Magnetic field detection device

1. A magnetic field detection device comprising a plurality of magnetic sensor units, each having a magnetic sensor that includes a substrate and an element, a canceling magnetic field generator and an electric circuit, at least a part of the magnetic sensor being located inside an envelope surface of the canceling magnetic field generator, wherein

the element outputs a detection value corresponding to an input magnetic field component in a sensitive axis direction;

the canceling magnetic field generator is formed by winding a conductor around a direction substantially parallel to the sensitive axis as a winding axis;

the electric circuit applies a feedback current based on the detection value to the canceling magnetic field generator to cause the canceling magnetic field generator to generate a canceling magnetic field that reduces the input magnetic field;

the magnetic sensor units include at least a first magnetic sensor unit, a second magnetic sensor unit, a third magnetic sensor unit and a fourth magnetic sensor unit;

the first magnetic sensor unit and the second magnetic sensor unit are disposed side by side so that the sensitive axis directions of the first magnetic sensor unit and the second magnetic sensor unit are oriented in a first direction;

the third magnetic sensor unit and the fourth magnetic sensor unit are disposed side by side so that the sensitive axis directions of the third magnetic sensor unit and the fourth magnetic sensor unit are oriented in a second direction substantially orthogonal to the first direction;

the first magnetic sensor unit and the second magnetic sensor unit are disposed between a plane that includes a center of gravity of the third magnetic sensor unit and defines the second direction as a normal direction and a plane that includes a center of gravity of the fourth magnetic sensor unit and defines the second direction as a normal direction;

the third magnetic sensor unit and the fourth magnetic sensor unit are disposed between a plane that includes a center of gravity of the first magnetic sensor unit and defines the first direction as a normal direction and a plane that includes a center of gravity of the second magnetic sensor unit and defines the first direction as a normal direction;

the magnetic sensor units include a fifth magnetic sensor unit disposed so that the sensitive axis direction of the fifth magnetic sensor unit coincides with a third direction substantially orthogonal to the first direction and to the second direction; and

a center of gravity of the fifth magnetic sensor unit is disposed between a plane that includes a center of gravity of the first magnetic sensor unit and defines the first direction as a normal direction and a plane that includes a center of gravity of the second magnetic sensor unit and defines the first direction as a normal direction, and is disposed between a plane that includes a center of gravity of the third magnetic sensor unit and defines the second direction as a normal direction and a plane that includes a center of gravity of the fourth magnetic sensor unit and defines the second direction as a normal direction.

2. The magnetic field detection device according to claim 1 , wherein

the magnetic sensor units include a sixth magnetic sensor unit disposed so that the sensitive axis direction of the sixth magnetic sensor unit coincides with the third direction;

a center of gravity of the sixth magnetic sensor unit is disposed between a plane that includes a center of gravity of the first magnetic sensor unit and defines the first direction as a normal direction and a plane that includes a center of gravity of the second magnetic sensor unit and defines the first direction as a normal direction, and is disposed between a plane that includes a center of gravity of the third magnetic sensor unit and defines the second direction as a normal direction and a plane that includes a center of gravity of the fourth magnetic sensor unit and defines the second direction as a normal direction; and

the first magnetic sensor unit, the second magnetic sensor unit, the third magnetic sensor unit and the fourth magnetic sensor unit are disposed between a plane that includes a center of gravity of the fifth magnetic sensor unit and defines the third direction as a normal direction and a plane that includes a center of gravity of the sixth magnetic sensor unit and defines the third direction as a normal direction.

3. The magnetic field detection device according to claim 1 , comprising a signal processing circuit configured to calculate a difference between the detection values of the magnetic sensor units in a same sensitive axis direction.

4. The magnetic field detection device according to claim 3 , wherein the signal processing circuit calculates a difference between each of the detection values of at least one of a first magnetic sensor unit, a second magnetic sensor unit, a third magnetic sensor unit and a fourth magnetic sensor unit and a detection value of a magnetic sensor unit disposed respectively at a specific distance in a specific direction.

5. The magnetic field detection device according to claim 1 , wherein the first magnetic sensor unit, the second magnetic sensor unit, the third magnetic sensor unit and the fourth magnetic sensor unit are disposed repeatedly in the first direction and the second direction.

6. The magnetic field detection device according to claim 1 , wherein the electric circuit has a function of adjusting an offset value of the feedback current.

7. The magnetic field detection device according to claim 1 , wherein the magnetic sensor includes a magnetic concentrator configured to concentrate an input magnetic field to the element.

8. The magnetic field detection device according to claim 7 , wherein

the magnetic concentrator is disposed on both sides of the element in a direction parallel to the sensitive axis; and

a first length connecting both ends in the sensitive axis direction, a second length that is a maximum length in a direction vertical to a principal surface of the substrate and a third length that is a length connecting both ends in a direction vertical to the sensitive axis direction and the direction vertical to the principal surface of the substrate satisfy the second length<the third length<the first length.

9. The magnetic field detection device according to claim 7 , wherein the magnetic concentrator includes a first soft magnetic layer formed on the substrate and a second soft magnetic layer being in directly contact with the first soft magnetic layer.

10. The magnetic field detection device according to claim 7 , wherein the magnetic sensor unit includes the magnetic concentrator inside an envelope surface of a canceling magnetic field generator.

11. The magnetic field detection device according to claim 1 , wherein the element is composed of a laminated layer of a free layer, a non-magnetic layer and a pinned layer.

12. The magnetic field detection device according to claim 11 , wherein,

in the element, the free layer, the non-magnetic layer and the pinned layer are laminated in this order; and

an area of a surface of the free layer parallel to a principal surface of the substrate is larger than an area of a surface of the pinned layer parallel to the principal surface of the substrate.

13. The magnetic field detection device according to claim 11 , wherein

the magnetic sensor includes the elements; and

the elements are disposed side by side in a direction vertical to the sensitive axis direction of the magnetic sensor and are electrically connected in series.

14. The magnetic field detection device according to claim 11 , wherein

the magnetic concentrator includes a first soft magnetic layer formed on the substrate and a second soft magnetic layer being in directly contact with the first soft magnetic layer, and

a thickness of the free layer, a thickness of the first soft magnetic layer and a thickness of the second soft magnetic layer increase in this order.

15. The magnetic field detection device according to claim 11 , wherein

the magnetic sensor includes a magnetic concentrator configured to concentrate an input magnetic field to the element, and

a length of the free layer in the sensitive axis direction is longer than a length of a region sandwiched between the magnetic concentrators disposed on both sides of the element.