Semiconductor device and manufacturing process therefor

1. A semiconductor device comprising:

a cell region that includes a semiconductor element;

an outer peripheral region that surrounds an outer periphery of the cell region;

a substrate that has a front surface and a back surface, and is made of a semiconductor of a first or second conductivity type;

a first conductivity layer that is formed on the front surface of the substrate and made of the semiconductor of the first conductivity type having a lower impurity concentration than impurity concentration of the substrate;

a first electrode that is provided on an opposite side of the substrate across the first conductivity layer, the first electrode being provided in the semiconductor element; and

a second electrode that is placed toward the back surface of the substrate, the second electrode being provided in the semiconductor element,

wherein:

the outer peripheral region includes a plurality of second conductivity guard rings that is placed away from a surface of the first conductivity layer in a surface layer portion of the first conductivity layer, each second conductivity guard rings having frame-shaped line-like structure and surrounding the cell region;

the outer peripheral region further includes an interlayer insulation film placed on the surface of the first conductivity layer; and

the first conductivity layer includes

a first layer placed on the front surface of the substrate and having the guard rings placed in the surface layer portion, and

a second layer placed on the guard rings and the first layer and having a first conductivity impurity concentration higher than a first conductivity impurity concentration of the first layer.

2. The semiconductor device according to claim 1 , wherein

the semiconductor element is a MOSFET,

the MOSFET includes:

a base region of a second conductivity type that is placed on the second layer;

a source region of a first conductivity type that is placed on the base region and has a first conductivity type impurity concentration higher than a first conductivity type impurity concentration of the first layer;

a trench gate structure that includes, in a gate trench provided deeper than the base region from a surface of the source region, a gate insulation film covering an inner wall surface of the gate trench and a gate electrode disposed on the gate insulation film;

the interlayer insulation film that covers the gate electrode and the gate insulation film, and has a contact hole;

a source electrode that is the first electrode, and is electrically connected to the source region and the base region through the contact hole; and

a drain electrode that is the second electrode, and is placed toward the back surface of the substrate, and

the second layer forms a current dispersion layer.

3. A method for manufacturing a semiconductor device having a cell region in which a semiconductor element is formed, and an outer peripheral region surrounding an outer periphery of the cell region, the method comprising:

forming, on a substrate having a front surface and a back surface and being made of a semiconductor of a first or second conductivity type, a first conductivity layer that is made of a semiconductor of a first conductivity type having a lower impurity concentration than impurity concentration of the substrate;

forming a base region made of a semiconductor of a second conductivity type on the first conductivity layer;

forming a source region made of a semiconductor of a first conductivity type having a first conductivity type impurity concentration higher than a first conductivity type impurity concentration of the first conductivity layer on the base region;

forming a trench gate structure by providing a gate trench that reaches the first conductivity layer through the base region from a surface of the source region in the cell region, forming a gate insulation film in the gate trench, and forming a gate electrode on the gate insulation film;

forming a recess portion that penetrates through the source region and the base region to reach the first conductivity layer in the outer peripheral region;

forming an interlayer insulation film that covers the trench gate structure, the source region, the base region, and an inside of the recess portion;

forming a contact hole in the interlayer insulation film in the cell region and then forming a source electrode that is electrically connected to the source region and the base region through the contact hole;

forming a drain electrode toward the back surface of the substrate;

forming a deep layer of a second conductivity type that reaches a surface of the first conductivity layer by implanting a second conductivity type impurity ion into the first conductivity layer in the cell region before the forming of the base region; and

forming a guard ring having a frame-shaped line-like structure that surrounds the cell region at a depth away from the surface of the first conductivity layer by implanting a second conductivity type impurity ion into the first conductivity layer in the outer peripheral region before the forming of the base region,

wherein,

the forming of the deep layer includes:

implanting a second conductivity type impurity ion into the first conductivity layer at a depth away from the surface of the first conductivity layer to form a lower portion of the deep layer concurrently when forming the guard ring; and

implanting a second conductivity type impurity ion into the first conductivity layer to form an upper portion of the deep layer connected to the lower portion and reaching the surface of the first conductivity layer.

4. A method for manufacturing a semiconductor device having a cell region in which a semiconductor element is formed, and an outer peripheral region surrounding an outer periphery of the cell region, the method comprising:

forming, on a substrate having a front surface and a back surface and being made of a semiconductor of a first or second conductivity type, a first conductivity layer that is made of a semiconductor of a first conductivity type having a lower impurity concentration than impurity concentration of the substrate;

forming a base region made of a semiconductor of a second conductivity type on the first conductivity layer;

forming a source region made of a semiconductor of a first conductivity type having a first conductivity type impurity concentration higher than a first conductivity type impurity concentration of the first conductivity layer on the base region;

forming a trench gate structure by providing a gate trench that reaches the first conductivity layer through the base region from a surface of the source region in the cell region, forming a gate insulation film in the gate trench, and forming a gate electrode on the gate insulation film;

forming a recess portion that penetrates through the source region and the base region to reach the first conductivity layer in the outer peripheral region;

forming an interlayer insulation film that covers the trench gate structure, the source region, the base region, and an inside of the recess portion;

forming a contact hole in the interlayer insulation film in the cell region and then forming a source electrode that is electrically connected to the source region and the base region through the contact hole;

forming a drain electrode toward the back surface of the substrate;

forming a deep layer of a second conductivity type that reaches a surface of the first conductivity layer by implanting a second conductivity type impurity ion into the first conductivity layer in the cell region before the forming of the base region; and

forming a guard ring having a frame-shaped line-like structure that surrounds the cell region at a depth away from the surface of the first conductivity layer by implanting a second conductivity type impurity ion into the first conductivity layer in the outer peripheral region before the forming of the base region,

wherein,

the forming of the first conductivity layer includes

forming a first layer formed on the front surface of the substrate as the first conductivity layer, and

forming a second layer having a first conductivity type impurity concentration higher than a first conductivity type impurity concentration of the first layer on a surface of the first layer.

