Thin film transistor, array substrate, display panel and method for manufacturing thin film transistor
The present disclosure provides a thin film transistor, including a base substrate, an active layer and a source/drain, and a conductive layer. The active layer and an outer edge of the conductive layer are formed in the same etching process. The present disclosure further provides a method for manufacturing a thin film transistor, including forming an active material layer and a conductive material layer, forming a photoresist on the conductive material layer, exposing and developing the photoresist by means of a halftone mask, removing segments of the active material layer and the conductive material layer corresponding to a photoresist completely-removed region by a same etching process, partially removing the photoresist in a photoresist completely-retained region and completely removing the photoresist in a photoresist partially-retained region, and removing a segment of the conductive material layer corresponding to the photoresist partially-retained region.
1. A method for manufacturing a thin film transistor, comprising:
forming an active material layer, and forming a conductive material layer on the active material layer;
forming a photoresist on the conductive material layer;
exposing and developing the photoresist using a halftone mask such that the photoresist is divided into a photoresist completely-removed region, a photoresist completely-retained region, and a photoresist partially-retained region;
removing a segment of the active material layer and a segment of the conductive material layer corresponding to the photoresist completely-removed region by a same etching process to form a stack of an active layer and a patterned conductive material layer;
partially removing the photoresist in the photoresist completely-retained region and completely removing the photoresist in the photoresist partially-retained region;
removing a segment of the conductive material layer corresponding to the photoresist partially-retained region, to form a conductive layer; and
forming a source/drain on a side of the conductive layer away from the active layer,
wherein the source/drain is electrically connected to the active layer through the conductive layer.
2. The method for manufacturing the thin film transistor of claim 1 , wherein the removing the segment of the active material layer and the segment of the conductive material layer comprises:
etching the segment of the active material layer and the segment of the conductive material layer corresponding to the photoresist completely-removed region by a wet etching process.
3. The method for manufacturing the thin film transistor of claim 1 , wherein the removing the segment of the active material layer and the segment of the conductive material layer comprises:
etching the active material layer and the conductive material layer by using a same etching solution.
4. The method for manufacturing the thin film transistor of claim 1 ,
wherein an active material comprised by the active material layer comprises IGZO or ITZO, and
wherein a conductive material comprised by the conductive material layer comprises ITO or IZO.
5. The method for manufacturing the thin film transistor of claim 1 , wherein the partially removing the photoresist in the photoresist completely-retained region and completely removing the photoresist in the photoresist partially-retained region comprises:
illuminating and developing the photoresist completely-retained region and the photoresist partially-retained region, such that the photoresist in the photoresist partially-retained region is completely removed and the photoresist in the photoresist completely-retained region is partially removed in a direction perpendicular to the active material layer.
6. The method for manufacturing the thin film transistor of claim 1 , wherein the removing the segment of the conductive material layer corresponding to the photoresist partially-retained region to form the conductive layer comprises:
etching the segment of the conductive material layer corresponding to the photoresist partially-retained region by a wet etching process.
7. The method for manufacturing the thin film transistor of claim 1 , wherein the removing the segment of the active material layer and the segment of the conductive material layer corresponding to the photoresist completely-removed region by the same etching process to form the stack of the active layer and the patterned conductive material layer and the step of removing the segment of the conductive material layer corresponding to the photoresist partially-retained region to form the conductive layer use a same etching material.
8. The method for manufacturing the thin film transistor of claim 1 , further comprising:
removing the photoresist in the photoresist completely-retained region.