Semiconductor device and method for fabricating the same
A method for fabricating semiconductor device includes: forming a fin-shaped structure on a substrate, wherein the fin-shaped structure is extending along a first direction; forming a gate layer on the fin-shaped structure; removing part of the gate layer and part of the fin-shaped structure to form a first trench for dividing the fin-shaped structure into a first portion and a second portion, wherein the first trench is extending along a second direction; forming a patterned mask on the gate layer and into the first trench; removing part of the gate layer and part of the fin-shaped structure to form a second trench, wherein the second trench is extending along the first direction; and filling a dielectric layer in the first trench and the second trench.
1. A semiconductor device, comprising:
a first gate structure and a second gate structure on a shallow trench isolation (STI), wherein the first gate structure contacts the STI directly;
a first hard mask on the first gate structure and a second hard mask on the second gate structure; and
a gate isolation structure between the first gate structure and the second gate structure, wherein a top surface of the gate isolation structure is lower than a top surface of the first gate structure and bottom surfaces of the gate isolation structure and the first gate structure are coplanar.
2. The semiconductor device of claim 1 , wherein the first gate structure and the second gate structure contact the gate isolation structure directly.
3. The semiconductor device of claim 1 , wherein a sidewall of the gate isolation structure is aligned with a sidewall of the first hard mask.
4. The semiconductor device of claim 1 , further comprising:
a first spacer adjacent to the first gate structure and on the gate isolation structure; and
a second spacer adjacent to the second gate structure and on the gate isolation structure.
5. The semiconductor device of claim 4 , further comprising a contact etch stop layer (CESL) on the gate isolation structure and between the first spacer and the second spacer.
6. The semiconductor device of claim 5 , further comprising an interlayer dielectric (ILD) layer on the CESL, wherein top surfaces of the ILD layer and the first hard mask are coplanar.
7. The semiconductor device of claim 1 , wherein the gate isolation structure contacts the first gate structure directly.
8. The semiconductor device of claim 4 , wherein a sidewall of the first spacer is aligned with a sidewall of the gate isolation structure.
9. The semiconductor device of claim 4 , wherein the first spacer contacts a top surface of the gate isolation structure directly.