary contact in the contact hole and the junction recess such that a top surface of the preliminary contact is substantially coplanar with a top surface of the preliminary buffer pattern.
8. The method of claim 7 , wherein forming the bit line structure includes:
partially removing the conductive layer from the cell area according to a first etching process to remove the preliminary buffer conductive pattern and an upper portion of the preliminary contact from the cell area by an over etch of the first etching process, thereby forming a buffer conductive pattern, an upper contact and the conductive line contacting the buffer conductive pattern and the upper contact;
partially removing the preliminary thermal oxide pattern and a lower portion of the preliminary contact according to a second etching process performed subsequently to the first etching process to form the thermal oxide pattern under the buffer conductive pattern and a lower contact under the upper contact in the contact hole and the junction recess such that the buffer pattern includes the thermal oxide pattern and the buffer conductive pattern and the contact includes the lower contact and the upper contact; and
forming a bit line spacer on side surfaces of the conductive line and the buffer pattern and filling up the contact hole and the junction recess around the contact.
9. The method of claim 8 , wherein the preliminary buffer conductive pattern and the preliminary contact include a common material such that the preliminary buffer conductive pattern and the upper portion of the preliminary contact are removed at a common etching rate by the over etch of the first etching process.