Display device including capping layer covered source and drain electrodes
A display device includes: a thin-film transistor on a substrate, the thin-film transistor including on the substrate: an active layer; a gate electrode overlapping the active layer; a source electrode and a drain electrode electrically connected to the active layer and including a first metal material; and a first capping layer which covers each of the source electrode and the drain electrode, the first capping layer having a Young's modulus greater than that of the first metal material.
1. A display device comprising:
a thin-film transistor on a substrate, the thin-film transistor comprising on the substrate:
an active layer;
a gate electrode overlapping the active layer;
a source electrode and a drain electrode electrically connected to the active layer, the source electrode and the drain electrode including a first metal material; and
a first capping layer which covers the gate electrode, the first capping layer including a second metal material having a Young's modulus greater than that of the first metal material.
2. The display device of claim 1 , wherein the first capping layer comprises titanium (Ti), molybdenum (Mo) or tungsten (W).
3. The display device of claim 1 , wherein
each of the source electrode and the drain electrode includes an upper surface and a side surface which extends from the upper surface,
the first capping layer overlaps the upper surface of the source electrode and the drain electrode, and
the first capping layer overlapping the upper surface of the source electrode and the drain electrode respectively extends along the side surface of the source electrode and the drain electrode to cover both the upper surface and the side surface.
4. The display device of claim 1 , wherein the source electrode and the drain electrode include aluminum (Al).
5. The display device of claim 1 , further comprising:
an interlayer dielectric layer between the gate electrode and the source electrode and between the gate electrode and the drain electrode,
wherein
each of the source electrode and the drain electrode includes an upper surface and a side surface which extends from the upper surface,
the first capping layer overlaps the upper surface of the source electrode and the drain electrode, and
the first capping layer overlapping the upper surface of the source electrode and the drain electrode respectively extends along the side surface of the source electrode and the drain electrode to contact the interlayer dielectric layer.
6. The display device of claim 1 , wherein
the active layer includes a first region overlapped by the gate electrode and a second region which is not overlapped by the gate electrode, and
the first region and the second region of the active layer are doped with a same concentration of impurities as each other.
7. The display device of claim 6 , wherein the first region and the second region are directly connected to each other.
8. A display device comprising:
a thin-film transistor on a substrate, the thin-film transistor comprising on the substrate:
an active layer;
a gate electrode overlapping the active layer;
a source electrode and a drain electrode electrically connected to the active layer, the source electrode and the drain electrode including a first metal material;
a first capping layer which covers each of the source electrode and the drain electrode, the first capping layer including a second metal material having a Young's modulus greater than that of the first metal material; and
a second capping layer which covers the gate electrode, the second capping layer comprising titanium (Ti), molybdenum (Mo) or tungsten (W).
9. The display device of claim 8 , wherein
the gate electrode includes an upper surface and a side surface which extends from the upper surface,
the second capping layer overlaps the upper surface of the gate electrode, and
the second capping layer overlapping the upper surface of the gate electrode extends along the side surface of the gate electrode to cover both the upper surface and the side surface.
10. The display device of claim 8 , wherein the gate electrode comprises aluminum (Al).
11. The display device of claim 8 , further comprising:
a gate insulating layer between the active layer and the gate electrode,
wherein the second capping layer overlapping the upper surface extends along the side surface of the gate electrode to contact the gate insulating layer.