Microelectromechanical systems switch die

1. A MEMS switch system comprising:

a MEMS switch die comprised of:

an N number of radio frequency (RF) MEMS switches, each having an anchored beam with a switch contact, a gate, and a terminal contact, wherein N is a counting number; and

a MEMS-based decoder comprised of logic MEMS switches arranged to form at least one logic gate, the MEMS-based decoder configured to:

decode coded signals to determine which of the N number of RF MEMS switches to open and close;

apply a higher gate voltage to each gate of the N number of RF MEMS switches determined to be closed, wherein the higher gate voltage electrostatically pulls the anchored beam and brings the switch contact into electrical contact with the terminal contact; and

apply a lower gate voltage to each gate of the N number of RF MEMS switches to be open, wherein the lower gate voltage releases the anchored beam and allows the switch contact to break electrical contact with the terminal contact, wherein,

a first logic MEMS switch has a first beam with a first switch contact, a first gate, and a first terminal contact, wherein the first beam is coupled to a fixed higher voltage node;

a second logic MEMS switch has a second beam with a second switch contact, a second gate, and a second terminal contact, wherein the second beam is electrically coupled to a fixed lower voltage node; and

an internal logic gate circuitry has a first input terminal and a first output terminal, wherein the internal logic gate circuitry is electrically coupled between the first terminal contact of the first logic MEMS switch and the second terminal contact of the second logic MEMS switch; and

a MEMS controller having control lines electrically coupled to the MEMS-based decoder, wherein the MEMS controller is configured to output the coded signals over the control lines to the MEMS-based decoder, wherein the coded signals represent desired switch states of the N number of RF MEMS switches.

2. The MEMS switch system of claim 1 wherein the MEMS controller further comprises a charge pump configured to generate the higher gate voltage that electrostatically pulls the anchored beam and brings the switch contact into electrical contact with the terminal contact.

3. The MEMS switch system of claim 2 wherein the charge pump is further configured to provide the higher gate voltage to additional MEMS dies.

4. The MEMS switch system of claim 2 wherein the charge pump is further configured to provide at least one separate higher gate voltage to the MEMS-based decoder.

5. The MEMS switch system of claim 1 further comprising a processor that is communicatively coupled to the MEMS controller and configured to issue commands to the MEMS-based controller to follow in order to generate the coded signals representing the desired switch states of the N number of RF MEMS switches.

6. The MEMS switch system of claim 1 further including a plurality of signal terminals wherein the N number of RF MEMS switches are electrically coupled between individual corresponding ones of the plurality of signal terminals and at least one other signal terminal that is not one of the plurality of signal terminals.

7. The MEMS switch system of claim 6 further comprising a plurality of shunt MEMS switches, one for each of the N number of RF MEMS switches, in which a corresponding one of the plurality of shunt MEMS switches is electrically coupled between corresponding ones of the plurality of signal terminals and a fixed voltage node.

8. The MEMS switch system of claim 7 wherein the fixed voltage node is ground.

9. The MEMS switch system of claim 7 wherein the MEMS-based decoder is further configured to open corresponding ones of the plurality of shunt MEMS switches before closing corresponding ones of the N number of RF MEMS switches, and vice versa.

10. The MEMS switch system of claim 1 wherein a number of control lines K needed for controlling the switching of N number of RF MEMS switches is provided in an equation N=2 K −1, wherein K is a natural counting number.

11. The MEMS switch system of claim 1 wherein a lower voltage of the fixed lower voltage node applied to the first gate and a higher voltage of the fixed higher voltage node provides a voltage difference that electrostatically pulls the first beam such that the first switch contact comes into electrical contact with the first terminal contact.

12. The MEMS switch system of claim 1 wherein a higher voltage of the fixed higher voltage node applied to the second gate and a lower voltage of the fixed lower voltage node provides a voltage difference that electrostatically pulls the second beam such that the second switch contact comes into electrical contact with the second terminal contact.

13. The MEMS switch system of claim 1 wherein a voltage difference between the fixed higher voltage node and the fixed lower voltage node is between 40 V and 80 V.

14. The MEMS switch system of claim 1 wherein the internal logic gate circuitry electrically couples the first input terminal to both the first gate and the second gate and electrically couples the first output terminal to both the first terminal contact and the second terminal contact to configure the MEMS logic gate as an inverter gate.

15. The MEMS switch system of claim 1 wherein the internal logic gate circuitry further comprises:

a second input terminal;

a third logic MEMS switch having a third beam with a third switch contact electrically coupled to the first terminal contact, a third gate electrically coupled to the second input terminal, and a third terminal contact electrically coupled to the first output terminal; and

a fourth logic MEMS switch having a fourth beam with a fourth switch contact electrically coupled to the fixed lower voltage node, a fourth gate coupled to the first input terminal, and a fourth terminal contact electrically coupled to the first output terminal.

16. The MEMS switch system of claim 15 wherein the first gate of the first logic MEMS switch is coupled to the first input terminal and the second gate of the second logic MEMS switch is coupled to the second input terminal to configure the MEMS logic gate as a NOR gate.

17. The MEMS switch system of claim 1 wherein the internal logic gate circuitry further comprises:

a second input terminal;

a third logic MEMS switch having a third beam with a third switch contact electrically coupled to the fixed higher voltage node, a third gate electrically coupled to the first input terminal, and a third terminal contact electrically coupled to the first output terminal; and

a fourth logic MEMS switch having a fourth beam with a fourth switch contact electrically coupled to the second terminal contact of the second logic MEMS switch, a fourth gate coupled to the second input terminal, and a fourth terminal contact electrically coupled to the first output terminal.

18. The MEMS switch system of claim 17 wherein the first gate of the first logic MEMS switch is coupled to the second input terminal and the second gate of the second logic MEMS switch is coupled to the first input terminal to configure the MEMS logic gate as a NAND gate.

19. The MEMS switch system of claim 16 wherein the internal logic gate circuitry further comprises:

a second output terminal;

a fifth logic MEMS switch having a fifth beam with a fifth switch contact, a fifth gate coupled to the first output terminal, and a fifth terminal contact coupled to the second output terminal, wherein the fifth beam is coupled to the fixed higher voltage node;

a sixth logic MEMS switch having a sixth beam with a sixth switch contact, a sixth gate coupled to the first output terminal, and a sixth terminal contact coupled to the second output terminal, wherein the sixth beam is electrically coupled to the fixed lower voltage node to configure the MEMS logic gate as an AND gate.

20. The MEMS switch system of claim 1 wherein the MEMS logic gate includes a NAND logic gate section.

21. The MEMS switch system of claim 20 wherein the NAND logic gate section takes up no more area than 80 μm by 40 μm of the MEMS switch die.