Circuit device, oscillator, electronic apparatus, and vehicle
Provided is a circuit device including: a first terminal electrically coupled to one end of a vibrator; a second terminal electrically coupled to the other end of the vibrator; a first coupling wiring electrically coupled to the first terminal; a second coupling wiring electrically coupled to the second terminal; an oscillation circuit having a drive circuit for driving the vibrator via the first coupling wiring and the second coupling wiring, and oscillating the vibrator; and a first capacitor having a metal-insulator-metal (MIM) structure of which one electrode is electrically coupled to the first coupling wiring. The first coupling wiring and the first capacitor having the MIM structure overlap each other in plan view in a direction orthogonal to a substrate on which a circuit element is formed.
1. A circuit device comprising:
a first terminal electrically coupled to one end of a vibrator;
a second terminal electrically coupled to the other end of the vibrator;
a first coupling wiring electrically coupled to the first terminal;
a second coupling wiring electrically coupled to the second terminal;
an oscillation circuit having a drive circuit for driving the vibrator via the first coupling wiring and the second coupling wiring, and oscillating the vibrator; and
a first capacitor having a metal-insulator-metal (MIM) structure of which one electrode is electrically coupled to the first coupling wiring, wherein
the first coupling wiring and the first capacitor having the MIM structure overlap each other in plan view in a direction orthogonal to a substrate on which a circuit element is formed.
2. The circuit device according to claim 1 , wherein the first coupling wiring is constituted by a metal layer above or a metal layer below an MIM metal layer of the first capacitor.
3. The circuit device according to claim 2 , wherein
the first coupling wiring is constituted by the metal layer above the MIM metal layer, and
the first coupling wiring and the MIM metal layer that is the one electrode of the first capacitor are electrically coupled with each other.
4. The circuit device according to claim 2 , wherein
the first coupling wiring is constituted by the metal layer below the MIM metal layer, and
in the first coupling wiring, a wiring at a position of the first capacitor is the one electrode of the first capacitor.
5. The circuit device according to claim 1 , wherein
the first coupling wiring includes a first wiring, a second wiring coupled to the first wiring and having a wiring width that is wider than a wiring width of the first wiring, and a third wiring coupled to the second wiring and having a wiring width that is narrower than the wiring width of the second wiring, and
the second wiring and the first capacitor overlap each other in the plan view.
6. The circuit device according to claim 5 , further comprising:
a second capacitor having a MIM structure of which one electrode is electrically coupled to the first coupling wiring, wherein
the first coupling wiring includes a fourth wiring coupled to the third wiring and having a wiring width that is wider than the wiring width of the third wiring, and
the fourth wiring and the second capacitor overlap each other in the plan view.
7. The circuit device according to claim 1 , further comprising:
an output circuit electrically coupled to the oscillation circuit via a third coupling wiring, and buffering an oscillation signal from the oscillation circuit and outputting a clock signal; and
a third capacitor having a MIM structure, wherein
the third coupling wiring and the third capacitor overlap each other in the plan view.
8. The circuit device according to claim 7 , wherein
the third capacitor is a DC cut capacitor provided between the third coupling wiring and the output circuit.
9. The circuit device according to claim 1 , wherein
the oscillation circuit includes a variable capacitance circuit adjusting a load capacitance of the oscillation circuit, and
the first capacitor is a capacitor constituting the variable capacitance circuit.
10. The circuit device according to claim 1 , wherein
the oscillation circuit includes a variable capacitance circuit adjusting a load capacitance of the oscillation circuit, and
the first capacitor is a DC cut capacitor provided between the first coupling wiring and the variable capacitance circuit.
11. The circuit device according to claim 1 , wherein
the first capacitor is a DC cut capacitor provided between the first coupling wiring and an input node or an output node of the drive circuit.
12. An oscillator comprising:
the circuit device according to claim 1 ; and
the vibrator.
13. An electronic apparatus comprising:
the circuit device according to claim 1 ; and
a processing device operating according to a clock signal based on an oscillation signal of the oscillation circuit.
14. A vehicle comprising:
the circuit device according to claim 1 ; and
a processing device operating according to a clock signal based on an oscillation signal of the oscillation circuit.