Semiconductor device having stacked semiconductor chips and method for fabricating the same
A method for manufacturing a semiconductor device includes stacking, on a package substrate, first semiconductor chips. Each of the first semiconductor chips includes a first adhesive film. The method includes stacking, respectively on the first semiconductor chips, second semiconductor chips. Each of the second semiconductor chips includes a second adhesive film. The method includes compressing the first and second adhesive films to form an adhesive structure. The adhesive structure includes an extension disposed on sidewalls of the first and second semiconductor chips. The method includes removing the extension. The method includes forming a first molding layer substantially covering the first and second semiconductor chips. The method includes performing a cutting process on the package substrate between the first and second semiconductor chips to form a plurality of semiconductor packages each including at least one of the first semiconductor chips and at least one of the second semiconductor chips.
1. A semiconductor device, comprising:
semiconductor chips stacked on a package substrate;
a through via penetrating at least one of the semiconductor chips and electrically connecting the semiconductor chips to each other;
a first molding layer covering a sidewall of an uppermost one of the semiconductor chips;
an adhesive layer covering sidewalls of the semiconductor chips except for the uppermost one of the semiconductor chips, wherein a side surface of the adhesive layer includes a plurality of protrusions; and
a second molding layer covering the side surface of the adhesive layer and a bottom surface of the first molding layer.
2. The semiconductor device of claim 1 , wherein the adhesive layer fills a space between the semiconductor chips adjacent to each other.
3. The semiconductor device of claim 1 , further comprising an interconnect member interposed between the semiconductor chips adjacent to each other and electrically connected to the through via.
4. The semiconductor device of claim 1 , wherein the adhesive layer is spaced apart from the sidewall of the uppermost one of the semiconductor chips.
5. The semiconductor device of claim 1 , wherein the adhesive layer covers a bottom surface of the uppermost one of the semiconductor chips.
6. The semiconductor device of claim 1 , wherein a top surface of the uppermost one of the semiconductor chips is coplanar with a top surface of the first molding layer.
7. A semiconductor device, comprising:
semiconductor chips stacked on a package substrate, the semiconductor chips including a first semiconductor chip that is a lowermost one of the semiconductor chips and a second semiconductor chip that is an uppermost one of the semiconductor chips;
a through via penetrating the first semiconductor chip;
an adhesive layer filling a space between the first semiconductor chip and the package substrate, and covering a sidewall of the first semiconductor chip and a bottom surface of the second semiconductor chip; and
a first molding layer covering a sidewall of only the second semiconductor chip of the semiconductor chips.
8. The semiconductor device of claim 7 , further comprising an interconnect member interposed between the first semiconductor chip and the package substrate, and electrically connected to the through via.
9. The semiconductor device of claim 7 , wherein the adhesive layer is spaced apart from the sidewall of the second semiconductor chip.
10. The semiconductor device of claim 7 , further comprising a second molding layer covering a side surface of the adhesive layer and a bottom surface of the first molding layer.
11. The semiconductor device of claim 10 , wherein the side surface of the adhesive layer includes a plurality of protrusions.
12. The semiconductor device of claim 7 , wherein a top surface of the second semiconductor chip is coplanar with a top surface of the first molding layer.
13. A semiconductor device, comprising:
a plurality of semiconductor chips stacked on a package substrate, the semiconductor chips including a first semiconductor chip that is a lowermost one of the semiconductor chips, a second semiconductor chip that is an uppermost one of the semiconductor chips and a third semiconductor chip between the first and second semiconductor chips;
a through via penetrating the third semiconductor chip;
a first molding layer on sidewalls of the first and third semiconductor chips; and
a second molding layer on the first mold layer,
wherein the second molding layer covers a sidewall of the second semiconductor chip, and
wherein the first molding layer is spaced apart from the sidewall of the second semiconductor chip.
14. The semiconductor device of claim 13 , wherein a top surface of the first molding layer is at a level between a top surface of the third semiconductor chip and a bottom surface of the second semiconductor chip.
15. The semiconductor device of claim 13 , further comprising an interconnect member interposed between the first and third semiconductor chips and electrically connected to the through via.
16. The semiconductor device of claim 13 , wherein a top surface of the second semiconductor chip is coplanar with a top surface of the second molding layer.
17. The semiconductor device of claim 13 , wherein the second molding layer includes a material different from that of the first molding layer.