Semiconductor apparatus and method for preparing the same
The present disclosure is directed to a method for preparing a semiconductor apparatus having a plurality of bonded semiconductor devices formed by a fusion bonding technique and a method for preparing the same. The method includes the steps of forming a first semiconductor device having a first conductive portion, a first dielectric portion adjacent to the first conductive portion, and a depression at an upper surface of the first conductive portion; forming a second semiconductor device having a second conductive portion and a second dielectric portion adjacent to the second conductive portion; disposing the first semiconductor device and the second semiconductor device in a manner such that the first conductive portion faces the second conductive portion; and expanding at least one of the first conductive portion and the second conductive portion to fill the depression.
1. A method for preparing a semiconductor apparatus, comprising:
forming a first semiconductor device having a first conductive portion, a first dielectric portion adjacent to the first conductive portion, and a depression at an upper surface of the first conductive portion;
forming a second semiconductor device having a second conductive portion and a second dielectric portion adjacent to the second conductive portion;
disposing the first semiconductor device and the second semiconductor device in a manner such that the first conductive portion faces the second conductive portion; and
expanding at least one of the first conductive portion and the second conductive portion to fill the depression;
wherein the forming of the first semiconductor device comprises:
forming a first dielectric layer over a semiconductor substrate;
forming a patterned mask with an aperture on the first dielectric layer;
removing a portion of the first dielectric layer under the aperture to form an opening in the first dielectric layer;
removing the patterned mask on the first dielectric layer; and
forming the first conductive portion in the opening, wherein an upper surface of the first conductive portion is curvilinear and an edge of the upper surface of the first conductive portion is substantially coplanar with an upper surface of the first dielectric layer;
wherein the forming of the first conductive portion in the opening comprises:
forming a conductive layer over the first dielectric layer and filling the opening;
performing a planarization process to remove a portion of the conductive layer from the upper surface of the first dielectric layer; and
performing a selective etching process to remove an upper portion of the conductive layer in the opening to form the depression.
2. The method for preparing a semiconductor apparatus of claim 1 , wherein a coefficient of thermal expansion of the first conductive portion is higher than that of the first dielectric portion, and expanding at least one of the first conductive portion and the second conductive portion comprises performing a thermal treating process that expands a thickness of the first conductive portion more than a thickness of the first dielectric portion.
3. The method for preparing a semiconductor apparatus of claim 2 , wherein the first conductive portion having the depression is formed at a first temperature, and the thermal treating process heats at least one of the first conductive portion and the second conductive portion to a second temperature higher than the first temperature.
4. The method for preparing a semiconductor apparatus of claim 1 , wherein the depression separates the first conductive portion from the second conductive portion, and the first dielectric portion contacts the second dielectric portion.