IP Library › Granted Patent US 10,914,846
Granted Patent B2
US 10,914,846 · App. 16/459,792 · Granted Feb 9, 2021

Image sensor

Inventors: Shuhei Nara (Kanagawa, JP); Hiroyuki Sekine (Kanagawa, JP); Takayuki Ishino (Kanagawa, JP); Fuminori Tamura (Kanagawa, JP); Yoshikazu Hatazawa (Kanagawa, JP)
Assignee: TIANMA JAPAN, LTD.
G01T1/20G01T1/2002G01T1/2018G01T1/247H01L27/1462H01L27/14612H01L27/14623H01L27/14663
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Quick Facts
Patent No.
US 10,914,846
App. No.
16/459,792
Granted
Feb 9, 2021
Kind
B2
Abstract

An image sensor includes: a switching element disposed on a substrate; a photoelectric conversion element connected to the switching element; a first protective film directly covering the photoelectric conversion element; and a first organic film formed at a layer above the switching element, the first organic film being in contact with the first protective film, wherein the first organic film covers a first end portion of the photoelectric conversion element, the first end portion being at least a part of an end portion of the photoelectric conversion element, wherein the first organic film has a first covering portion at an end of the first organic film, wherein the first covering portion covers the first end portion, wherein the first covering portion is inclined down towards the photoelectric conversion element, and wherein the first organic film covers only the first end portion of the photoelectric conversion element.

Claims (36)

1. An image sensor, comprising:

a switching element disposed on a substrate;

a photoelectric conversion element connected to the switching element;

a first protective film directly covering the photoelectric conversion element; and

a first organic film formed at a layer above the switching element, the first organic film being in contact with the first protective film,

wherein the first organic film covers a first end portion of the photoelectric conversion element, the first end portion being at least a part of an end portion of the photoelectric conversion element,

wherein the first organic film has a first covering portion at an end of the first organic film,

wherein the first covering portion covers the first end portion,

wherein the first covering portion is inclined down towards the photoelectric conversion element, and

wherein the first organic film covers only the first end portion of the photoelectric conversion element.

2. The image sensor according to claim 1 , wherein the first covering portion has a refractive index that is higher than a refractive index of a medium that is formed directly over the first covering portion.

3. The image sensor according to claim 1 , further comprising a second protective film that directly covers the first organic film, wherein the second protective film has a direct cover portion that directly covers the first covering portion, and

wherein the direct cover portion is inclined down towards the photoelectric conversion element.

4. The image sensor according to claim 3 , wherein the second protective film has a refractive index that is higher than a refractive index of a medium that is formed directly over the second protective film.

5. The image sensor according to claim 3 , wherein the second protective film directly covers the first protective film, and

wherein the first protective film and the second protective film each are an inorganic film.

6. The image sensor according to claim 3 , further comprising a plurality of pixels arranged in a matrix,

wherein the plurality of pixels each include the switching element and the photoelectric conversion element,

wherein the first organic film is disposed between the photoelectric conversion elements and outside an outermost photoelectric conversion element, the outermost photoelectric conversion element being a photoelectric conversion element located at an outermost position in the plurality of pixels,

wherein the first organic film has an end portion that is located outside the outermost photoelectric conversion element, and

wherein the end portion of the first organic film is directly covered by the second protective film.

7. The image sensor according to claim 1 , further comprising a third protective film that directly covers a wiring line formed at a layer above the first organic film.

8. The image sensor according to claim 1 , further comprising a second organic film at a layer above the first organic film.

9. The image sensor according to claim 1 , further comprising a plurality of the photoelectric conversion elements; and a plurality of the first protective films separated from each other,

wherein the plurality of first protective films directly cover the plurality of photoelectric conversion elements, respectively.

10. The image sensor according to claim 1 , further comprising a plurality of the photoelectric conversion elements,

wherein the first protective film having a plurality of portions connected to each other directly covers the plurality of photoelectric conversion elements.

11. The image sensor according to claim 1 , further comprising a plurality of pixels arranged in a matrix,

wherein the plurality of pixels each include the switching element and the photoelectric conversion element,

wherein the image sensor includes:

a gate line and a signal line connected to the switching element;

a scanning unit that selects a pixel row made of pixels arranged in a row direction and outputs an output signal to a pixel of the selected pixel row to turn on the switching element; and

a detection unit that detects a signal from a photoelectric conversion element of the pixel of the selected pixel row through the switching element that is turned on and the signal line,

wherein the signal line is separated from the photoelectric conversion element through the first organic film.

12. The image sensor according to claim 1 , further comprising a switching element protective film that covers the switching element,

wherein the photoelectric conversion element and the first organic film are disposed on the switching element protective film.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2019
From: NARA, SHUHEI; SEKINE, HIROYUKI; ISHINO, TAKAYUKI; TAMURA, FUMINORI; HATAZAWA, YOSHIKAZU
To: TIANMA JAPAN, LTD.
Reel/Frame 049650/0807 →
Priority Claims (1)
JP 2018-126170 · Jul 2, 2018 · national
Continuity (1)
Related Publication 20200003911A1 · Jan 2, 2020