MEMS transducer system for pressure and acoustic sensing
A MEMS transducer system includes a MEMS transducer device for sensing at least one of pressure signal or acoustic signal. The MEMS transducer device includes first and second diaphragms. Formed between the diaphragms are a spacer, plate capacitor elements, and electrode elements. The plate capacitor elements are coupled to the diaphragms via the spacer. An optional member may be disposed within the spacer. The distal ends of the electrode elements are coupled to a structure such as insulator element. An optional oxides may be formed within the plate capacitor elements. Pressure sensing electrode formed between the diaphragms may be coupled to the insulator element.
1. A MEMS sensing transducer system comprising:
a first diaphragm and a second diaphragm spaced from the first diaphragm, defining a gap therebetween;
a perimeter wall structure extending between the first diaphragm to the second diaphragm, the perimeter wall structure enclosing the gap;
a pressure sensing electrode formed within the gap;
a spacer extending between and attached to the first diaphragm and the second diaphragm in the gap, the spacer being arranged in a central region between the first diaphragm and the second diaphragm and spaced apart from the perimeter wall structure; and
a plate capacitor including two plate capacitor electrodes formed within the gap, the two plate capacitor electrodes each attached to and extending radially outwardly from the spacer,
wherein the pressure sensing electrode is located adjacent to at least one of the first or the second diaphragm.
2. The MEMS sensing transducer system of claim 1 wherein the spacer includes a through hole.
3. The MEMS sensing transducer system of claim 2 further comprising:
top and bottom substrates; and
a wall structure extending between the top and bottom substrates;
wherein the pressure sensing electrode is located adjacent to at least one of the first or the second diaphragm and is attached to the wall structure.
4. The MEMS sensing transducer system of claim 3 further comprising one or more posts formed within the gap extending between and connected to the first diaphragm and the second diaphragm.
5. The MEMS sensing transducer system of claim 4 wherein each of the first and second diaphragm includes an outer surface, and
wherein a barrier is applied to the outer surfaces of the first and second diaphragms.
6. The MEMS sensing transducer system of claim 1 further comprising at least one electrode structure formed between the pressure sensing electrode and one of the plate capacitor electrodes.
7. The MEMS sensing transducer system of claim 6 wherein the electrode structure includes one or more openings through which the posts extend.
8. A transducer system for pressure and acoustic sensing comprising:
a top substrate and a bottom substrate;
a diaphragm assembly disposed on the bottom substrate, the diaphragm assembly having a first diaphragm, a second diaphragm, and a gap formed therebetween;
a spacer extending between the top substrate and the bottom substrate;
a perimeter wall structure extending between the top substrate and the bottom substrate and enclosing the gap;
a plate capacitor including two plate capacitor electrodes formed within the gap; and
a pressure sensing electrode formed within the gap;
wherein the pressure sensing electrode is located adjacent to at least one of the first and the second diaphragms,
wherein the pressure sensing electrode is attached to the wall structure and extends outwardly from the wall structure, and
wherein the two plate capacitor electrodes are each attached to and extend radially outwardly from the spacer.
9. The transducer system of claim 8 further comprising one or more posts formed within the gap, the one or more posts extending between and being connected to the first diaphragm and the second diaphragm.
10. The transducer system of claim 9 wherein at least one through hole is formed within at least one of the posts.
11. The transducer system of claim 8 further comprising a barrier formed on the diaphragm assembly.