Liquid crystal display device and method for manufacturing the same
Provided is a method to manufacture a liquid crystal display device in which a contact hole for the electrical connection of the pixel electrode and one of the source and drain electrode of a transistor and a contact hole for the processing of a semiconductor layer are formed simultaneously. The method contributes to the reduction of a photography step. The transistor includes an oxide semiconductor layer where a channel formation region is formed.
1. A display device comprising:
a pixel portion comprising:
a transistor comprising:
a gate electrode over and in contact with an insulating surface;
a first insulating layer over the gate electrode; and
a metal oxide layer electrically connected to a channel formation region of the transistor;
a second insulating layer over the metal oxide layer; and
a first conductive layer over the second insulating layer, the first conductive layer being electrically connected to the metal oxide layer; and
a connecting portion comprising:
a second conductive layer over and in contact with the insulating surface;
the first insulating layer over the second conductive layer;
an oxide semiconductor layer over the first insulating layer;
the second insulating layer over the oxide semiconductor layer; and
a third conductive layer over the second insulating layer,
wherein the gate electrode and the channel formation region overlap each other,
wherein each of the first insulating layer, the oxide semiconductor layer, and the second insulating layer comprises a contact hole,
wherein the third conductive layer is electrically connected to the second conductive layer through the contact hole of each of the first insulating layer, the oxide semiconductor layer, and the second insulating layer, and
wherein the third conductive layer is in contact with a side surface of the second insulating layer.
2. A display device comprising:
a pixel portion comprising:
a transistor comprising:
a gate electrode over and in contact with an insulating surface;
a first insulating layer over the gate electrode; and
a metal oxide layer electrically connected to a channel formation region of the transistor;
a second insulating layer over the metal oxide layer; and
a first conductive layer over the second insulating layer, the first conductive layer being electrically connected to the metal oxide layer; and
a connecting portion comprising:
a second conductive layer over and in contact with the insulating surface;
the first insulating layer over the second conductive layer;
an oxide semiconductor layer over the first insulating layer;
the second insulating layer over the oxide semiconductor layer; and
a third conductive layer over the second insulating layer,
wherein the gate electrode and the channel formation region overlap each other,
wherein each of the first insulating layer, the oxide semiconductor layer, and the second insulating layer comprises a contact hole,
wherein the third conductive layer is electrically connected to the second conductive layer through the contact hole of each of the first insulating layer, the oxide semiconductor layer, and the second insulating layer,
wherein the third conductive layer is in contact with a side surface of the second insulating layer, and
wherein each of the gate electrode and the second conductive layer has a layered structure in which a copper layer is over a titanium layer.
3. The display device according to claim 1 ,
wherein the oxide semiconductor layer is in contact with an upper surface of the first insulating layer.
4. The display device according to claim 2 ,
wherein the oxide semiconductor layer is in contact with an upper surface of the first insulating layer.
5. The display device according to claim 1 , wherein the oxide semiconductor layer contains In, Ga, and Zn.
6. The display device according to claim 2 , wherein the oxide semiconductor layer contains In, Ga, and Zn.
7. The display device according to claim 1 , further comprising:
a liquid crystal material over the first conductive layer.
8. The display device according to claim 2 , further comprising:
a liquid crystal material over the first conductive layer.
9. The display device according to claim 1 , wherein the channel formation region includes crystals with c-axis alignment.
10. The display device according to claim 2 , wherein the channel formation region includes crystals with c-axis alignment.