Image sensor including dummy isolation structure
An imaging device may include regions of active pixels, which are included in the generation of a photoelectric signal, and dummy pixels, which are not included in the generation of a photoelectric signal. Electrical characteristics of the dummy pixels may affect the photoelectric signal produced by the active pixels unless isolation is provided to reduce the electrical conductivity therebetween. An image sensor includes a substrate including an active pixel region and a dummy pixel region, a pixel isolation structure at least partially penetrating the substrate and configured to reduce electrical conductivity between an active pixel in the active pixel region and a dummy pixel in the dummy pixel region, and a dummy isolation structure at least partially penetrating the substrate of the dummy pixel region.
1. An image sensor comprising:
a substrate comprising an active pixel region and a dummy pixel region;
a conductive contact located in the dummy pixel region;
a pixel isolation structure configured to at least partially penetrate the substrate, wherein the pixel isolation structure is configured to provide electrical isolation between an active pixel in the active pixel region and a dummy pixel in the dummy pixel region; and
a dummy isolation structure located between the conductive contact and the active pixel region and configured to at least partially penetrate the substrate of the dummy pixel region, wherein
at least one dummy pixel in the dummy pixel region is surrounded by the pixel isolation structure, when viewed in plan view,
at least one active pixel in the active pixel region is surrounded by the pixel isolation structure, when viewed in plan view, and
the dummy isolation structure includes a first conductor and the pixel isolation structure includes a second conductor.
2. The image sensor according to claim 1 , wherein the pixel isolation structure includes a first insulation layer that at least partially filling an isolation trench between the active pixel and the dummy pixel.
3. The image sensor according to claim 1 , further comprising:
a conductive contact directly connected to the first conductor.
4. The image sensor according to claim 3 , wherein the dummy isolation structure is located in the dummy pixel region, in plan view.
5. The image sensor according to claim 1 , wherein the dummy isolation structure has at least one of a substantially linear shape, a substantially cross shape, or a substantially block shape, in plan view.
6. The image sensor according to claim 3 ,
wherein the dummy pixel region between the conductive contact and the active pixel region includes at least two adjacent dummy pixels, and
wherein the dummy isolation structure is located between the at least two adjacent dummy pixels.
7. The image sensor according to claim 6 , wherein the dummy isolation structure is connected to the pixel isolation structure between the adjacent dummy pixels.
8. The image sensor according to claim 1 ,
wherein the pixel isolation structure includes an electrically insulating material, and
wherein the dummy isolation structure also includes the electrically insulating material.
9. The image sensor according to claim 3 ,
wherein the pixel isolation structure includes a first insulation layer.
10. The image sensor according to claim 3 , wherein the conductive contact is configured to apply a negative voltage to the dummy pixel region.
11. The image sensor according to claim 1 , further comprising:
a second dummy isolation structure that includes a second insulation layer; and
a second conductor located on the second insulation layer.
12. An image sensor comprising:
an active pixel region including an active pixel surrounded by a pixel isolation structure in plan view;
a first dummy pixel region including a dummy pixel;
a second dummy pixel region;
a conductive contact located in the dummy pixel region; and
a dummy isolation structure in the second dummy pixel region that is configured to electrically isolate the dummy pixel and the second dummy pixel region,
wherein the dummy isolation structure is located between the conductive contact and the active pixel region,
wherein the pixel isolation structure surrounds the dummy pixel in plan view and at least one active pixel in plan view, and
the dummy isolation structure includes a first conductor and the pixel isolation structure including a second conductor.
13. The image sensor according to claim 12 , further comprising:
a substrate within which the active pixel region and the dummy pixel region are located, wherein
the pixel isolation structure is configured to at least partially penetrate the substrate, the pixel isolation structure configured to electrically isolate the active pixel in the active pixel region and the dummy pixel in the first dummy pixel region; and the image sensor further comprises
a conductive contact connected to the pixel isolation structure,
wherein the second dummy pixel region is between the active pixel and the conductive contact.
14. The image sensor according to claim 13 , wherein the dummy isolation structure is configured to at least partially penetrate the substrate.
15. The image sensor according to claim 13 ,
wherein the pixel isolation structure includes an electrically insulating material, and
wherein the dummy isolation structure also includes the electrically insulating material.
16. The image sensor according to claim 12 , wherein the dummy isolation structure includes an insulation layer.
17. The image sensor according to claim 12 , wherein the dummy isolation structure has a substantially linear shape, a substantially cross shape, or a substantially block shape, in plan view.
18. An image sensor comprising:
a substrate including at least two pixel regions including an active pixel region having at least one active pixel and a dummy pixel region having at least one dummy pixel;
a dummy isolation structure in the substrate;
a pixel isolation structure in the substrate that is configured to electrically isolate the at least two pixel regions, the pixel isolation structure having a lattice shape, the pixel isolation structure surrounding the at least one active pixel and at least one dummy pixel in plan view,
wherein the dummy pixel region includes a first dummy pixel region and a second dummy pixel region,
wherein a distance between first adjacent portions of the pixel isolation structure in the first dummy pixel region is less than a distance between second adjacent portions of the pixel isolation structure in the active pixel region,
wherein a distance between third adjacent portions of the pixel isolation structure in the second dummy pixel region is the same as the distance between the second adjacent portions of the pixel isolation structure in the active pixel region, and
the dummy isolation structure includes a first conductor and the pixel isolation structure includes a second conductor.
19. The image sensor according to claim 18 , further comprising a conductive contact connected to at least a portion of the dummy pixel region,
wherein the first dummy pixel region is between the conductive contact and the active pixel region.
20. The image sensor according to claim 18 , wherein the pixel isolation structure is configured to at least partially penetrate the substrate.