IP Library › Granted Patent US 10,985,100
Granted Patent B2
US 10,985,100 · App. 16/717,901 · Granted Apr 20, 2021

Chip package with recessed interposer substrate

Inventors: Shin-Puu Jeng (Po-Shan Village, TW); Po-Hao Tsai (Taoyuan, TW); Po-Yao Chuang (Hsinchu, TW); Feng-Cheng Hsu (New Taipei, TW); Shuo-Mao Chen (New Taipei, TW); Techi Wong (Hsinchu County, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L23/49838H01L21/486H01L21/4853H01L21/4857H01L21/52H01L21/563H01L21/565H01L21/568H01L21/6835H01L23/053H01L23/49822H01L24/16H01L24/27H01L24/32H01L24/73H01L24/81H01L24/92H01L24/96H01L25/105H01L25/50H01L21/561H01L23/3128H01L2221/68345H01L2221/68359H01L2221/68368H01L2224/0401H01L2224/16227H01L2224/16235H01L2224/26175H01L2224/32225H01L2224/73204H01L2224/73253H01L2224/81005H01L2224/81191H01L2224/83191H01L2224/92125H01L2224/92225H01L2224/97H01L2225/107H01L2225/1023H01L2225/1041H01L2225/1058H01L2924/15311
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Quick Facts
Patent No.
US 10,985,100
App. No.
16/717,901
Granted
Apr 20, 2021
Kind
B2
Abstract

A chip package is provided. The chip package includes a redistribution structure including an insulating layer and a wiring layer. The wiring layer is in the insulating layer. The chip package includes a chip over the redistribution structure and electrically connected to the wiring layer. The chip package includes an interposer substrate over the redistribution structure and the chip, wherein a portion of the chip is in the interposer substrate. The chip package includes a conductive structure between the interposer substrate and the redistribution structure and electrically connected to the wiring layer. The conductive structure includes a conductive bump or a conductive pillar. The chip package includes a molding layer surrounding the interposer substrate and the conductive structure. The molding layer is partially between the interposer substrate and the redistribution structure and partially between the interposer substrate and the chip.

Claims (40)

1. A chip package, comprising:

a redistribution structure comprising an insulating layer and a wiring layer, wherein the wiring layer is in the insulating layer;

a chip over the redistribution structure and electrically connected to the wiring layer;

an interposer substrate over the redistribution structure and the chip, wherein a portion of the chip is in the interposer substrate;

a conductive structure between the interposer substrate and the redistribution structure and electrically connected to the wiring layer, wherein the conductive structure comprises a conductive bump or a conductive pillar;

a molding layer surrounding the interposer substrate and the conductive structure, wherein the molding layer is partially between the interposer substrate and the redistribution structure and partially between the interposer substrate and the chip; and

a dam structure over the redistribution structure and surrounding the chip, wherein the molding layer is between the dam structure and the conductive structure.

2. The chip package as claimed in claim 1 , wherein the molding layer is partially between the dam structure and the interposer substrate.

3. The chip package as claimed in claim 1 , wherein the interposer substrate has a conductive layer over the chip, and the molding layer between the interposer substrate and the chip is in direct contact with the conductive layer and the chip.

4. The chip package as claimed in claim 3 , wherein the conductive layer is wider than the chip.

5. The chip package as claimed in claim 1 , further comprising:

a package structure over the interposer substrate, wherein the package structure is electrically connected to the wiring layer of the redistribution structure through the interposer substrate; and

an underfill layer between the package structure and the interposer substrate.

6. The chip package as claimed in claim 5 , wherein a portion of the underfill layer extends into the interposer substrate.

7. The chip package as claimed in claim 6 , wherein the portion has a ring shape.

8. The chip package as claimed in claim 5 , wherein a portion of the interposer substrate extends into the underfill layer.

9. The chip package as claimed in claim 8 , wherein the portion has a ring shape.

10. The chip package as claimed in claim 1 , wherein the interposer substrate comprises a substrate and an insulating layer over the substrate, and the chip passes through the insulating layer.

11. The chip package as claimed in claim 10 , wherein the chip extends into the substrate.

12. A chip package, comprising:

a redistribution structure comprising a first insulating layer and a first wiring layer, wherein the first wiring layer is in the first insulating layer;

a chip over the redistribution structure and electrically connected to the first wiring layer;

an interposer substrate over the redistribution structure and the chip, wherein the interposer substrate comprises a substrate and a wiring structure, the wiring structure is between the substrate and the redistribution structure, the wiring structure comprises a second insulating layer and a second wiring layer in the second insulating layer, a portion of the chip is in the wiring structure, and a topmost surface of the chip is spaced apart from the interposer substrate; and

a conductive structure between the interposer substrate and the redistribution structure and electrically connected to the first wiring layer, wherein the conductive structure comprises a conductive bump or a conductive pillar.

13. The chip package as claimed in claim 12 , further comprising:

an adhesive layer between and in direct contact with the chip and the interposer substrate.

14. The chip package as claimed in claim 12 , wherein the chip passes through the wiring structure.

15. The chip package as claimed in claim 14 , wherein the chip is partially in the substrate.

16. The chip package as claimed in claim 12 , further comprising:

a molding layer surrounding the interposer substrate and the conductive structure, wherein the molding layer is partially between the interposer substrate and the redistribution structure and partially between the interposer substrate and the chip.

17. The chip package as claimed in claim 12 , wherein the wiring structure is thicker than the substrate.

18. A chip package, comprising:

a redistribution structure comprising an insulating layer and a wiring layer, wherein the wiring layer is in the insulating layer;

a chip over the redistribution structure and electrically connected to the wiring layer;

an interposer substrate over the redistribution structure and the chip, wherein a portion of the chip is in the interposer substrate, and the redistribution structure is wider than the interposer substrate;

a conductive structure between the interposer substrate and the redistribution structure and electrically connected to the wiring layer, wherein the conductive structure comprises a conductive bump or a conductive pillar; and

an underfill layer between the interposer substrate and the redistribution structure and surrounding the interposer substrate, the conductive structure, and the chip, wherein the underfill layer covers a lower portion of a sidewall of the interposer substrate and exposes an upper portion of the sidewall.

19. The chip package as claimed in claim 18 , further comprising:

a dam structure over the redistribution structure and surrounding the chip, wherein the underfill layer is partially between the dam structure and the conductive structure.

20. The chip package as claimed in claim 19 , wherein the dam structure is partially in the interposer substrate.

Continuity (3)
Division 15874541 · Jan 18, 2018
Provisional Application 62579241 · Oct 31, 2017
Related Publication 20200126812A1 · Apr 23, 2020