IP Library Granted Patent US 11,022,383
Granted Patent B2
US 11,022,383 · App. 15/184,891 · Granted Jun 1, 2021

Interface-free thermal management system for high power devices co-fabricated with electronic circuit

Inventors: Steve Q. Cai (Newbury Park, CA); Avijit Bhunia (Newbury Park, CA); Tadej Semenic (Thousand Oaks, CA)
Assignee: TELEDYNE SCIENTIFIC & IMAGING, LLC
F28F3/048F28D15/0233F28D15/046H01L23/427F28D2021/0028F28F2255/18F28F2260/00
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Quick Facts
Patent No.
US 11,022,383
App. No.
15/184,891
Granted
Jun 1, 2021
Kind
B2
Abstract

A thermal-interface-material (TIM)-free thermal management apparatus includes a thermally-conductive unitary structure having an integrated circuit (IC) side and cooling system side, the thermally-conductive unitary structure including a plurality of high aspect ratio micro-pillars or porous structures extending from the IC side and a cooling system extending from the cooling system side. The cooling system may be selected from the group consisting of: a vapor chamber, micro-channel cooler, jet-impingement chamber, and air-cooled heat sink. The cooling system and the plurality of high aspect ratio micro-pillars form part of the same homogenous and thermally-conductive unitary structure.

Claims (26)

1. A thermal-interface-material (TIM)-free thermal management apparatus, comprising:

a thermally-conductive unitary structure comprising:

an integrated circuit (IC) side;

a cooling system side oppositely disposed from the IC side;

a plurality of micro-pillars extending outwardly from the IC side, wherein the micro-pillars comprise a height in a range of 10 micrometers to 1000 micrometers and a diameter in a range of 1 micrometer to 50 micrometers; and

a cooling system extending from the cooling system side, the cooling system selected from the group: a vapor chamber, a micro-channel cooler, a jet-impingement chamber, or an air-cooled heat sink;

wherein the IC side, the cooling system side, the cooling system, and the plurality of micro-pillars or porous structures are parts of a monolithic body without a thermal-interface-material in between the parts.

2. The apparatus of claim 1 , wherein the cooling system is a jet impingement cooler and wherein the unitary structure further comprises:

an array of jets disposed in complementary opposition to a heat acquisition surface within the jet impingement cooler.

3. The apparatus of claim 1 , further comprising:

a device configured to emit heat seated on the plurality of micro-pillars.

4. The apparatus of claim 1 , wherein the thermally-conductive unitary structure further comprises an electrical circuit portion.

5. An apparatus, comprising:

an integrated and unitary body of homogenous material having:

an integrated circuit (IC) layer;

a plurality of micro-pillars extending from the IC layer, wherein the micro-pillars comprise a height in a range of 10 micrometers to 1000 micrometers and a diameter in a range of 1 micrometer to 50 micrometers;

a first heat exchange layer in thermal communication with the integrated circuit layer, the first heat exchange layer selected from the group: a vapor chamber, a micro-channel cooler, a jet-impingement cooler, or an air-cooled heat sink; and

a second heat exchange layer in thermal communication with the first heat exchange layer, the second heat exchange layer selected from the group comprising a plurality of fins or tabs,

wherein the IC layer, the first heat exchange layer, and second heat exchange layer are parts of a monolithic body without a thermal-interface-material in between the parts.

6. The apparatus of claim 1 , further comprising a solder layer deposited on the micro-pillars.

7. The apparatus of claim 1 , wherein the thermally-conductive unitary structure is formed by additive manufacturing.

8. The apparatus of claim 1 , wherein the micro-pillars are configured to elastically deform along a length responsive to a heat differential.

9. The apparatus of claim 5 , further comprising a solder layer deposited on the micro-pillars.

10. The apparatus of claim 9 , wherein the solder layer is configured to for attachment of an electronic device.

11. The apparatus of claim 5 , wherein the integrated and unitary body of homogenous material is formed by additive manufacturing.

12. The apparatus of claim 5 , wherein the micro-pillars are configured to elastically deform along a length responsive to a heat differential.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 13, 2016
From: CAI, STEVE Q.; BHUNIA, AVIJIT; SEMENIC, TADEJ
To: TELEDYNE SCIENTIFIC & IMAGING, LLC
Reel/Frame 039150/0350 →
Continuity (1)
Related Publication 20170363373A1 · Dec 21, 2017
Cited By (1)
US 12,289,865