Physical quantity sensor having a movable portion including a frame surrounding a fixed portion fixed to a substrate

1. A physical quantity sensor comprising:

a substrate;

a fixed portion that is fixed to the substrate;

a movable portion that is connected to the fixed portion and is displaceable in a first direction with respect to the substrate, the movable portion includes a frame part surrounding the fixed portion in a plan view,

wherein the frame part includes

a first outer edge that is located on a first side of the first direction, and is disposed along a second direction orthogonal to the first direction, and

a second outer edge that is located on a second side of the first direction, and is disposed along the second direction,

wherein the fixed portion is closer to the second outer edge portion than the first outer edge portion, and

wherein the substrate includes

a projection part that overlaps the first outer edge in a plan view, and is disposed to be separated from the first outer edge.

2. The physical quantity sensor according to claim 1 ,

wherein the projection part is included in the movable portion in a plan view.

3. The physical quantity sensor according to claim 1 , further comprising:

an electrode that is disposed in at least a part of a region overlapping the movable portion in a plan view on a surface of the substrate on the movable portion side,

wherein the electrode has the same potential as a potential of the movable portion.

4. The physical quantity sensor according to claim 1 , further comprising:

a beam that has a longitudinal shape along the first direction and of which one end is connected to the fixed portion; and

a spring that connects the other end of the beam to the movable portion,

wherein the substrate includes a second projection part that overlaps the beams in a plan view, and is disposed to be separated from the beam.

5. The physical quantity sensor according to claim 1 ,

wherein the movable portion includes a stem part that is located inside the frame part in a plan view, and has a longitudinal shape along the first direction, and

wherein the substrate includes a second projection part that overlaps the stem part in a plan view, and is separated from the stem part.

6. A physical quantity sensor device comprising:

the physical quantity sensor according to claim 1 ;

a circuit element electrically connected to the physical quantity sensor; and

a package housing the physical quantity sensor and the circuit element.

7. A composite sensor device comprising:

a first physical quantity sensor that is the physical quantity sensor according to claim 1 ;

a second physical quantity sensor that measures a physical quantity which is different from a physical quantity measured by the first physical quantity sensor; and

a device substrate,

wherein the first and second physical quantity sensors are attached to the device substrate.

8. An inertial measurement unit comprising:

the physical quantity sensor according to claim 1 ;

a control circuit that controls driving of the physical quantity sensor; and

a unit substrate,

wherein the physical quantity sensor and the control circuit are mounted to the unit substrate.

9. An electronic apparatus comprising:

the physical quantity sensor according to claim 1 ;

a control section that performs control on the basis of a measurement signal output from the physical quantity sensor; and

a body,

wherein the physical quantity sensor and the control section are housed in the body.