Semiconductor structure having air gap dielectric and method of preparing the same
The present disclosure provides a semiconductor structure having an air gap dielectric and a method for preparing the semiconductor structure. The method includes forming a conductive pillar over a substrate; forming a dielectric cap over the conductive pillar; transforming a sidewall portion of the conductive pillar into a first dielectric portion; and removing the first dielectric portion such that a width of the dielectric cap is greater than a width of a remaining portion of the conductive pillar.
1. A method for preparing a semiconductor structure, comprising:
forming a plurality of composite pillars over a substrate, wherein the composite pillars include conductive pillars and dielectric caps over the conductive pillars over a substrate;
forming a plurality of spacers flanking the composite pillar;
forming a plurality of dielectric pillars over the substrate, between the spacers;
removing the spacers to expose sidewalls of the conductive pillars;
transforming sidewall portions of the conductive pillars into transformed portions;
removing the transformed portions; and
forming a sealing layer over the dielectric pillars and the dielectric caps.
2. The method for preparing a semiconductor structure of claim 1 , wherein a sidewall of the conductive pillar is substantially coplanar with the sidewall of the dielectric cap before the transformed portion of the conductive pillar is formed.
3. The method for preparing a semiconductor structure of claim 1 , wherein the step of transforming the sidewall portion of the conductive pillar further comprises:
performing a heat treatment process on the conductive pillar to form the transformed portion over the sidewall of the conductive pillar, wherein a material of the transformed portion is different from a material of the dielectric cap.
4. The method for preparing a semiconductor structure of claim 3 , wherein the heat treatment process is an oxidation process or a nitridation process, and the transformed portion is covered by the dielectric cap.
5. The method for preparing a semiconductor structure of claim 1 , wherein the sealing layer covers the dielectric pillars and the dielectric caps such that an air gap is formed between the dielectric cap, the conductive pillar, the dielectric pillar and the sealing layer.
6. The method for preparing a semiconductor structure of claim 1 , wherein a bottom end of the sealing layer is lower than a top end of the dielectric pillars.
7. The method for preparing a semiconductor structure of claim 1 , wherein a bottom end of the sealing layer is higher than a bottom end of the dielectric caps.
8. The method for preparing a semiconductor structure of claim 1 , wherein a top end of the dielectric pillars is higher than a bottom end of the dielectric caps.
9. The method for preparing a semiconductor structure of claim 1 , wherein a width of the dielectric cap is greater than a width of the conductive pillars.
10. The method for preparing a semiconductor structure of claim 1 , wherein a distance between the conductive pillars is greater than a distance between the dielectric caps.
11. The method for preparing a semiconductor structure of claim 1 , wherein a top width of the dielectric pillar is greater than a bottom width of the dielectric pillar, and the bottom width of the dielectric pillar at one side of the conductive pillar is different from a bottom width at another side of the conductive pillar.