Piezoelectric element, piezoelectric microphone, piezoelectric resonator and method for manufacturing piezoelectric element
A piezoelectric element includes a first piezoelectric layer which has a first polarization axis direction in a thickness direction of the first piezoelectric layer and is made of AlN. A second piezoelectric layer made of GeAIN which is deposited on the first piezoelectric layer and has a second polarization axis direction opposite to the first polarization axis direction. A first electrode is provided on a side of the first piezoelectric layer which is opposite from a side where the second piezoelectric layer is disposed. A second electrode provided on a side of the second piezoelectric layer which is opposite from a side where the first piezoelectric layer is disposed.
1. A piezoelectric element, comprising:
a first piezoelectric layer which has a first polarization axis direction in a thickness direction of the first piezoelectric layer and is made of AlN;
a second piezoelectric layer which is deposited on the first piezoelectric layer, has a second polarization axis direction opposite to the first polarization axis direction and is made of GeAlN;
a first electrode provided on a side of the first piezoelectric layer which is opposite from a side where the second piezoelectric layer is disposed: and
a second electrode provided on a side of the second piezoelectric layer which is opposite from a side where the first piezoelectric layer is disposed.
2. The piezoelectric element according to claim 1 , wherein the second piezoelectric layer is directly deposited on the first piezoelectric layer.
3. A piezoelectric device, comprising:
the piezoelectric element according to claim 1 ; and
a support which supports the piezoelectric element from a side of the first piezoelectric layer so as to have a space where the piezoelectric element vibrates.
4. A method for manufacturing a piezoelectric element, the method comprising the steps of:
forming a first piezoelectric layer made of AlN by deposition so as to have a first polarization axis direction in a thickness direction of the first piezoelectric layer;
forming a second piezoelectric layer made of GeAlN by deposition on the first piezoelectric layer so as to have a second polarization axis direction opposite to the first polarization axis direction;
providing a first electrode on a side of the first piezoelectric layer which is opposite from a side where the second piezoelectric layer is disposed; and
providing a second electrode on a side of the second piezoelectric layer which is opposite from a side where the first piezoelectric layer is disposed.
5. The method according to claim 4 , wherein the second piezoelectric layer is directly formed on the first piezoelectric layer in the step of forming the second piezoelectric layer.