Solid-state imaging element and solid-state imaging apparatus
A solid-state imaging element includes a first electrode including a plurality of electrodes, a second electrode opposed to the first electrode, and a photoelectric conversion layer provided between the first electrode and the second electrode. The first electrode has, at least in a portion, an overlap section where the plurality of electrodes overlap each other with a first insulation layer interposed therebetween.
1. A solid-state imaging element, comprising:
a first electrode including a plurality of electrodes,
wherein the plurality of electrodes includes a charge readout electrode and
a charge accumulation electrode;
a second electrode opposed to the first electrode;
a photoelectric conversion layer between the first electrode and the second electrode; and
a first insulation layer, wherein
the charge accumulation electrode has a first overlap section,
the charge accumulation electrode is divided into at least two portions,
a first portion of the at least two portions is partially stacked on a second portion of the at least two portions in the first overlap section, and
the first insulation layer is between the first portion and the second portion in the first overlap section.
2. The solid-state imaging element according to claim 1 , wherein
the charge readout electrode includes a first electrically-conductive film and a second electrically-conductive film,
the first electrically-conductive film and the charge accumulation electrode are in a first layer,
the second electrically-conductive film is electrically coupled to the first electrically-conductive film,
the second electrically-conductive film is in a second layer different from the first layer,
the second electrically-conductive film and the charge accumulation electrode include a second overlap section,
a portion of the second electrically-conductive film, the first insulation layer, and the charge accumulation electrode are stacked in the second overlap section, and
the first insulation layer is between the portion of the second electrically-conductive film and the charge accumulation electrode.
3. The solid-state imaging element according to claim 1 , wherein
the first electrode further includes a charge transfer electrode between the charge readout electrode and the charge accumulation electrode,
the charge transfer electrode includes a first electrically-conductive film, a second electrically-conductive film, and a third electrically-conductive film,
the first electrically-conductive film, the charge readout electrode, and the charge accumulation electrode are in a first layer,
the second electrically-conductive film and the third electrically-conductive film are electrically coupled to the first electrically-conductive film,
the second electrically-conductive film and the third electrically-conductive film are in a second layer different from the first layer,
the second electrically-conductive film and the charge readout electrode include a second overlap section,
a portion of the second electrically-conductive film overlaps with the charge readout electrode in the second overlap section,
the first insulation layer is between the portion of the second electrically-conductive film and the charge readout electrode in the second overlap section,
the third electrically-conductive film and the charge accumulation electrode include a third overlap section,
a portion of the third electrically-conductive film overlaps with the charge accumulation electrode in the third overlap section, and
the first insulation layer is between the portion of the third electrically-conductive film and the charge accumulation electrode in the third overlap section.
4. The solid-state imaging element according to claim 1 , wherein
the first electrode further includes a charge discharging electrode adjacent to the charge accumulation electrode,
the charge discharging electrode includes a first electrically-conductive film and a second electrically-conductive film,
the first electrically-conductive film and the charge accumulation electrode are in a first layer,
the second electrically-conductive film is electrically coupled to the first electrically-conductive film,
the second electrically-conductive film is in a second layer different from the first layer,
the second electrically-conductive film and the charge accumulation electrode include a second overlap section,
a portion of the second electrically-conductive film overlaps with the charge accumulation electrode in the second overlap section, and
the first insulation layer is between the portion of the second electrically-conductive film and the charge accumulation electrode in the second overlap section.
5. The solid-state imaging element according to claim 1 , wherein the first electrode is on a side opposite to a light entering surface with respect to the photoelectric conversion layer.
6. The solid-state imaging element according to claim 1 , wherein the first electrode is on a side of a light entering surface with respect to the photoelectric conversion layer.
7. The solid-state imaging element according to claim 1 , further comprising a second insulation layer between the first electrode and the photoelectric conversion layer,
wherein the charge readout electrode is electrically coupled to the photoelectric conversion layer through an opening providcd in the second insulation layer.
8. The solid-state imaging element according to claim 7 , further comprising a semiconductor layer between the photoelectric conversion layer and the second insulation layer,
wherein the charge readout electrode is electrically coupled to the photoelectric conversion layer through the semiconductor layer.
9. The solid-state imaging element according to claim 1 , wherein application of a voltage to the charge readout electrode is independent of application of a voltage to the charge accumulation electrode.
10. The solid-state imaging element according to claim 1 , further comprising:
an organic photoelectric converter including the photoelectric conversion, layer; and
at least two inorganic photoelectric converters configured to perform photoelectric conversion in a first wavelength range, wherein
the organic photoelectric converter is configured to perform the photoelectric conversion in a second wavelength range, and
the first wavelength range is different from the second wavelength range.
11. The solid-state imaging element according to claim 10 , further comprising a semiconductor substrate, wherein
the at least two inorganic photoelectric converters are embedded in the semiconductor substrate, and
the organic photoelectric converter is on a side of a first surface of the semiconductor substrate.
12. The solid-state imaging element according to claim 11 , further comprising a multilayer wiring layer on a side of a second surface of the semiconductor substrate.
13. The solid-state imaging element according to claim 11 , wherein
the organic photoelectric converter is configured to perform the photoelectric conversion of green light,
a first inorganic photoelectric converter of the at least two inorganic photoelectric converters is configured to perform the photoelectric conversion of blue light,
a second inorganic photoelectric converter of the at least two inorganic photoelectric converters is configured to perform the photoelectric conversion of red light, and
the first inorganic photoelectric converter and the second inorganic photoelectric converter are stacked inside the semiconductor substrate.
14. A solid-state imaging apparatus, comprising:
a plurality of pixels, wherein
each of the plurality of pixels includes at least one solid-state imaging element, and
the at least one solid-state imaging cicmcnts comprising element comprises:
a first electrode including a plurality of electrodes,
wherein the plurality of electrodes includes a charge readout electrode and a charge accumulation electrode;
a second electrode opposed to the first electrode;
a photoelectric conversion layer between the first electrode and the second electrode; and
an insulation layer, wherein
the charge accumulation electrode has an overlap section,
the charge accumulation electrode is divided into at least two portions,
a first portion of the at least two portions is partially stacked on a second portion of the at least two portions in the overlap section, and
the insulation layer is between the first portion and the second portion in the overlap section.
15. The solid-state imaging apparatus according to claim 14 , wherein
each of the plurality of pixels includes the first electrode.
16. A solid-state imaging element, comprising:
a first electrode including a plurality of electrodes;
a second electrode opposed to the first electrode;
a photoelectric conversion layer between the first electrode and the second electrode; and
an insulation layer, wherein
the first electrode is on a side of a light entering surface with respect to the photoelectric conversion layer,
the plurality of electrodes includes a third electrode and a fourth electrode,
at least a portion of the first electrode has an overlap section,
the third electrode overlaps with the fourth electrode in the overlap section, and
the insulation layer is between the third electrode and the fourth electrode in the overlap section.