5. A method for manufacturing a semiconductor device having a cell region in which a semiconductor element is formed, and an outer peripheral region surrounding an outer periphery of the cell region, the method comprising:

forming, on a substrate having a front surface and a back surface and being made of a semiconductor of a first or second conductivity type, a first conductivity layer that is made of a semiconductor of a first conductivity type having a lower impurity concentration than impurity concentration of the substrate;

forming a base region made of a semiconductor of a second conductivity type on the first conductivity layer;

forming a source region made of a semiconductor of a first conductivity type having a first conductivity type impurity concentration higher than a first conductivity type impurity concentration of the first conductivity layer on the base region;

forming a trench gate structure by providing a gate trench that reaches the first conductivity layer through the base region from a surface of the source region in the cell region, forming a gate insulation film in the gate trench, and forming a gate electrode on the gate insulation film;

forming a recess portion that penetrates through the source region and the base region to reach the first conductivity layer in the outer peripheral region;

forming an interlayer insulation film that covers the trench gate structure, the source region, the base region, and an inside of the recess portion;

forming a contact hole in the interlayer insulation film in the cell region and then forming a source electrode that is electrically connected to the source region and the base region through the contact hole;

forming a drain electrode toward the back surface of the substrate;

forming a deep layer of a second conductivity type that reaches a surface of the first conductivity layer by implanting a second conductivity type impurity ion into the first conductivity layer in the cell region before the forming of the base region; and

forming a guard ring having a frame-shaped line-like structure that surrounds the cell region at a depth away from the surface of the first conductivity layer by implanting a second conductivity type impurity ion into the first conductivity layer in the outer peripheral region before the forming of the base region,

wherein,

the forming of the first conductivity layer includes

forming a first layer formed on the front surface of the substrate as the first conductivity layer, and

forming a second layer having a first conductivity type impurity concentration higher than a first conductivity type impurity concentration of the first layer on a surface of the first layer, and

the forming of the deep layer further includes:

implanting a second conductivity type impurity ion into the first layer before the forming of the second layer to form a lower portion of the deep layer concurrently when forming the guard ring; and

implanting a second conductivity type impurity ion into the second layer after the forming of the second layer to form an upper portion of the deep layer connected to the lower portion.

6. The method for manufacturing the semiconductor device according to claim 3 , wherein

the deep layer formed in the cell region is defined as a first deep layer,

the method further comprises forming a second deep layer of a second conductivity type in a surface layer portion of the first conductivity layer by implanting a second conductivity type impurity ion in a connection portion located in the outer peripheral region between the cell region and a guard ring portion in which the guard ring is formed, and

the forming of the second deep layer includes:

forming a lower portion of the second deep layer concurrently when forming a lower portion of the first deep layer and the guard ring; and

forming an upper portion of the second deep layer concurrently when forming an upper portion of the first deep layer.

7. A method for manufacturing the semiconductor device having a cell region in which a semiconductor element is formed, and an outer peripheral region surrounding an outer periphery of the cell region, the method comprising:

forming, on a substrate having a front surface and a back surface and made of a semiconductor of a first or second conductivity type, a first conductivity layer that is made of a semiconductor of a first conductivity type having a lower impurity concentration than impurity concentration of the substrate;

forming a base region that is made of a semiconductor of a second conductivity type on the first conductivity layer,

forming a source region that is made of a semiconductor of a first conductivity type having a first conductivity type impurity concentration higher than a first conductivity type impurity concentration of the first conductivity layer on the base region;

forming a trench gate structure by forming a gate trench that reaches the first conductivity layer through the base region from a surface of the source region in the cell region, and then forming a gate insulation film in the gate trench and a gate electrode on the gate insulation film;

forming a recess portion that penetrates through the source region and the base region to reach the first conductivity layer in the outer peripheral region;

forming an interlayer insulation film that covers the trench gate structure, the source region, the base region, and an inside of the recess portion;

forming a contact hole in the interlayer insulation film in the cell region;

forming a source electrode that is electrically connected to the source region and the base region through the contact hole after;

forming a drain electrode toward the back surface of the substrate;

forming a deep layer of a second conductivity type that reaches a surface of the first conductivity layer by implanting a second conductivity type impurity ion into the first conductivity layer in the cell region before the forming of the base region; and

forming a guard ring having a frame-shaped line-like structure that surrounds the cell region by implanting a second conductivity type impurity ion into the first conductivity layer at a depth away from the surface of the first conductivity layer in the outer peripheral region after the forming of the recess portion,

wherein,

the deep layer formed in the cell region is defined as a first deep layer,

the method further comprises forming a second deep layer of a second conductivity type in a surface layer portion of the first conductivity layer by implanting a second conductivity type impurity ion in a connection portion located in the outer peripheral region between the cell region and a guard ring portion in which the guard ring is formed, and

the forming of the second deep layer includes forming a least a part of the second deep layer concurrently when forming the first deep layer.

8. The method for manufacturing the semiconductor device according to claim 7 , wherein

the forming of the second deep layer includes forming an end portion of the second deep layer on the guard ring side concurrently when forming the guard ring.