Residual removal
Methods for removing residuals after a selective deposition process are provided. In one embodiment, the method includes performing a selective deposition process to form a metal containing dielectric material at a first location of a substrate and performing a residual removal process to remove residuals from a second location of the substrate.
1. A method for removing residuals from a substrate, comprising:
performing a selective deposition process to form a metal containing dielectric material at a first location of a substrate, the first location comprises a surface of a capping layer and a surface of an adhesive layer, the capping layer embedded in the adhesive layer, the adhesive layer embedded in an insulting layer disposed on the substrate; and
performing a residual removal process to remove residuals from a second location of the substrate.
2. The method of claim 1 , wherein the residual removal process is a chemical mechanical polish process.
3. The method of claim 1 , wherein the residual removal process further comprises:
performing an etching process.
4. The method of claim 3 , wherein performing an etching process further comprises:
supplying an etching gas mixture onto a surface of the substrate, wherein the etching gas mixture includes at least a halogen containing gas.
5. The method of claim 4 , wherein a halogen containing gas is selected from a group consisting of BCl 3 , Cl 2 , NF 3 , CF 4 , HCl, HBr, Br 2 and combinations thereof.
6. The method of claim 5 , wherein the etching gas mixture includes BCl 3 Cl 2 or NF 3 .
7. The method of claim 1 , wherein the residual has a diameter less than 30 nm but greater than 2 nm.
8. The method of claim 1 , further comprising:
performing a CMP process after the residual removal process.
9. The method of claim 1 , wherein the metal containing dielectric material and the residuals comprises the same material.
10. The method of claim 1 , wherein the metal containing dielectric layer is a high dielectric constant material having a dielectric constant greater than 12.
11. The method of claim 1 , wherein the metal containing dielectric layer is fabricated from a material selected from a group consisting of hafnium containing oxide (HfO x ), AlN, WSiO 2 , WSi, AlON, TiN, TaN, TiON, TaON, zirconium oxide (ZrO x ), titanium oxide (TiO x ), tantalum oxide (TaO x ), niobium oxide (NbO x ), iron oxide (FeO x ), yttrium oxide (YO x ) and aluminum oxide (AlO x ).
12. The method of claim 9 , wherein the metal containing dielectric material and the residuals are both hafnium containing oxide.
13. The method of claim 1 , wherein the capping layer is selected from a group consisting of ruthenium (Ru), cobalt (Co), and tungsten (W).
14. The method of claim 1 , wherein the second location of the substrate comprises a dielectric material.
15. A method for removing residuals from a substrate, comprising:
performing a selective deposition process to form a metal containing dielectric material on a metal material on a substrate and leaving residuals on a dielectric material on the substrate, the metal material formed on a surface of a capping layer and a surface of an adhesive layer, the capping layer embedded in the adhesive layer, the adhesive layer embedded in an insulting layer disposed on the substrate, wherein the metal containing dielectric material is a high dielectric constant material having a dielectric constant greater than 12; and
performing a residual removal process to remove residuals from the substrate.
16. The method of claim 15 , wherein the metal containing dielectric material is fabricated from a material selected from a group consisting of hafnium containing oxide (HfO x ), AlN, WSiO 2 , WSi, AlON, TiN, TaN, TiON, TaON, zirconium oxide (ZrO x ), titanium oxide (TiO x ), tantalum oxide (TaO x ), niobium oxide (NbO x ), iron oxide (FeO x ), yttrium oxide (YO x ) and aluminum oxide (AlO x ).
17. The method of claim 15 , wherein the residual removal process is a CMP process or an etching process.
18. The method of claim 15 , wherein the residual has a diameter less than 30 nm but greater than 2 nm.
19. A method for removing residuals from a substrate, comprising:
performing a selective deposition process by an atomic layer deposition process to form a metal containing dielectric material on a metal material on a substrate and leaving residuals on a dielectric material on the substrate, the metal material is formed on a surface of a capping layer and a surface of an adhesive layer, the capping layer embedded in the adhesive layer, the adhesive layer embedded in an insulting layer disposed on the substrate; and
performing a residual removal process to remove residuals from the substrate wherein the residual has a diameter less than 30 nm but greater than 2 nm.