Form measuring apparatus
A form measuring apparatus includes a base; an arm capable of swinging relative to the base; a coupler coupling the base and the arm, and having a deformation region that is capable of elastic deformation between the base and the arm; and a distortion detector installed in the deformation region. In the form measuring apparatus, a stylus is mounted to the arm and can slide along a surface of a work piece.
1. A form measuring apparatus comprising:
a base;
an arm configured to swing relative to the base;
a coupler that couples the base and the arm, the coupler having a deformation region that is capable of elastic deformation between the base and the arm; and
a distortion detector installed in the deformation region.
2. The form measuring apparatus according to claim 1 , further comprising a distance adjuster that adjusts a distance between the base and the arm, wherein the coupler is formed of an elastic material.
3. The form measuring apparatus according to claim 2 , further comprising a placement adjuster that adjusts a position of the distortion detector within the deformation region in the coupling direction of the base and the arm.
4. The form measuring apparatus according to claim 3 , wherein the coupler comprises at least one plate spring, a middle portion of which comprises the deformation region.
5. The form measuring apparatus according to claim 4 , wherein the at least one plate spring is least one pair of plate springs that are intersectingly arranged with each other.
6. The form measuring apparatus according to claim 4 , wherein the distortion detector comprises a pair of piezoelectric elements installed on opposing surfaces of the at least one plate spring such that the at least one plate spring is sandwiched between the pair of piezoelectric elements.
7. The form measuring apparatus according to claim 2 , wherein the coupler comprises at least one plate spring, a middle portion of which comprises the deformation region.
8. The form measuring apparatus according to claim 7 , wherein the at least one plate spring is least one pair of plate springs that are intersectingly arranged with each other.
9. The form measuring apparatus according to claim 7 , wherein the distortion detector comprises a pair of piezoelectric elements installed on opposing surfaces of the at least one plate spring such that the at least one plate spring is sandwiched between the pair of piezoelectric elements.
10. The form measuring apparatus according to claim 1 , further comprising a placement adjuster that adjusts a position of the distortion detector within the deformation region in the coupling direction of the base and the arm.
11. The form measuring apparatus according to claim 10 , wherein the coupler comprises at least one plate spring, a middle portion of which comprises the deformation region.
12. The form measuring apparatus according to claim 11 , wherein the at least one plate spring is least one pair of plate springs that are intersectingly arranged with each other.
13. The form measuring apparatus according to claim 11 , wherein the distortion detector comprises a pair of piezoelectric elements installed on opposing surfaces of the at least one plate spring such that the at least one plate spring is sandwiched between the pair of piezoelectric elements.
14. The form measuring apparatus according to claim 1 , further comprising a limiter that constrains elastic deformation of the coupler in a portion between the base and the arm, wherein the coupler is formed of an elastic material.
15. The form measuring apparatus according to claim 14 , wherein the coupler comprises at least one plate spring, a middle portion of which comprises the deformation region.
16. The form measuring apparatus according to claim 15 , wherein the at least one plate spring is least one pair of plate springs that are intersectingly arranged with each other.
17. The form measuring apparatus according to claim 15 , wherein the distortion detector comprises a pair of piezoelectric elements installed on opposing surfaces of the at least one plate spring such that the at least one plate spring is sandwiched between the pair of piezoelectric elements.
18. The form measuring apparatus according to claim 1 , wherein the coupler comprises at least one plate spring, a middle portion of which comprises the deformation region.
19. The form measuring apparatus according to claim 18 , wherein the at least one plate spring is least one pair of plate springs that are intersectingly arranged with each other.
20. The form measuring apparatus according to claim 18 , wherein the distortion detector comprises a pair of piezoelectric elements installed on opposing surfaces of the at least one plate spring such that the at least one plate spring is sandwiched between the pair of piezoelectric elements.
21. The form measuring apparatus according to claim 1 , further comprising:
a driver that is installed in the deformation region and that drives deformation of the coupler.