Multi-directional actuator
An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.
1. A method, comprising:
connecting an inner frame to one or more bidirectional comb drive actuators using a cantilever for each of the bidirectional comb drive actuators, wherein a first end of the cantilever is directly connected to the inner frame and wherein a second end of the cantilever is directly connected to each of the bidirectional comb drive actuators respectively, and wherein the inner frame surrounds at least a portion of the one or more bidirectional comb drive actuators;
coupling electrical signals to the bidirectional comb drive actuators using the cantilevers;
generating a controlled force using the bidirectional comb drive actuators and the electrical signals;
applying the controlled force between an outer frame and an inner frame; and
mechanically fixing an anchor with respect to the outer frame, wherein the controlled force is applied to the anchor.
2. The method of claim 1 , wherein each of the bidirectional comb drive actuators comprises first and second comb drives, and wherein the first and second comb drives each comprise first and second comb finger arrays, further comprising:
moving, in response to applying the controlled force, either the second comb finger array of the first comb drive and the first comb finger array of the second comb drive, or the first comb finger array of the first comb drive and the second comb finger array of the second comb drive.
3. The method of claim 1 , wherein the controlled force effects movement in a plane, and wherein the movement comprises linear movement.
4. The method of claim 1 , wherein the controlled force effects movement in a plane, and wherein the movement comprises rotational movement.
5. The method of claim 1 , wherein the bidirectional comb drive actuators comprise flexures, and wherein, for one or more of the bidirectional comb drive actuators, coupling the electrical signals to the bidirectional comb drive actuators comprises using the flexures to route the electrical signals.