Patterned Si substrate-based LED epitaxial wafer and preparation method therefor
An patterned Si substrate-based LED epitaxial wafer and a preparation method therefor, the LED epitaxial wafer comprising: a patterned Si substrate ( 1 ) and an Al 2 O 3 coating ( 2 ) growing on the patterned Si substrate ( 1 ); sequentially growing on the Al 2 O 3 coating ( 2 ) are a nucleating layer ( 3 ), a first buffer layer ( 4 ), a first insertion layer ( 5 ), a second buffer layer ( 6 ), a second insertion layer ( 7 ), an n-GaN layer ( 8 ), a quantum well layer ( 9 ), a p-GaN layer ( 10 ), an n-electrode ( 14 ) electrically connected to the n-GaN layer and a p-electrode ( 13 ) electrically connected to the p-GaN layer. The present invention is suitable for the preparation of large-sized LED epitaxial wafers. Furthermore, the crystal quality is improved, and the light extraction efficiency of the LED die is improved.
1. A preparation method for a patterned Si substrate-based LED epitaxial wafer, characterized in that the preparation method comprising the steps of:
S1, etching a Si substrate to form a patterned Si substrate with a patterned structure thereon;
S2, growing an Al 2 O 3 coating on the patterned Si substrate; and
S3, growing an epitaxial layer on the Al 2 O 3 coating,
wherein the epitaxial layer further comprises a GaN or AlGaN nucleation layer, a stress buffer layer and a light emitting structure layer,
wherein the stress buffer layer is disposed between the GaN or AlGaN nucleation layer and the light emitting structure layer, the stress buffer layer composed of insertion layers and buffer layers alternately, the epitaxial layer further comprising a first buffer layer, wherein the first buffer layer and the light emitting structure layer are configured to be sequentially grown on the GaN or AlGaN nucleation layer, and the preparation method further comprising the step of: etching off the patterned Si substrate by wet etching by using the Al 2 O 3 coating as a barrier layer, and exposing a patterned Al 2 O 3 coating.
2. The preparation method according to claim 1 , characterized in that the GaN or AlGaN nucleation layer configured to be grown on the Al 2 O 3 coating.
3. The preparation method according to claim 1 , characterized in that the step S2 comprising: plating an Al layer on the patterned Si substrate, and then introducing oxygen ions to form the Al 2 O 3 coating.