Transport system, mover, control apparatus, and control method

1. A transport system comprising:

a mover having a first magnet group and a second magnet group, the first magnet group including a plurality of first magnets arranged along a first direction and a second magnet group including a plurality of second magnets arranged along a second direction crossing the first direction; and

a plurality of coils arranged along the first direction so as to be able to face the first magnet group and the second magnet group,

wherein the mover is able to move in the first direction along the plurality of coils by electromagnetic force received by the first magnet group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnet group or the second magnet group from the plurality of coils.

2. The transport system according to claim 1 , wherein the first magnet group or the second magnet group receives electromagnetic force from the plurality of coils in a direction that is different from the first direction.

3. The transport system according to claim 1 ,

wherein the mover has a plurality of side faces or a top face parallel to the first direction, and

wherein the first magnet group and the second magnet group are arranged on at least one of the plurality of the side faces or the top face.

4. The transport system according to claim 3 ,

wherein the mover has one of the plurality of side faces and another of the plurality of side faces parallel to the first direction, and

wherein the first magnet group and the second magnet group are arranged on the one of the plurality of side faces and on the other of the plurality of side faces, respectively.

5. The transport system according to claim 4 , wherein the first magnet group and the second magnet group arranged on the one of the plurality of side faces and the first magnet group and the second magnet group arranged on the other plurality of the side faces are arranged symmetrically about an axis parallel to the first direction as a symmetry axis.

6. The transport system according to claim 4 , wherein the first magnet group and the second magnet group arranged on the one of the plurality of side faces and the first magnet group and the second magnet group arranged on the other of the plurality of side faces are arranged asymmetrically.

7. The transport system according to claim 4 , further comprising a stator,

wherein the stator includes a first face and a second face crossing the first face, and

wherein the plurality of coils are provided on the first face of the stator.

8. The transport system according to claim 7 ,

wherein a Y-target and a Z-target are provided on a bottom face which is a face opposite to the top face of the mover,

wherein a plurality of Y-sensors and a plurality of Z-sensors are provided on the second face of the stator,

wherein the plurality of Y-sensors are arranged at intervals in the first direction, and

wherein the plurality of Z-sensors are arranged at intervals in a third direction crossing the first direction and the second direction.

9. The transport system according to claim 7 , wherein the mover is movable in the first direction without contacting the stator.

10. The transport system according to claim 3 ,

wherein the mover has one of the plurality of side faces and the other of the plurality of side faces parallel to the first direction, and

wherein the first magnet group and the second magnet group are arranged on the one of the plurality of side faces out of the one of the plurality of side faces and the other of the plurality of side faces.

11. The transport system according to claim 10 , wherein the first magnet group includes one part of the first magnet group and another part of the first magnet group arranged to be shifted from each other in the second direction.

12. The transport system according to claim 3 ,

wherein the first magnet group and the second magnet group are arranged on the top face, and

wherein at least one of the plurality of coils has an iron core configured to generate attractive force with the first magnet group or the second magnet group and is arranged to be able to face downward with respect to the first magnet group and the second magnet group.

13. The transport system according to claim 12 , further comprising a stator,

wherein the stator includes a second face and a third face facing the second face, and

wherein the plurality of coils are provided on the third face of the stator.

14. The transport system according to claim 13 ,

wherein a Y-target and a Z-target are provided on a bottom face which is a face opposite to the top face of the mover,

wherein a plurality of Y-sensors and a plurality of Z-sensors are provided on the second face of the stator,

wherein the plurality of Y-sensors are arranged at intervals in the first direction, and

wherein the plurality of Z-sensors are arranged at intervals in a third direction crossing the first direction and the second direction.

15. The transport system according to claim 1 ,

wherein the plurality of coils form at least one coil box unit in which one or more coils of the plurality of coils are enclosed in a box-like shape, and

wherein a plurality of the coil box units are aligned.

16. The transport system according to claim 1 , wherein the mover further comprises:

a first yoke to which the first magnet group is attached, and

a second yoke to which the second magnet group is attached,

wherein the first yoke and the second yoke are separated from each other.

17. A method of manufacturing an article comprising the steps of:

transporting a workpiece by the transport system according to claim 1 ; and

performing, by a process apparatus, a working process on the workpiece.

18. The transport system according to claim 1 ,

wherein first magnets next to each other in the first direction included in the plurality of first magnets have different polarities from each other at a position where the plurality of first magnets are able to face the plurality of coils, and

wherein second magnets next to each other in the second direction included in the plurality of second magnets have different polarities from each other at a position where the plurality of second magnets are able to face the plurality of coils.

19. The transport system according to claim 1 , wherein the plurality of second magnets are three or more.

20. The transport system according to claim 1 , wherein the plurality of coils are arranged in a plurality of lines in the first direction.

21. A mover comprising:

a first magnet group including a plurality of first magnets arranged along a first direction; and

a second magnet group including a plurality of second magnets arranged along a second direction crossing the first direction,

wherein the mover is able to move in the first direction along a plurality of coils by electromagnetic force received by the first magnet group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnet group or the second magnet group from the plurality of coils, the plurality of coils being arranged along in parallel to the first direction so as to be able to face the first magnet group and the second magnet group.

22. A control apparatus that controls a mover having a first magnet group including a plurality of first magnets arranged along a first direction and a second magnet group including a plurality of second magnets arranged along a second direction crossing the first direction, wherein the mover is able to move in the first direction along a plurality of coils by electromagnetic force received by the first magnet group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnet group or the second magnetic group from the plurality of coils, the plurality of coils being arranged along the first direction so as to be able to face the first magnet group and the second magnet group,

the control apparatus comprising:

a transport control unit that controls transportation of the mover in the first direction by controlling electromagnetic force received by the first magnet group from the plurality of coils; and

an attitude control unit that controls an attitude of the mover by controlling electromagnetic force received by the first magnet group or the second magnetic magnet group from the plurality of coils.

23. A control method of controlling a mover having a first magnet group including a plurality of first magnets arranged along a first direction and a second magnet group including a plurality of second magnets arranged along a second direction crossing the first direction, wherein the mover is able to move in the first direction along a plurality of coils by electromagnetic force received by the first magnet group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnet group or the second magnet group from the plurality of coils, the plurality of coils being arranged along the first direction so as to be able to face the first magnet group and the second magnet group,

the control method comprising:

controlling transportation of the mover in the first direction by controlling electromagnetic force received by the first magnet group from the plurality of coils; and

controlling an attitude of the mover by controlling electromagnetic force received by the first magnet group or the second magnet group from the plurality of coils.

24. A transport system comprising:

a mover having a first magnet group and a second magnet group, the first magnet group including a plurality of first magnets arranged along a first direction and the second magnet group including a plurality of second magnets arranged along a second direction crossing the first direction; and

a plurality of coils arranged along the first direction so as to be able to face the first magnet group and the second magnet group,

wherein the mover is able to move in the first direction along the plurality of coils by electromagnetic force received by the first magnet group from the plurality of coils, and

wherein the first magnet group or the second magnet group receives electromagnetic force from the plurality of coils in a direction that is different from the first direction.