Methylbenzene gas sensor using palladium-containing cobalt oxide nanostructures and method for manufacturing the same
Provided is an oxide semiconductor gas sensor with improved performance that senses selectively methylbenzene gases with high sensitivity. The gas sensor includes a gas sensing layer composed of palladium (Pd)-loaded cobalt oxide (Co 3 O 4 ) nanostructures. The response of the gas sensor according to the present invention to xylene gas at a concentration as low as 5 ppm is at least 150 times higher than that to ethanol gas. The response of the gas sensor to toluene gas at a concentration as low as 5 ppm is at least 100 times higher than that to ethanol gas. In addition, the oxide semiconductor gas sensor has the ability to selectively detect methylbenzene gases, including xylene and toluene (with at least 30-fold higher response to xylene and at least 15 times higher response to toluene than that to ethanol gas).
1. A gas sensor for detecting methylbenzene gases comprising a gas sensing layer comprising palladium (Pd)-loaded cobalt oxide (Co 3 O 4 ) nanostructures having porous surface, wherein the palladium is loaded in an amount greater than 0 at % and no more than 1.7 at %, wherein the nanostructures are hollow hierarchical nanostructures in which plate-like primary particles aggregate to form spherical particles, or the nanostructures are yolk-shell spheres, and wherein the amount of the palladium is selected and the nano structures are configured such that the gas sensor has at least 15 times higher response to methylbenzene gases than to ethanol gas.
2. The gas sensor according to claim 1 , wherein the nanostructures are hollow hierarchical nanostructures in which plate-like primary particles aggregate to form spherical particles.
3. The gas sensor according to claim 2 , wherein the palladium is loaded in an amount of 0.86 at %.
4. The gas sensor according to claim 1 , wherein the nanostructures are yolk-shell spheres.
5. The gas sensor according to claim 4 , wherein the palladium is loaded in an amount of 0.17 at %.
6. The gas sensor of claim 1 , wherein the amount of the palladium is selected and the nano structures are configured such that the gas sensor has at least 100 times higher response to toluene than to ethanol gas at a concentration of 5 ppm.
7. The gas sensor of claim 1 , wherein the porous surface is formed from Pd-loaded cobalt oxide (Co 3 O 4 ).
8. A method of detecting a methylbenzene gas comprising exposing a gas sensor of claim 1 to a target gas, and detecting the change in resistance when said gas sensor is exposed to air, wherein said gas sensor comprises a gas sensing layer comprising palladium (Pd)-loaded cobalt oxide (Co 3 O 4 ) nanostructures.
9. The method of claim 8 , wherein the nanostructures are hollow hierarchical nanostructures in which plate-like primary particles aggregate to form spherical particles.
10. The method of claim 9 , wherein the palladium is loaded in an amount of 0.86 at %.
11. The method of claim 8 , wherein the nanostructures are yolk-shell spheres.
12. The method of claim 11 , wherein the palladium is loaded in an amount of 0.17 at %.
13. The method of claim 8 , wherein the palladium is loaded in an amount greater than 0 at % and no more than 1.7 at %.
14. The method of claim 8 , wherein the methylbenzene is xylene or toluene.
15. The method of claim 8 , wherein concentration of the gas is about 5 ppm.
16. The method of claim 8 , wherein the method is more selective to methylbenzene than to ethanol.