Paste composition and method for forming silicon germanium layer
This invention provides a paste composition that enables a silicon germanium layer to be formed safely and easily, and a method for forming a silicon germanium layer safely and easily. The present invention provides a paste composition for forming a silicon germanium layer, the composition comprising aluminum and germanium, wherein the content of the germanium is more than 1 part by mass and 10000 parts by mass or less, per 100 parts by mass of the aluminum.
1. A paste composition for forming a silicon germanium layer, the composition comprising aluminum, germanium and resin component, wherein the germanium is in a form of a germanium powder having a germanium purity of 98.0 mass % or more, the content of the germanium is more than 1 part by mass and 10000 parts by mass or less, per 100 parts by mass of the aluminum, and the content of the resin component is 0.1 to 10 parts by mass, per 100 parts by mass of the aluminum.
2. The paste composition according to claim 1 , which further comprises a glass component.
3. The paste composition according to claim 2 , wherein the content of the glass component is 0.01 to 3 parts by mass, per 100 parts by mass of the aluminum.
4. A method for forming a silicon germanium layer, the method comprising the steps of:
(1) step 1 of applying a paste composition to a silicon-containing substrate, the paste composition comprising aluminum, germanium and resin component, wherein the germanium is in a form of a germanium powder having a germanium purity of 98.0 mass % or more, the content of the germanium is more than 1 part by mass and 10000 parts by mass or less, per 100 parts by mass of the aluminum, and the content of the resin component is 0.1 to 10 parts by mass, per 100 parts by mass of the aluminum; and
(2) step 2 of sintering the silicon-containing substrate to which the paste composition is applied.
5. The method according to claim 4 , wherein the sintering is performed at a temperature of 500 to 1000° C.