Gas diffuser support structure for reduced particle generation
Embodiments of the present disclosure generally provide apparatus and methods for gas diffuser support structure for a vacuum chamber. The gas diffuser support structure comprises a backing plate having a central bore formed therethrough, an integrated cross structure formed in the central bore, and a gas deflector coupled to the cross structure by a single fastener.
1. A gas diffuser support structure for a vacuum chamber, the gas diffuser support structure comprising:
a backing plate made of a material;
a central bore formed in the backing plate;
a cross structure formed in the material of the backing plate and positioned at a bottom of the central bore; and
a gas deflector coupled to the cross structure by a single fastener coupled to a threaded hole formed in the cross structure.
2. The gas diffuser support structure of claim 1 , wherein the cross structure comprises a plurality of spokes.
3. The gas diffuser support structure of claim 2 , wherein openings are formed between the spokes.
4. The gas diffuser support structure of claim 3 , wherein the openings include an open area of about 7 square inches.
5. The gas diffuser support structure of claim 2 , wherein each of the spokes intersects at a hub.
6. The gas diffuser support structure of claim 5 , wherein the hub is positioned at a geometric center of the backing plate.
7. The gas diffuser support structure of claim 5 , wherein the single fastener is coupled to the threaded hole at the hub.
8. The gas diffuser support structure of claim 2 , wherein the plurality of spokes are positioned at 90 degree intervals.
9. A gas diffuser support structure for a vacuum chamber, the gas diffuser support structure comprising:
a backing plate having a central bore formed therein; and
an integrated cross structure formed in a bottom of the central bore, wherein the cross structure comprises a plurality of spokes that separate a plurality of openings, and wherein a threaded hole is formed in the cross structure at an intersection of each of the plurality of spokes.
10. The gas diffuser support structure of claim 9 , wherein the plurality of spokes are positioned at 90 degree intervals.
11. The gas diffuser support structure of claim 9 , wherein the plurality of openings includes an open area of about 7 square inches.
12. The gas diffuser support structure of claim 9 , wherein each of the spokes intersect at a hub, and the threaded hole is formed in the hub.
13. The gas diffuser support structure of claim 12 , wherein the hub is positioned at a geometric center of the backing plate.
14. The gas diffuser support structure of claim 9 , further comprising:
a gas deflector coupled to the cross structure by a single fastener disposed in the threaded hole.
15. The gas diffuser support structure of claim 14 , wherein the single fastener is coupled to the cross structure at a geometric center of the backing plate.
16. A gas diffuser support structure for a vacuum chamber, the gas diffuser support structure comprising:
a backing plate made of an aluminum material and having a central bore formed therein;
a cross structure positioned in the central bore, wherein the cross structure comprises a plurality of spokes made of the aluminum material of the backing plate that separate a plurality of openings that are in fluid communication with the central bore; and
a gas deflector coupled to the cross structure by a single threaded fastener.
17. The gas diffuser support structure of claim 16 , wherein each of the spokes intersects at a hub.
18. The gas diffuser support structure of claim 17 , wherein the hub is positioned at a geometric center of the backing plate.
19. The gas diffuser support structure of claim 17 , wherein the single fastener is coupled to a threaded hole formed in the hub.
20. The gas diffuser support structure of claim 16 , wherein the plurality of spokes are positioned at 90 degree intervals.