IP Library › Granted Patent US 10,978,390
Granted Patent B2
US 10,978,390 · App. 15/333,045 · Granted Apr 13, 2021

Electronic device including switching element and semiconductor memory

Inventors: Dong-Joon Kim (Icheon-si, KR); Jae-Yun Yi (Icheon-si, KR); Joon-Seop Sim (Icheon-si, KR)
Assignee: SK hynix Inc.
H01L23/528H01L27/228H01L27/2436H01L27/2463G11C11/1659G11C11/2255G11C13/0026G11C2213/79G11C2213/82
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Quick Facts
Patent No.
US 10,978,390
App. No.
15/333,045
Granted
Apr 13, 2021
Kind
B2
Abstract

An electronic device including a semiconductor memory is provided to include a mat region comprising a plurality of memory cells, each including a second transistor; a first switching region located at a side of the mat region and including first transistors; and a second switching region located at the other side of the mat region and including third transistors, wherein the second transistors comprise: a plurality of second active regions; and a plurality of second gate structures extending in the first direction to cross the second active regions, wherein each second active regions is divided into a first side portion, a middle portion and a second side portion that are arranged alternately and repeatedly in the first direction, wherein the first transistors and the third transistors include their active regions and gate structures which are arranged in the same manner as those of the second transistors.

Claims (67)

1. An electronic device comprising a semiconductor memory, wherein the semiconductor memory comprises:

a mat region comprising a plurality of memory cells, second source line contacts, stack structures, upper contacts, second source lines, and second bit lines, each of the memory cells including a second transistor and a memory element coupled to the second transistor;

a first switching region located at a side of the mat region and including a plurality of first transistors coupled to first ends of the memory cells; and

a second switching region located at the other side of the mat region with respect to the first switching region and including a plurality of third transistors coupled to second ends of the memory cells,

wherein the second transistors comprise:

a plurality of second active regions elongated in a third direction that is different from first and second directions which are substantially perpendicular to each other, the plurality of second active regions being arranged in a row in the second direction and the third direction; and

a plurality of second gate structures extending in the first direction to cross the second active regions, wherein each of the second active regions is divided into a first side portion, a middle portion and a second side portion by a pair of the second gate structures, and the first side portion, the second side portion and the middle portion are arranged alternately and repeatedly in the first direction,

wherein the first transistors include:

a plurality of first active regions elongated in the third direction, the plurality of first active regions being arranged in a row in the second direction and the third direction; and

a plurality of first gate structures extending in the first direction to cross the plurality of first active regions, and

wherein each of the first active regions is divided into a first side portion, a middle portion and a second side portion by a pair of the first gate structures, and the first side portion, the second side portion and the middle portion are arranged alternately and repeatedly in the first direction, and

wherein the third transistors include:

a plurality of third active regions elongated in the third direction, the plurality of third active regions being arranged in a row in the second direction and the third direction; and

a plurality of third gate structures extending in the first direction to cross the third active regions,

wherein each of the third active regions is divided into a first side portion, a middle portion and a second side portion by a pair of the third gate structures, and the first side portion, the second side portion and the middle portion are arranged alternately and repeatedly in the first direction,

wherein each of the second source line contacts is located over and coupled to the middle portion of the second active region;

wherein each of the stack structures includes a lower contact, and each of the stack structures is located over and coupled to each of the first side portion and the second side portion of the second active region;

wherein each of the upper contacts is located over and commonly coupled to a pair of the stack structures which are adjacent to each other in the first direction while each of the upper contacts is not overlapping the second source line contacts;

wherein each of the second source lines is located over and coupled to the second source line contacts, and extending in the second direction; and

wherein each of the second bit lines is located over and coupled to the upper contacts, and extending in the second direction.

2. The electronic device of claim 1 , wherein the second bit lines are located over and overlap the second source lines, respectively.

3. The electronic device of claim 1 , wherein the stack structures further comprise additional upper contacts, and each of the additional upper contacts is located over and coupled to the memory element.

4. The electronic device of claim 1 , wherein a bottom surface of the memory element is located over a top surface of the second source line.

5. The electronic device of claim 1 , wherein a top surface of the memory element is located under a bottom surface of the second source line, and

a top surface of the second source line is located under a bottom surface of the second bit line.

