Semiconductor storage element, semiconductor storage device, and semiconductor system
A Provided is a semiconductor storage element that includes a memory cell transistor including a gate insulator film at least partially including ferroelectric material, and a selection transistor provided in such a manner that one of a source or a drain is connected with a gate electrode of the memory cell transistor via a connection layer, and a gate insulator film faces the gate insulator film of the memory cell transistor in a layer stack direction across the connection layer.
1. A semiconductor storage element, comprising:
a memory cell transistor including a semiconductor layer, a first gate electrode, a connection layer, and a first gate insulator film, wherein
the semiconductor layer comprises a channel region, a first source of the memory cell transistor, and a first drain of the memory cell transistor,
the semiconductor layer is on the first gate insulator film,
a portion of the semiconductor layer overlaps the connection layer in a planar view from a layer stack direction,
the first gate insulator film is on the connection layer, and
the first gate insulator film includes a ferroelectric material; and
a selection transistor including a second source, a second drain, and a second gate insulator film,
wherein
one of the second source or the second drain is connected with the first gate electrode of the memory cell transistor via the connection layer, and
the second gate insulator film faces the first gate insulator film of the memory cell transistor in the layer stack direction across the connection layer.
2. The semiconductor storage element according to claim 1 , wherein the memory cell transistor is a thin film transistor in which the first gate electrode, and the first source and the first drain are on opposite sides across the first gate insulator film.
3. The semiconductor storage element according to claim 2 , wherein the memory cell transistor is a bottom gate transistor in which the first gate electrode is below the first gate insulator film.
4. The semiconductor storage element according to claim 1 , wherein
the selection transistor further includes a second gate electrode, and
the selection transistor is a field effect transistor in which the second gate insulator film is on a semiconductor substrate and the second gate electrode is on the second gate insulator film.
5. The semiconductor storage element according to claim 1 , wherein a planar shape of the connection layer is a hook-like shape in which a straight line is bent at at least one bending point.
6. The semiconductor storage element according to claim 1 , wherein the memory cell transistor and the selection transistor are in different planar regions in the planar view from the layer stack direction.
7. The semiconductor storage element according to claim 1 , wherein the connection layer is integral with the first gate electrode of the memory cell transistor.
8. The semiconductor storage element according to claim 7 , wherein the connection layer includes one of a metal, an alloy, or a metal compound.
9. The semiconductor storage element according to claim 1 , wherein
the selection transistor further includes a second gate electrode,
the second gate electrode of the selection transistor is connected with a word line,
the other of the second source or the second drain is connected with a first bit line,
one of the first source or the first drain of the memory cell transistor is connected with a second bit line, and
the other of the first source or the first drain is connected with one of a power source or a ground.
10. The semiconductor storage element according to claim 9 , wherein
the other of the second source or the second drain of the selection transistor, and the first bit line are connected by a contact plug, and
the contact plug is on the second drain to penetrate through in the layer stack direction.
11. The semiconductor storage element according to claim 9 , wherein
extending directions of the first bit line and the second bit line are parallel to each other, and
an extending direction of the word line is orthogonal to the extending directions of the first bit line and the second bit line.
12. A semiconductor storage device, comprising:
a plurality of semiconductor storage elements in a matrix, wherein each of the plurality of semiconductor storage elements includes:
a memory cell transistor including a semiconductor layer, a gate electrode, a connection layer, and a first gate insulator film, wherein
the semiconductor layer comprises a channel region, a first source of the memory cell transistor, and a first drain of the memory cell transistor,
the semiconductor layer is on the first gate insulator film,
a portion of the semiconductor layer overlaps the connection layer in a planar view from a layer stack direction,
the first gate insulator film is on the connection layer, and
the first gate insulator film includes a ferroelectric material; and
a selection transistor including a second source, a second drain, and a second gate insulator film, wherein
one of the second source or the second drain of the selection transistor is connected with the gate electrode of the memory cell transistor via the connection layer, and
the second gate insulator film faces the first gate insulator film of the memory cell transistor in the layer stack direction across the connection layer.
13. A semiconductor system, comprising:
a storage device including a plurality of semiconductor storage elements in a matrix, wherein each of the plurality of semiconductor storage elements includes:
a memory cell transistor including a semiconductor layer, a gate electrode, a connection layer, and a first gate insulator film, wherein
the semiconductor layer comprises a channel region, a first source of the memory cell transistor, and a first drain of the memory cell transistor,
the semiconductor layer is on the first gate insulator film,
a portion of the semiconductor layer overlaps the connection layer in a planar view from a layer stack direction,
the first gate insulator film is on the connection layer, and
the first gate insulator film includes a ferroelectric material; and
a selection transistor including a second source, a second drain, and a second gate insulator film, wherein
one of the second source or the second drain of the selection transistor is connected with the gate electrode of the memory cell transistor via the connection layer, and
the second gate insulator film faces the first gate insulator film of the memory cell transistor in the layer stack direction across the connection layer; and
an arithmetic device connected with the storage device, wherein the storage device and the arithmetic device are on one semiconductor chip.