Method of manufacturing a wiring structure of a head suspension
A wiring structure of a head suspension including a flexure that supports a head and is attached to a load beam applying load onto the head, includes write wiring and read wiring formed on the flexure and connected to the head, each having wires of opposite polarities and further including a stacked interleaved part which includes segments electrically connected to the respective wires of the write wiring, the segments stacked on and facing the wires through an electrical insulating layer so that the facing wire and segment have opposite polarities, is manufactured by a wiring step, an insulating layer forming step and a stacked interleaved part forming step.
1. A method of manufacturing a wiring structure of a head suspension including a flexure that supports a head used to write and read data to and from a recording medium and is attached to a load beam applying load onto the head, the wiring structure comprising a write wiring and a read wiring formed on the flexure and connected to the head, each having wires of opposite polarities and a stacked interleaved part provided at least for the write wiring, the stacked interleaved part including segments electrically connected to the respective wires of the write wiring at both ends in each segment, the segments stacked on and facing the wires of the write wiring through an electrical insulating layer so that the facing wire and segment have opposite polarities to interleave at least the write wiring at the stacked interleaved part, the method comprising:
a wiring step of forming the wires of the opposite polarities of the write wiring on a base insulating layer and forming wire-side arms branched from the respective wires on the base insulating layer;
an insulating layer forming step of forming the electrical insulating layer on the wires and the wire-side arms; and
a stacked interleaved part forming step of forming segments of opposite polarities of the stacked interleaved part on the electrical insulating layer so that each of the segments bridges between the wire-side arm and the wire that have the same polarity and forming the conductors so that the conductors pass through the respective end portions of each of the segments of the stacked interleaved part and electrical insulating layer and electrically connect the end portions of each of the segments of the stacked interleaved part to the wire and the wire-side arm having the same polarity, respectively.
2. A method of manufacturing a wiring structure of a head suspension including a flexure that supports a head used to write and read data to and from a recording medium and is attached to a load beam applying load onto the head, the wiring structure comprising a write wiring and a read wiring formed on the flexure and connected to the head, each having wires of opposite polarities and a stacked interleaved part provided at least for the write wiring, the stacked interleaved part including segments electrically connected to the respective wires of the write wiring at both ends in each segment, the segments stacked on and facing the wires of the write wiring through an electrical insulating layer so that the facing wire and segment have opposite polarities to interleave at least the write wiring at the stacked interleaved part, the method comprising:
a wiring step of forming the wires of the opposite polarities of the write wiring on a base insulating layer and forming wire-side arms branched from the respective wires on the base insulating layer;
an insulating layer forming step of forming the electrical insulating layer on the wires and the wire-side arms and forming holes through the electrical insulating layer on the wires and the wire-side arms, respectively; and
a stacked interleaved part forming step of forming segments of opposite polarities of the stacked interleaved part on the electrical insulating layer so that each of the segments spans between the holes on the wire-side arm and the wire that have the same polarity, thereby forming the conductors in the holes to electrically connect each of the segments of the stacked interleaved part to the wire and the wire-side arm that have the same polarity.