Laser processing apparatus
A liquid supply mechanism is disposed on an upper portion of a holding unit of a laser processing apparatus. The liquid supply mechanism includes: a liquid chamber having a transparent plate positioned such that a gap is formed between the transparent plate and the top surface of a workpiece held on a holding table; a linear-motion mechanism configured to linearly move the transparent plate over the liquid chamber; a liquid supply nozzle configured to supply a liquid from one side of the liquid chamber to the gap; and a liquid discharge nozzle configured to discharge the liquid from another side of the liquid chamber. A laser beam irradiating unit includes a laser oscillator configured to irradiate the workpiece through the transparent plate and the liquid supplied to the gap.
1. A laser processing apparatus comprising:
a holding unit including a holding table configured to hold a plate-shaped workpiece;
a laser beam irradiating unit configured to process the workpiece held on the holding table by irradiating the workpiece with a laser beam; and
a liquid supply mechanism disposed on an upper portion of the holding unit;
the liquid supply mechanism including a liquid chamber having a transparent plate positioned such that a gap is formed between the transparent plate and a top surface of the workpiece held on the holding table, a linear-motion mechanism configured to linearly move the transparent plate over the liquid chamber, a liquid supply nozzle configured to supply a liquid from one side of the liquid chamber to the gap, and a liquid discharge nozzle configured to discharge the liquid from another side of the liquid chamber, and
the laser beam irradiating unit including a laser oscillator configured to emit the laser beam and a condenser configured to condense the laser beam emitted from the laser oscillator and irradiate the workpiece held on the holding table with the laser beam through the transparent plate and the liquid supplied to the gap.
2. The laser processing apparatus according to claim 1 , wherein
the laser beam irradiating unit further includes dispersing means dispersing the laser beam emitted from the laser oscillator.