Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structure
A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a specimen with a detection unit to sequentially inspect a plurality of specimens on the basis of an acquired transmission image, includes a setting unit that sets a region to be inspected on a portion of the specimen; a determination unit that determines the non-defectiveness of the region to be inspected by using a transmission image of the x-ray that passed through the region to be inspected; a correction unit that performs a correction on the region to be inspected on the basis of a determination result by the determination unit; and a display control unit that displays the corrected region to be inspected corrected by the correction unit.
1. A measurement processing method, comprising:
setting an evaluation region of a specimen;
calculating, for each of a plurality of lattice grids, a plurality of different non-defective factors regarding the specimen from shape information acquired based upon a transmission image of x-ray that has transmitted the specimen; and
determining non-defectiveness of the evaluation region based upon the calculated plurality of different non-defectiveness factors for each of the plurality of lattice grids.
2. The measurement processing method according to claim 1 , wherein
the non-defectiveness of the evaluation region is based upon a possibility of a defect to be occurred in the specimen.
3. The measurement processing method according to claim 1 , wherein
the non-defectiveness factor is a factor based upon an internal defect of the specimen.
4. The measurement processing method according to claim 1 , wherein
the non-defectiveness factor is ratio of an internal defect per unit volume.
5. The measurement processing method according to claim 1 , wherein
the non-defectiveness factor is distance between an internal defect and a surface of the specimen.
6. The measurement processing method according to claim 1 , wherein
the non-defectiveness factor is based upon the shape information acquired based upon transmission images of x-ray that has transmitted a plurality of specimens.
7. The measurement processing method according to claim 1 , wherein
evaluating the non-defectiveness of the evaluation region by weighting the calculated plurality of different non-defectiveness factors.
8. The measurement processing method according to claim 1 , further comprising
displaying the non-defectiveness of the evaluation region in correspondence with a display of the evaluation region.
9. The measurement processing method according to claim 1 , further comprising
correcting the evaluation region based upon the non-defectiveness of the evaluation region.
10. The measurement processing method according to claim 1 , wherein
the evaluation region is set in a site of the specimen.
11. The measurement processing method according to claim 1 , wherein
the evaluation region is set based upon a function of the site of the specimen.
12. The measurement processing method according to claim 1 , further comprising
storing history data regarding determination results of the non-defectiveness.
13. The measurement processing method according to claim 1 , further comprising:
setting the non-defectiveness of the lattice grid based upon the calculated plurality of different non-defective factors for the same lattice grid;
calculating an average of the non-defectiveness in the same lattice grid, a standard deviation of the non-defectiveness in the same lattice grid or a ratio of change in time of the non-defectiveness in the same lattice grid as an evaluation coefficient; and
changing the evaluation region when the evaluation coefficient is determined to be greater than or equal to a threshold.
14. A measurement processing device, comprising:
a calculation unit that calculates, for each of a plurality of lattice grids, a plurality of different non-defective factors regarding a specimen from shape information acquired based upon a transmission image of x-ray that has transmitted the specimen; and
a determination unit that determines non-defectiveness of an evaluation region based upon the calculated plurality of different non-defectiveness factors for each of the plurality of lattice grids.
15. A method for manufacturing structures, comprising:
creating design information regarding the shape of a structure;
creating the structure on the basis of the design information;
acquiring shape information by measuring the shape of the created structure by using the measurement processing device according to claim 14 ; and
comparing the acquired shape information and the design information.
16. An x-ray inspection apparatus, comprising:
a setting unit that sets an evaluation region on a partial region of a specimen;
a calculation unit that calculates, for each of a plurality of lattice grids, a plurality of different non-defective factors regarding the specimen from shape information acquired based upon a transmission image of x-ray that has transmitted the specimen; and
a determination unit that determines non-defectiveness of the evaluation region based upon the calculated plurality of different non-defectiveness factors for each of the plurality of lattice grids.