IP Library › Granted Patent US 10,943,864
Granted Patent B2
US 10,943,864 · App. 16/469,100 · Granted Mar 9, 2021

Programmable redistribution die

Inventors: Eng Huat Goh (Penang, MY); Min Suet Lim (Simpang Ampat, MY); J-Wing Teh (Teluk Intan, MY); Bok Eng Cheah (Bukit Gambir, MY)
Assignee: Intel Corporation
H01L23/525H01L23/481H01L24/02H01L24/13H01L24/16H01L24/17H01L25/50H01L27/0203H01L2224/02372H01L2224/02375H01L2224/13024H01L2224/13025H01L2224/16145H01L2224/16225H01L2224/17181
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Quick Facts
Patent No.
US 10,943,864
App. No.
16/469,100
Granted
Mar 9, 2021
Kind
B2
Abstract

A device and method of utilizing a programmable redistribution die to redistribute the outputs of semiconductor dies. Integrated circuit packages using a programmable redistribution die are shown. Methods of creating a programmable redistribution die are shown.

Claims (52)

1. A programmable redistribution die, comprising:

a bulk silicon layer including a plurality of vertical interconnects;

a programmable redistribution layer including a programmable signal redistribution grid; wherein the programmable redistribution layer is electrically coupled to the bulk silicon layer; and

wherein the programmable signal redistribution grid is configurable to select a signal path of a signal and to select any one of a plurality of substrate interconnects to output the signal, wherein the programmable signal redistribution grid includes:

a transistor gate layer;

a vertical grid layer including vertical interconnects; and

a horizontal grid layer including horizontal interconnects, the horizontal grid layer electrically coupled to the vertical grid layer.

2. The programmable redistribution die of claim 1 , wherein the transistor gate layer includes a configurable router.

3. The programmable redistribution die of claim 2 , wherein the configurable router includes multiplexers electrically coupled to the vertical grid layer and the horizontal grid layer.

4. The programmable redistribution die of claim 1 , further including an active layer electrically coupled to the bulk silicon layer, wherein the bulk silicon layer is located between the active layer and the programmable redistribution layer.

5. The programmable redistribution die of claim 4 , wherein the active layer includes:

a set of transistors; and

a set of metal layers.

6. The programmable redistribution die of claim 1 , further including a central processing unit.

7. The programmable redistribution die of claim 1 , wherein the vertical interconnects are through silicon via interconnects.

8. A semiconductor device, comprising:

a programmable redistribution die including:

a bulk silicon layer including vertical interconnects; and

a programmable redistribution layer including a programmable signal redistribution grid, the programmable redistribution layer electrically coupled to the bulk silicon layer;

a semiconductor die attached to a first side of the programmable redistribution die; and

a substrate attached to a second side of the programmable redistribution die.

9. The semiconductor device of claim 8 , wherein the programmable signal redistribution grid includes:

a transistor gate layer including a configurable router;

a vertical grid layer including vertical interconnects; and

a horizontal grid layer including horizontal interconnects, the horizontal grid layer electrically coupled to the vertical grid layer.

10. The semiconductor device of claim 9 , wherein the configurable router includes multiplexers electrically coupled to the vertical grid layer and the horizontal grid layer.

11. The semiconductor device of claim 8 , further including an active layer, wherein the active layer includes:

a set of transistors; and

a set of metal layers.

12. The semiconductor device of claim 11 , wherein the active layer is included in the programmable redistribution die and is electrically is coupled to the hulk silicon layer, wherein the bulk silicon layer is located between the active layer and the programmable redistribution layer.

13. The semiconductor device of claim 12 , wherein the programmable redistribution die includes a central processing unit.

14. The semiconductor device of claim 12 , wherein the semiconductor die is a memory die.

15. The semiconductor device of claim 11 , wherein the active layer is included in the semiconductor die, wherein the active layer is electrically coupled to the bulk silicon layer of the programmable redistribution die.

16. The semiconductor device of claim 15 , wherein the semiconductor die is a central processing unit.

17. The semiconductor device of claim 8 , wherein the bulk silicon lave includes through silicon via interconnects.

18. A method comprising:

forming a programmable redistribution die including:

forming a bulk silicon layer including a plurality of through silicon via interconnects; and

forming a programmable redistribution layer including a programmable signal redistribution grid, the programmable redistribution layer electrically coupled to the bulk silicon layer;

attaching a semiconductor die to a first side of the programmable redistribution die; and

attaching a substrate to a second side of the programmable redistribution die, the second side opposite the first side.

19. The method of claim 18 , wherein forming the programmable signal redistribution grid includes:

forming a transistor gate layer;

forming a vertical grid layer including vertical interconnects; and

forming a horizontal grid layer including horizontal interconnects, the horizontal grid layer electrically coupled to the vertical grid layer.

20. The method of claim 19 , wherein forming the transistor gate layer includes forming a configurable router.

21. The method of claim 20 , wherein forming the configurable router includes forming multiplexers electrically coupled to the vertical grid layer and the horizontal grid layer.

22. The method of claim 18 , wherein forming the programmable redistribution die further includes forming an active layer, wherein the active layer is electrically coupled to the bulk silicon layer, wherein the bulk silicon layer is located between the active layer and the programmable redistribution layer.

23. The method of claim 22 , wherein forming the active layer includes:

forming a set of transistors; and

forming a set of metal layers.

24. The method of claim 18 , wherein forming the programmable redistribution die includes using silicon lithographic techniques.

Priority Claims (1)
MY PI 2016704869 · Dec 29, 2016 · national
Continuity (1)
Related Publication 20200083157A1 · Mar 12, 2020