Three-dimensional capacitor
Provided is a three-dimensional (3D) capacitor including conductors formed at a high density inside holes of an anodic oxide film, and a first electrode layer and a second electrode layer electrically connected to the conductors. Thus, a high capacitance relative to a size of the 3D capacitor may be easily achieved.
1. A three-dimensional (3D) capacitor comprising:
an anodic oxide film having a first plurality of holes therein and a second plurality of holes, each of the first plurality of holes extending in a vertical direction, each of the second plurality of holes extending in the vertical direction and having a larger inner diameter than that of each of the first plurality of holes, wherein the first plurality of holes are formed by anodizing a metal and are arranged regularly, and the second plurality of holes are formed by etching the first plurality of holes;
a plurality of conductors formed inside the second plurality of holes;
a first electrode layer formed on an upper surface of the anodic oxide film to be electrically connected to a first plurality of conductors among the plurality of conductors of the second plurality of holes; and
a second electrode layer formed on the upper surface of the anodic oxide film to be electrically connected to a second plurality of conductors among the plurality of conductors of the second plurality of holes, the first and second electrode layers being electrically separated from each other,
wherein the first electrode layer and the second electrode layer are alternately arranged, and
wherein the first electrode layer does not overlap with the second electrode layer when seen in a plan view.