6. The electronic device of claim 1 , wherein, when the first active regions arranged in the second direction are referred to as a first active region row, a plurality of first active region rows are arranged in the first direction, and a selected first gate structure of the first gate structures crosses a selected first active region row of the first active region rows, and

when the third active regions arranged in the second direction are referred to as a third active region row, a plurality of third active region rows are arranged in the first direction, and a selected third gate structure of the third gate structures crosses a selected third active region row of the third active region rows,

the first switching region further comprises:

first source line contacts and first bit line contacts, each first source line contact and each first bit line contact being located over and coupled to the selected first active region while being located at both sides of the selected first gate structure, respectively;

first source lines, each located over and coupled to the first source line contact, and extending in the second direction; and

first bit lines, each located over and coupled to the first bit line contact, and extending in the second direction, and

the second switching region further comprises:

third source line contacts and third bit line contacts, each third source line contact and each third bit line contact being located over and coupled to the selected third active region while being located at both sides of the selected third gate structure, respectively;

third source lines, each located over and coupled to the third source line contact, and extending in the second direction; and

third bit lines, each located over and coupled to the third bit line contact, and extending in the second direction.

7. The electronic device of claim 6 , wherein the first bit lines and the second bit lines are electrically coupled to each other, respectively, while the first source lines and the second source lines are electrically separated from each other, and

the second source lines and the third source lines are electrically coupled to each other, respectively, while the second bit lines and the third bit lines are electrically separated from each other.

8. The electronic device of claim 6 , wherein the first to third source lines are located at a same height, and

the first to third bit lines are located at a same height and over the first to third source lines.

9. The electronic device of claim 6 , wherein, in the first direction, the first bit lines and the second bit lines are formed in positions corresponding to each other, and the second source lines and the third source lines are formed in positions corresponding to each other.

10. The electronic device of claim 6 , wherein, in the first direction, the first bit lines and the second bit lines are formed in different positions, and

the semiconductor memory further comprises:

lines having curved shapes, provided between the first switching region and the mat region and coupling the first bit lines and the second bit lines with each other.

11. The electronic device of claim 6 , wherein the first source line contacts are arranged in a row along a fourth direction which crosses the first to third directions,

the first bit line contacts are arranged in a row along the fourth direction,

the third source line contacts are arranged in a row along the fourth direction, and

the third bit line contacts are arranged in a row along the fourth direction.

12. The electronic device of claim 6 , wherein, when the first source line contact and the first bit line contact are located at a first side and a second side of the selected first gate structure, respectively, the third source line contact and the third bit line contact are located at a second side and a first side of the selected third gate structure, respectively.

13. The electronic device of claim 12 , wherein the first source lines and the first bit lines are arranged alternately and repeatedly in the first direction,

the third source lines and the third bit lines are arranged alternately and repeatedly in the first direction, and

in the first direction, the first bit lines, the second source lines, the second bit lines and the third source lines are formed in positions corresponding to each other.

14. The electronic device of claim 6 , wherein, when the first source line contact and the first bit line contact are located at a first side and a second side of the selected first gate structure, respectively, the third source line contact and the third bit line contact are located at a first side and a second side of the selected third gate structure, respectively.

15. The electronic device of claim 14 , wherein the first source lines and the first bit lines are arranged alternately and repeatedly in the first direction,

the third source lines and the third bit lines are arranged alternately and repeatedly in the first direction, and

in the first direction, the first source lines, the second source lines, the second bit lines and the third source lines are formed in positions corresponding to each other.

16. The electronic device of claim 14 , wherein the first switching region further comprises:

additional first bit line contacts, each located over and coupled to the first bit line contact while protruding toward the first source line which is adjacent to and located at a side of the first bit line contact to overlap the first source line, and

the first bit line is located over and coupled to the additional first bit line contact while extending in the second direction to overlap the first source line.

17. The electronic device of claim 16 , wherein the third source lines and the third bit lines are arranged alternately and repeatedly in the first direction, and

in the first direction, the first source lines, the first bit lines, the second source lines, the second bit lines and the third source lines are formed in positions corresponding to each other.

18. The electronic device of claim 6 , wherein the first switching region further comprises:

first line contacts, each located between two adjacent first gate structures and extending in the first direction to couple the first active regions which are arranged in the first direction to each other,

the second switching region further comprises:

second line contacts, each located between two adjacent third gate structures and extending in the first direction to couple the third active regions which are arranged in the first direction to each other,

the first source line contacts and the first bit line contacts are located over and coupled to the first line contacts, and

the third source line contacts and the third bit line contacts are located over and coupled to the second line contacts.

19. The electronic device of claim 7 , wherein a current flow is generated to read or write a data in the variable resistance element, the current flow passing the first source line, the first source line contact, the first transistor, the first bit line contact, the first bit line, the second bit line, the upper contact, the memory element, the lower contact, the second transistor, the second source line contact, the second source line, the third source line, the third source line contact, the third transistor, the third bit line contact, and the third bit line.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2016
From: KIM, DONG-JOON; YI, JAE-YUN; SIM, JOON-SEOP
To: SK HYNIX INC.
Reel/Frame 040106/0638 →
Priority Claims (1)
KR 10-2015-0168569 · Nov 30, 2015 · national
Continuity (1)
Related Publication 20170154844A1 · Jun 1, 2017