Acoustic wave device, high frequency front-end circuit, and communication device
An acoustic wave device includes a supporting substrate, an acoustic reflection film the supporting substrate, a piezoelectric thin film on the acoustic reflection film, and an interdigital transducer electrode the piezoelectric thin film. The acoustic reflection film includes acoustic impedance layers including therein first, second, third, and fourth low acoustic impedance layers and first, second, and third high acoustic impedance layers. The acoustic reflection film includes a first acoustic impedance layer and a second acoustic impedance layer, the first and second acoustic impedance layers each being one of the acoustic impedance layers, and the second acoustic impedance layer has an arithmetic average roughness different from that of the first acoustic impedance layer.
1. An acoustic wave device comprising:
a supporting substrate;
an acoustic reflection film provided on the supporting substrate;
a piezoelectric body provided on the acoustic reflection film; and
an interdigital transducer electrode provided on the piezoelectric body; wherein
the acoustic reflection film is a multilayer body including a plurality of acoustic impedance layers including a low acoustic impedance layer whose acoustic impedance is relatively low and a high acoustic impedance layer whose acoustic impedance is relatively high; and
the acoustic reflection film includes a first acoustic impedance layer and a second acoustic impedance layer, the first acoustic impedance layer being one of the plurality of acoustic impedance layers, the second acoustic impedance layer being one of the plurality of acoustic impedance layers and having an arithmetic average roughness different from an arithmetic average roughness of the first acoustic impedance layer.
2. The acoustic wave device according to claim 1 , wherein
the first acoustic impedance layer is positioned closer to the piezoelectric body than the second acoustic impedance layer; and
the arithmetic average roughness of the second acoustic impedance layer is larger than the arithmetic average roughness of the first acoustic impedance layer.
3. The acoustic wave device according to claim 2 , wherein
the acoustic reflection film includes a plurality of the low acoustic impedance layers and a plurality of the high acoustic impedance layers that are stacked on top of one another in an alternating arrangement;
the first acoustic impedance layer and the second acoustic impedance layer are each defined by one of the plurality of low acoustic impedance layers, and
in the plurality of the low acoustic impedance layers, the arithmetic average roughness increases as a position of the low acoustic impedance layer is closer to the supporting substrate.
4. The acoustic wave device according to claim 2 , wherein
the acoustic reflection film includes a plurality of the low acoustic impedance layers and a plurality of the high acoustic impedance layers that are stacked on top of one another in an alternating arrangement;
the first acoustic impedance layer and the second acoustic impedance layer are each defined by one of the plurality of high acoustic impedance layers; and
in the plurality of the high acoustic impedance layers, the arithmetic average roughness increases as a position of the high acoustic impedance layer is closer to the supporting substrate.
5. The acoustic wave device according to claim 1 , wherein
the first acoustic impedance layer is positioned closer to the piezoelectric body than the second acoustic impedance layer; and
the arithmetic average roughness of the first acoustic impedance layer is larger than the arithmetic average roughness of the second acoustic impedance layer.
6. The acoustic wave device according to claim 5 , wherein
the acoustic reflection film includes a plurality of the low acoustic impedance layers and a plurality of the high acoustic impedance layers that are stacked on top of one another in an alternating arrangement;
the first acoustic impedance layer and the second acoustic impedance layer are each defined by one of the plurality of low acoustic impedance layers; and
in the plurality of the low acoustic impedance layers, the arithmetic average roughness increases as a position of the low acoustic impedance layer is closer to the piezoelectric body.
7. The acoustic wave device according to claim 5 , wherein
the acoustic reflection film includes a plurality of the low acoustic impedance layers and a plurality of the high acoustic impedance layers that are stacked on top of one another in an alternating arrangement;
the first acoustic impedance layer and the second acoustic impedance layer are each defined by one of the plurality of high acoustic impedance layers; and
in the plurality of the high acoustic impedance layers, the arithmetic average roughness increases as a position of the high acoustic impedance layer is closer to the piezoelectric body.
8. The acoustic wave device according to claim 1 , wherein in the acoustic reflection film, a total of five or more layers including one or more of the low acoustic impedance layer and one or more of the high acoustic impedance layer are stacked on top of one another in an alternating arrangement.
9. The acoustic wave device according to claim 1 , wherein
a metal film is provided on a surface on an acoustic reflection film side of the piezoelectric body; and
the metal film is surrounded by a dielectric member.
10. The acoustic wave device according to claim 9 , wherein the dielectric member is the acoustic impedance layer of the acoustic reflection film positioned closest to the piezoelectric body.
11. The acoustic wave device according to claim 9 , wherein in plan view, the metal film is provided at a position where the metal film does not overlap the interdigital transducer electrode.
12. The acoustic wave device according to claim 9 , wherein the metal film includes at least one of Ti and Cr.
13. The acoustic wave device according to claim 1 , wherein a plate wave is used.
14. The acoustic wave device according to claim 1 , wherein a film thickness of the piezoelectric body is about 1 μm or less.
15. A high frequency front-end circuit comprising:
the acoustic wave device according to claim 1 ; and
a power amplifier.
16. The high frequency front-end circuit according to claim 15 , wherein
the first acoustic impedance layer is positioned closer to the piezoelectric body than the second acoustic impedance layer; and
the arithmetic average roughness of the second acoustic impedance layer is larger than the arithmetic average roughness of the first acoustic impedance layer.
17. The high frequency front-end circuit according to claim 16 , wherein
the acoustic reflection film includes a plurality of the low acoustic impedance layers and a plurality of the high acoustic impedance layers that are stacked on top of one another in an alternating arrangement;
the first acoustic impedance layer and the second acoustic impedance layer are each defined by one of the plurality of low acoustic impedance layers, and
in the plurality of the low acoustic impedance layers, the arithmetic average roughness increases as a position of the low acoustic impedance layer is closer to the supporting substrate.
18. The high frequency front-end circuit according to claim 16 , wherein
the acoustic reflection film includes a plurality of the low acoustic impedance layers and a plurality of the high acoustic impedance layers that are stacked on top of one another in an alternating arrangement;
the first acoustic impedance layer and the second acoustic impedance layer are each defined by one of the plurality of high acoustic impedance layers; and
in the plurality of the high acoustic impedance layers, the arithmetic average roughness increases as a position of the high acoustic impedance layer is closer to the supporting substrate.
19. The high frequency front-end circuit according to claim 15 , wherein
the first acoustic impedance layer is positioned closer to the piezoelectric body than the second acoustic impedance layer; and
the arithmetic average roughness of the first acoustic impedance layer is larger than the arithmetic average roughness of the second acoustic impedance layer.
20. A communication device comprising:
the high frequency front-end circuit according to claim 15 ; and
a RF signal processing circuit.