Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems

1. A pedestal for a plasma processing system, comprising:

a substrate supporting surface;

an annular edge ring arranged around a periphery of the substrate supporting surface; and

a diamond coating arranged on a plasma-exposed surface of the annular edge ring,

wherein the diamond coating includes sp3 bonds, and

wherein a purity of the sp3 bonds in the diamond coating is greater than 99%.

2. The pedestal of claim 1 , wherein the diamond coating is deposited on the annular edge ring using chemical vapor deposition (CVD).

3. A plasma processing system comprising:

a processing chamber, wherein the pedestal of claim 1 is arranged in the processing chamber; and

a plasma source to create plasma in the processing chamber.

4. The plasma processing system of claim 3 , wherein the plasma source includes a capacitively-coupled plasma (CCP) source.

5. The plasma processing system of claim 3 , wherein the plasma source includes an inductively-coupled plasma (ICP) source.

6. A plasma processing system comprising:

a processing chamber, wherein the pedestal of claim 1 is arranged in the processing chamber; and

a remote plasma source to supply plasma to the processing chamber.

7. A plasma processing system, comprising:

a processing chamber;

a plasma source to one of supply plasma to the processing chamber and create plasma in the processing chamber; and

at least one component arranged in the processing chamber including a diamond coating,

wherein the diamond coating includes sp3 bonds, and

wherein a purity of the sp3 bonds in the diamond coating is greater than 99%.

8. The plasma processing system of claim 7 , wherein the diamond coating is deposited on the at least one component using chemical vapor deposition (CVD).

9. The plasma processing system of claim 7 , wherein the at least one component is selected from a group consisting of:

an edge ring;

a chamber wall;

a gas distribution device;

a gas injector;

a window into the processing chamber; and

an upper surface of a pedestal.

10. An edge ring for a plasma processing system, comprising:

an annular ring; and

a diamond coating arranged on a surface of the annular ring that is exposed to plasma during use,

wherein the diamond coating includes sp3 bonds, and

wherein a purity of the sp3 bonds in the diamond coating is greater than 99%.

11. The edge ring of claim 10 , wherein the diamond coating is deposited on the annular ring using chemical vapor deposition (CVD).

12. The edge ring of claim 10 , wherein the annular ring is made of a material selected from a group consisting of silicon (Si), silicon carbide (SiC) and silicon dioxide (SiO 2 ).

13. The edge ring of claim 10 , wherein the diamond coating has a thickness of 1 μm to 1 mm.

14. The edge ring of claim 10 , wherein the diamond coating has a thickness of 100 μm to 1 mm.

15. A component for a plasma processing system, comprising:

a surface that is exposed to plasma during use of the plasma processing system; and

a diamond coating arranged on the surface of the component,

wherein the diamond coating includes sp3 bonds, and

wherein a purity of the sp3 bonds in the diamond coating is greater than 99%.

16. The component of claim 15 , wherein the diamond coating is deposited on the component using chemical vapor deposition (CVD).

17. The component of claim 15 , wherein the component is made of a material selected from a group consisting of silicon (Si), silicon carbide (SiC) and silicon dioxide (SiO 2 ).

18. The component of claim 15 , wherein the diamond coating has a thickness of 1 μm to 1 mm.

19. The component of claim 15 , wherein the diamond coating has a thickness of 100 μm to 1 mm.

20. The component of claim 15 , wherein the component is selected from a group consisting of:

an edge ring;

a chamber wall;

a gas distribution device;

a gas injector;

a window into a processing chamber; and

an upper surface of a pedestal.