IP Library Granted Patent US 10,984,821
Granted Patent B1
US 10,984,821 · App. 16/170,192 · Granted Apr 20, 2021

Transfer-printed near-field transducer and heat sink

Inventors: Mark Gubbins (Donegal, IE); Roger L. Hipwell, Jr. (Eden Prairie, MN); Marcus B. Mooney (Donegal, IE); Mark Ostrowski (Lakeville, MN); Tong Zhao (Eden Prairie, MN); Michael J. Hardy (Maghera, GB); Michael Christopher Kautzky (Eagan, MN); Neil Zuckerman (Eden Prairie, MN); Declan Macken (Eden Prairie, MN); Francis A. McGinnity (Eglinton, IE)
Assignee: Seagate Technology LLC
G11B5/1272G11B3/10G11B5/3133G11B11/1055G11B2005/0021
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Quick Facts
Patent No.
US 10,984,821
App. No.
16/170,192
Granted
Apr 20, 2021
Kind
B1
Abstract

A near-field transducer or heat sink is formed via a first process. The near-field transducer or heat sink is transfer-printed to a read/write head via a second process.

Claims (30)

1. A method comprising:

forming a plurality of non-metallic heat sinks on a layer via a first process, the first process being incompatible with growth on a wafer on which a plurality of read/write heads are formed;

transfer printing the heat sinks to the plurality of read/write heads via a second process; and

using photolithography, shaping or aligning the plurality of heat sinks on the read/write heads after the transfer printing.

2. The method of claim 1 , wherein the temperature of the first process is between 220 degrees Celsius to 700 degrees Celsius.

3. The method of claim 1 , wherein the heat sinks comprises at least one of diamond and diamond-like carbon.

4. The method of claim 1 , wherein the first process comprises forming a fully crystalline material on a crystalline substrate.

5. The method of claim 1 , wherein the first process comprises forming a material stack comprising of at least two of a plasmonic material layer, adhesion layer, protection layer, carrier layer, bonding layer, and chemical mechanical planarization stop material layer.

6. The method of claim 1 , wherein the first process comprises forming a sacrificial layer on a substrate, and forming the heat sinks on the sacrificial layer, and wherein the second process comprises bonding the heat sinks to the wafer and applying a separation force to separate the heat sinks from the sacrificial layer.

7. The method of claim 1 , wherein the heat sinks are thermally coupled to magnetic poles of the read/write heads.

8. The method of claim 1 , wherein the heat sinks are thermally coupled to optical components of the read/write heads.

9. The method of claim 1 , wherein the heat sinks are thermally coupled to read transducers of the read/write heads.

10. The method of claim 1 , wherein the heat sinks comprise boron nitride.

11. The method of claim 1 , further comprising forming additional components of the read/write heads over the heat sinks.

12. The method of claim 11 , wherein the additional components are formed using photolithography.

13. A method comprising:

forming a plurality of non-metallic heat sinks on a layer via a first process, the first process being incompatible with growth on a wafer on which a plurality of read/write heads are formed;

transfer printing the heat sinks to the plurality of read/write heads via a second process;

forming a plurality of near-field transducers of plasmonic material on the layer via the first process; and

transfer printing the near-field transducers to the wafer together with the heat sinks via the second process.

14. The method of claim 13 , wherein the first process comprises forming a sacrificial layer on a substrate, forming the heat sinks on the sacrificial layer, and wherein the transfer printing comprises bonding the heat sinks to the wafer and applying a separation force to separate the heat sinks from the sacrificial layer.

15. A method comprising:

forming a plurality of non-metallic heat sinks on a layer via a first process, the first process being incompatible with growth on a substrate on which a plurality of read/write heads are formed;

bonding the plurality of heat sinks to the read/write heads on the substrate via transfer printing;

forming additional components of the read/write heads over the heat sinks via a process that is compatible with growth on the substrate;

forming a plurality of near-field transducers on the layer via the first process; and

bonding the near-field transducers to the substrate together with the heat sinks via the transfer printing.

16. The method of claim 15 , wherein the process that is compatible with growth on the substrate comprises photolithography and layer deposition.

17. The method of claim 15 , further comprising, using photolithography, shaping or aligning the plurality of heat sinks on the read/write heads after the transfer printing.

18. The method of claim 15 , wherein the first process comprises forming a fully crystalline material on a crystalline substrate.

Continuity (2)
Division 14946274 · Nov 19, 2015
Provisional Application 62081765 · Nov 19, 2014
Cited By (2)
US 12,249,357 US 12,462,833