Organic EL display device and manufacturing method for organic EL display device
This organic EL display apparatus is equipped with a substrate that has a surface with a drive circuit being formed on the surface and comprising a thin film transistor, a planarizing layer that makes the surface of the substrate planar by covering the drive circuit, and an organic light-emitting element that is formed upon the surface of the planarizing layer and is electrically connected to the drive circuit. The planarizing layer includes a first inorganic insulating layer being deposited upon the drive circuit, an organic insulating layer being deposited upon the first inorganic insulating layer, and a second inorganic insulating layer being deposited upon the organic insulating layer. The surface of the second inorganic insulating layer that faces the opposite direction from the organic insulating layer has an arithmetic mean roughness of no more than 50 nm.
1. An organic-EL display apparatus, comprising:
a substrate having a surface with a drive circuit being formed on the surface, the drive circuit comprising a thin-film transistor;
a planarizing layer to planarize the surface of the substrate by covering the drive circuit; and
an organic light-emitting element being formed on a surface of the planarizing layer and electrically connected to the drive circuit, wherein
the planarizing layer comprises a first inorganic insulating layer being deposited on the drive circuit; an organic insulating layer being deposited on the first inorganic insulating layer; and a second inorganic insulating layer being deposited on the organic insulating layer,
a surface of the second inorganic insulating layer facing to an opposite orientation from the organic insulating layer has an arithmetic average roughness of 20 nm or more and 50 nm or less, and
a surface of the organic insulating layer facing to the second inorganic insulating layer has an arithmetic average roughness of 100 nm or more and 300 nm or less.
2. The organic-EL display apparatus according to claim 1 , wherein the organic insulating layer comprises an additive agent at a content rate of 0.5 mass % or more and 5 mass % or less, wherein the additive agent improves a planarity of the surface of the organic insulating layer.
3. The organic-EL display apparatus according to claim 1 , wherein the drive circuit and the organic light-emitting element are connected via a metal being embedded in a contact hole collectively penetrating the first inorganic insulating layer, the organic insulating layer, and the second inorganic insulating layer.
4. A method of manufacturing the organic-EL display apparatus according to claim 1 , the method comprising:
forming a drive circuit on a substrate, the drive circuit comprising a thin-film transistor;
forming, on a surface of the drive circuit, a first inorganic insulating layer, an organic insulating layer, and a second inorganic insulating layer;
polishing a surface of the second inorganic insulating layer;
forming a contact hole in the second inorganic insulating layer, the organic insulating layer, and the first inorganic insulating layer, so as to reach the drive circuit;
embedding a metal at an interior of the contact hole and forming a first electrode at a given region;
forming an organic light-emitting layer on the first electrode; and
forming a second electrode on the organic light-emitting layer, wherein
in polishing of the surface of the second inorganic insulating layer, the surface of the second inorganic insulating layer is polished so as to have an arithmetic average roughness of 50 nm or less by chemical mechanical polishing using, as a polishing agent, a neutral slurry containing cerium, colloidal silica, or fumed silica, and
in polishing of the surface of the second inorganic insulating layer, the surface of the second inorganic insulating layer is polished so as to have an arithmetic average roughness of 20 nm or more and 50 nm or less.
5. The method of manufacturing the organic-EL display apparatus according to claim 4 , wherein, in polishing of the surface of the second inorganic insulating layer, the surface of the second inorganic insulating layer is polished using a neutral alcohol solution together with the polishing agent.
6. The method of manufacturing the organic-EL display apparatus according to claim 4 , wherein,
in forming of the second inorganic insulating layer, the second inorganic insulating layer is formed so as to have a thickness of equal to or more than twice a maximum height difference of an unevenness of a surface of the organic insulating layer facing to the second inorganic insulating layer, and
in polishing of the surface of the second inorganic insulating layer, the second inorganic insulating layer is polished such that an amount of decrease in thickness of the second inorganic insulating layer due to the polishing reaches, at least partially, an amount equal to or more than one times the maximum height difference and less than two times the maximum height difference.
7. The method of manufacturing the organic-EL display apparatus according to claim 6 , wherein, in forming of the second inorganic insulating layer, the second inorganic insulating layer is formed so as to have a thickness of equal to or more than two times the maximum height difference and equal to or less than three times the maximum height difference.
8. The method of manufacturing the organic-EL display apparatus according to claim 4 , wherein forming of the contact hole is carried out by dry etching.
9. The method of manufacturing the organic-EL display apparatus according to claim 4 , wherein the contact hole is formed at a region not overlapping with a certain region in a thickness direction of the substrate, the certain region is a region at which the organic light-emitting layer is to be formed.
10. An organic-EL display apparatus, comprising:
a substrate having a surface with a drive circuit being formed on the surface, the drive circuit comprising a thin-film transistor;
a planarizing layer to planarize the surface of the substrate by covering the drive circuit; and
an organic light-emitting element being formed on a surface of the planarizing layer and electrically connected to the drive circuit, wherein
the planarizing layer comprises a first inorganic insulating layer being deposited on the drive circuit; an organic insulating layer being deposited on the first inorganic insulating layer; and a second inorganic insulating layer being deposited on the organic insulating layer,
a surface of the second inorganic insulating layer facing to an opposite orientation from the organic insulating layer has an arithmetic average roughness of 20 nm or more and 50 nm or less,
a thickness of the second inorganic insulating layer varies based on an unevenness of a surface of the organic insulating layer facing to the second inorganic insulating layer, and
the thickness of the second inorganic insulating layer is equal to or more than one times a maximum height difference of the unevenness and equal to or less than three times the maximum height difference of the unevenness over an entirety of the surface of the organic insulating layer.