Semiconductor device having an oxide layer with a concentration gradient of oxygen and an insulating layer with excess oxygen
A semiconductor device with favorable electrical characteristics is to be provided. A highly reliable semiconductor device is to be provided. A semiconductor device with lower power consumption is to be provided. The semiconductor device includes a gate electrode, a first insulating layer over the gate electrode, a metal oxide layer over the first insulating layer, a pair of electrodes over the metal oxide layer, and a second insulating layer over the pair of electrodes. The first insulating layer includes a first region and a second region. The first region has a region being in contact with the metal oxide layer and containing more oxygen than the second region. The second region has a region containing more nitrogen than the first region. The metal oxide layer has at least a concentration gradient of oxygen in a thickness direction, and the concentration gradient becomes high on a first region side and on a second region side.
1. A semiconductor device comprising:
a gate electrode;
a first insulating layer over the gate electrode;
a metal oxide layer over the first insulating layer;
a pair of electrodes over the metal oxide layer;
a second insulating layer over the pair of electrodes; and
a third insulating layer over the second insulating layer,
wherein the third insulating layer is silicon nitride,
wherein the metal oxide layer comprises In, an element M, and zinc,
wherein the element M is at least one of gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium,
wherein the second insulating layer comprises a first region and a second region,
wherein the first region comprises a region in contact with the metal oxide layer,
wherein the second region comprises a region containing more nitrogen than the first region and comprises a region containing more excess oxygen than the first region,
wherein the metal oxide layer has at least a concentration gradient of oxygen in a thickness direction, and
wherein the concentration gradient becomes high on a first region side and on a first insulating layer side.
2. The semiconductor device according to claim 1 , wherein the first region comprises a region with a thickness greater than or equal to 1 nm and less than or equal to 10 nm.
3. The semiconductor device according to claim 1 , wherein the metal oxide layer has an atomic ratio of M greater than or equal to 0.5 and less than or equal to 1.5 and an atomic ratio of Zn greater than or equal to 0.1 and less than or equal to 2 when an atomic ratio of In is 1.
4. The semiconductor device according to claim 1 , wherein the metal oxide layer has an atomic ratio of M greater than or equal to 1.5 and less than or equal to 2.5 and an atomic ratio of Zn greater than or equal to 2 and less than or equal to 4 when an atomic ratio of In is 4.
5. The semiconductor device according to claim 1 , wherein the metal oxide layer has an atomic ratio of M greater than or equal to 0.5 and less than or equal to 1.5 and an atomic ratio of Zn greater than or equal to 5 and less than or equal to 7 when an atomic ratio of In is 5.
6. The semiconductor device according to claim 1 ,
wherein the metal oxide layer comprises a first metal oxide layer and a second metal oxide layer over the first metal oxide layer, and
wherein the first metal oxide layer comprises a region having lower crystallinity than the second metal oxide layer.
7. The semiconductor device according to claim 1 ,
wherein the metal oxide layer comprises a first metal oxide layer, a second metal oxide layer over the first metal oxide layer, and a third metal oxide layer in contact with a bottom of the first metal oxide layer, and
wherein the first metal oxide layer comprises a region having lower crystallinity than one or both of the second metal oxide layer and the third metal oxide layer.
8. A semiconductor device comprising:
a gate electrode;
a first insulating layer over the gate electrode;
an oxide semiconductor layer over the first insulating layer;
a second insulating layer over the oxide semiconductor layer; and
a third insulating layer over the second insulating layer,
wherein the third insulating layer is silicon nitride,
wherein the second insulating layer comprises a first region and a second region,
wherein the first region is in contact with the oxide semiconductor layer,
wherein the second region contains more nitrogen than the first region and contains more excess oxygen than the first region,
wherein the oxide semiconductor layer has at least a concentration gradient of oxygen in a thickness direction, and
wherein the concentration gradient becomes high on a first region side and on a first insulating layer side.