IP Library Granted Patent US 10,892,399
Granted Patent B2
US 10,892,399 · App. 16/188,457 · Granted Jan 12, 2021

Powerless magnetic field sensing using magnetoelectric nanowires

Inventors: Jennifer S. Andrew (Gainesville, FL); David P. Arnold (Gainesville, FL); Matthew Bauer (Gainesville, FL); Xiao Wen (Beaverton, OR)
Assignee: University of Florida Research Foundation, Inc.
H01L41/125G01R33/02G01R33/06G01R33/07H01L41/06H01L41/20H01L41/47H01L41/00H01L41/16
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Quick Facts
Patent No.
US 10,892,399
App. No.
16/188,457
Granted
Jan 12, 2021
Kind
B2
Abstract

Embodiments of a magnetic field sensor of the present disclosure includes magnetoelectric nanowires suspended above a substrate across electrodes without substrate clamping. This results in enhanced magnetoelectric coupling by reducing substrate clamping when compared to layered thin-film architectures. Accordingly, the magnetoelectric nanowires of the magnetic field sensor generate a voltage response in the presence of a magnetic field.

Claims (30)

1. A magnetic field sensor device comprising:

a first electrode positioned across a second electrode, wherein an electrode gap separates the first electrode and the second electrode;

a magnetoelectric nanowire connected to the first electrode and the second electrode across the electrode gap without substrate clamping;

wherein the magnetoelectric nanowire generates a voltage response in a presence of a magnetic field.

2. The magnetic field sensor device of claim 1 , further comprising a current trace positioned perpendicular to an array of magnetoelectric nanowires, wherein the magnetic field is induced by a time varying current traveling over the current trace.

3. The magnetic field sensor device of claim 1 , wherein the magnetoelectric nanowire comprises a piezoelectric material coupled with a magnetostrictive material.

4. The magnetic field sensor device of claim 3 , wherein the piezoelectric material coupled with the magnetostrictive material comprises barium titanate coupled with cobalt ferrite.

5. The magnetic field sensor device of claim 3 , wherein the piezoelectric material coupled with the magnetostrictive material comprises PZT (lead zirconate titanate) coupled with nickel zinc (NiZn) ferrite.

6. The magnetic field sensor device of claim 1 , wherein the magnetic field sensor device comprises a series of magnetoelectric nanowires that span between respective pairs of electrodes, wherein the series of magnetoelectric nanowires include the magnetoelectric nanowire connected to the first electrode and the second electrode.

7. The magnetic field sensor device of claim 1 , wherein the magnetic field sensor device comprises a collection of magnetoelectric nanowires having respective pairs of electrodes that are coupled in parallel with one another, wherein the collection of magnetoelectric nanowires include the magnetoelectric nanowire connected to the first electrode and the second electrode.

8. The magnetic field sensor device of claim 1 , wherein the magnetoelectric nanowire comprises a Janus morphology.

9. The magnetic field sensor device of claim 1 , wherein the magnetoelectric nanowire comprises a core shell morphology.

10. The magnetic field sensor device of claim 1 , wherein the magnetoelectric nanowire comprises a randomly dispersed morphology.

11. The magnetic field sensor device of claim 1 , wherein the first electrode and the second electrode form inter-digitated electrodes.

12. A method comprising:

fabricating 1-D magnetoelectric nanofibers;

forming 1-D magnetoelectric nanofibers into shorter 1-D magnetoelectric nanowires;

using dielectrophoresis to orient a 1-D magnetoelectric nanowire across an electrode gap separating a pair of electrodes; and

measuring a voltage response induced by the 1-D magnetoelectric nanowire in a presence of a magnetic field.

13. The method of claim 12 , further comprising establishing upper electrical contacts.

14. The method of claim 12 , wherein the magnetoelectric nanowire is oriented with solvent across the electrode gap using a dielectrophoretic force.

15. The method of claim 14 , wherein the solvent comprises water, ethanol, 2-methoxyethanol, or butanol.

16. The method of claim 12 , wherein the magnetoelectric nanofibers are fabricated by sol-gel electrospinning.

17. The method of claim 12 , wherein the magnetoelectric nanowire comprises a piezoelectric material coupled with a magnetostrictive material.

18. The method of claim 12 , wherein the magnetoelectric nanowire comprises a Janus morphology.

19. The method of claim 12 , wherein the magnetoelectric nanowire comprises a core shell morphology.

20. The method of claim 12 , wherein the magnetoelectric nanowire comprises a randomly dispersed morphology.

21. The method of claim 12 , wherein the pair of electrodes forms inter-digitated electrodes.

22. The method of claim 12 , further comprising forming a sacrificial metal coating on the magnetoelectric nanowire.

23. The method of claim 22 , wherein the metal comprises copper.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 15, 2019
From: ANDREW, JENNIFER S.; ARNOLD, DAVID P.; BAUER, MATTHEW; WEN, XIAO
To: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
Reel/Frame 048003/0218 →
CONFIRMATORY LICENSE Recorded Nov 19, 2018
From: UNIVERSITY OF FLORIDA
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 047600/0761 →
Continuity (2)
Provisional Application 62585198 · Nov 13, 2017
Related Publication 20190148620A1 · May 16, 2019