Heat treatment method and heat treatment apparatus for managing dummy wafer
Dummy running is carried out which performs preheating treatment using halogen lamps and flash heating treatment using flash lamps on a dummy wafer to control the temperature of in-chamber structures including a susceptor and the like. In this process, a preheating counter or a flash heating counter is incremented each time the preheating treatment or the flash heating treatment is performed. An alarm is issued, if the preheating counter or the flash heating counter that is a wear-and-tear value of the dummy wafer is not less than a predetermined threshold value. This allows an operator of a heat treatment apparatus to recognize that the deterioration of the dummy wafer reaches a limit value, thereby preventing the erroneous treatment of a dummy wafer suffering advanced deterioration.
1. A method of managing a dummy wafer for a heat treatment process in which a susceptor supporting the dummy wafer is subjected to heat treatment prior to a start of treatment of a wafer lot in order to increase a temperature of the susceptor in advance, said susceptor supporting a wafer to be treated after the heat treatment, said method comprising the steps of:
(a) counting a wear-and-tear value indicating a degree of deterioration of the dummy wafer resulting from the heat treatment; and
(b) issuing an alarm when the wear-and-tear value of said dummy wafer is not less than a predetermined threshold value.
2. The method according to claim 1 , wherein
said step (a) and said step (b) are performed when said dummy wafer is being treated in a heat treatment apparatus.
3. The method according to claim 1 , wherein
said step (b) is performed when an instruction to start transport of said dummy wafer whose wear-and-tear value reaches said threshold value is received in a heat treatment apparatus.
4. The method according to claim 3 , wherein
the transport of said dummy wafer is further prohibited when said instruction to start the transport is received.
5. The method according to claim 1 , wherein
said wear-and-tear value is the number of times of preheating using a continuous lighting lamp or the number of times of flash heating using a flash lamp.