Semiconductor devices comprising conductive patterns of varying dimensions and related systems
A metal pattern comprising interconnected small metal segments, medium metal segments, and large metal segments. At least one of the small metal segments comprises a pitch of less than about 45 nm and the small metal segments, medium metal segments, and large metal segments are separated from one another by variable spacing. Semiconductor devices comprising initial metallizations, systems comprising the metal pattern, and methods of forming a pattern are also disclosed.
1. A semiconductor device, comprising:
interconnected small conductive segments, medium conductive segments, and large conductive segments in a single patterned portion of a semiconductor device, at least one of the small conductive segments comprising a pitch of less than about 45 nm and the small conductive segments, the medium conductive segments, and the large conductive segments separated from one another by variable spacing,
the small conductive segments exhibiting a first width, the medium conductive segments exhibiting a second width greater than the first width, and the large conductive segments exhibiting a third width greater than the second width.
2. The semiconductor device of claim 1 , wherein the at least one of the small conductive segments comprises a pitch of less than about 40 nm.
3. The semiconductor device of claim 1 , wherein the at least one of the small conductive segments comprises a pitch between about 20 nm and about 25 nm.
4. The semiconductor device of claim 1 , wherein the at least one of the small conductive segments comprise a pitch between about 23 nm and about 25 nm.
5. The semiconductor device of claim 1 , wherein a conductive material of the conductive pattern comprises tungsten, titanium, nickel, platinum, ruthenium, aluminum, copper, molybdenum, gold, an alloy thereof, or a combination thereof.
6. The semiconductor device of claim 1 , wherein a conductive material of the conductive pattern comprises polysilicon.
7. A semiconductor device comprising:
an initial metallization configured as local interconnections and comprising small metal segments, medium metal segments, and large metal segments, at least one of the small metal segments comprising a pitch of less than about 45 nm and at least some of the small metal segments, the medium metal segments, and the large metal segments interconnected with one another; and
at least one additional metallization adjacent the initial metallization.
8. The semiconductor device of claim 7 , wherein the at least one of the small metal segments comprises a pitch of less than about 40 nm.
9. The semiconductor device of claim 7 , wherein the at least one of the small metal segments comprises a pitch of between about 20 nm and about 25 nm.
10. The semiconductor device of claim 7 , wherein the small metal segments, the medium metal segments, and the large metal segments are separated from one another by unequally spaced distances.
11. The semiconductor device of claim 7 , wherein the small metal segments, the medium metal segments, and the large metal segments comprise different widths.
12. The semiconductor device of claim 7 , further comprising a redistribution layer.
13. The semiconductor device of claim 12 , wherein the redistribution layer comprises metal lines equally spaced from one another.
14. A semiconductor device, comprising:
an initial conductive pattern comprising small conductive segments, medium conductive segments, and large conductive segments, at least one of the small conductive segments comprising a pitch of less than about 45 nm at least some of the small conductive segments, the medium conductive segments, and the large conductive segments interconnected with one another, and the small conductive segments exhibiting one or more first widths, the medium conductive segments exhibiting one or more second widths greater than the first widths, and the large conductive segments exhibiting one or more third widths greater than the second widths; and
at least one additional conductive pattern over the initial conductive pattern.
15. The semiconductor device of claim 14 , further comprising an additional material over the initial conductive pattern.
16. A system comprising:
a memory array comprising memory cells, at least one of the memory cells comprising a conductive pattern comprising small conductive segments, medium conductive segments, and large conductive segments, at least one of the small conductive segments comprising a pitch of less than about 45 nm and at least some of the small conductive segments, the medium conductive segments, and the large conductive segments interconnected with one another in a single pattern; and
at least one input device, at least one output device, a storage device, and a processor in operative communication with the memory array.
17. The system of claim 16 , wherein the small conductive segments, the medium conductive segments, and the large conductive segments are configured as an initial metallization of at least one of the memory cells.
18. The system of claim 16 , wherein the small conductive segments, the medium conductive segments, and the large conductive segments are unequally spaced from one another.