IP Library › Granted Patent US 11,025,200
Granted Patent B2
US 11,025,200 · App. 16/562,337 · Granted Jun 1, 2021

Magnetic coupling layers, structures comprising magnetic coupling layers and methods for fabricating and/or using same

Inventors: Zachary Raymond Nunn (Coquitlam, CA); Erol Girt (Burnaby, CA)
H03B15/006G01R33/093G01R33/098G11C11/161H01F10/329
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Quick Facts
Patent No.
US 11,025,200
App. No.
16/562,337
Granted
Jun 1, 2021
Kind
B2
Abstract

A magnetic structure is provided. The magnetic structure may have a first magnetic layer with a first magnetization direction, a second magnetic layer with a second magnetization direction and a coupling layer interposed between the first and second magnetic layers. The coupling layer may include at least one non-magnetic element and at least one magnetic element. The atomic ratio of the at least one non-magnetic element to the at least one magnetic element is (100−x):x, where x is an atomic concentration parameter. Atomic concentration parameter, x, may cause the first magnetic layer to be non-collinearly coupled to the second magnetic layer such that, in the absence of external magnetic field, the first magnetization direction is oriented at a non-collinear angle relative to the second magnetization direction.

Claims (106)

1. A magnetic structure comprising:

a first magnetic layer having a first magnetization direction;

a second magnetic layer having a second magnetization direction;

a coupling layer interposed between the first magnetic layer and the second magnetic layer, the coupling layer comprising:

at least one non-magnetic element selected from the group consisting of: Ag, Cr, Ru, Mo, Ir, Rh, Cu, V, Nb, W, Ta, Ti, Re, Os, Au, Al and Si; and

at least one magnetic component selected from the group consisting of at least one magnetic element, at least one magnetic compound, and any combination thereof,

wherein the at least one magnetic element is selected from the group consisting of Ni, Co, and Fe, and

wherein the at least one magnetic compound is selected from the group consisting of NiPt, NiPd, CoPt, CoPd, FePt, and FePd;

wherein a composition of the coupling layer provides non-collinear coupling between the first magnetic layer and the second magnetic layer;

wherein an atomic ratio of the at least one non-magnetic element to the at least one magnetic component is (100−x):x; and

wherein x is an atomic concentration parameter which causes, or is selected to cause, the first magnetic layer to be non-collinearly coupled to the second magnetic layer such that, in the absence of external magnetic field, the first magnetization direction is oriented at a non-collinear angle relative to the second magnetization direction; and

wherein said composition excludes the group consisting of:

RuCo alloys where atomic concentration of Co is less than 40;

RuCoCr alloys where atomic concentration of Co is less than 40;

CoCr alloys where atomic concentration of Co is less than 60; and

CoCrB alloys where atomic concentration of Co is less than 60.

2. The magnetic structure according to claim 1 wherein the coupling layer has a thickness, t c , and wherein a combination of the atomic concentration parameter x and the thickness t c of the coupling layer causes, or is selected to cause, the first magnetic layer to be non-collinearly coupled to the second magnetic layer.

3. The magnetic structure according to claim 2 wherein:

the at least one non-magnetic element comprises Ru;

the at least one magnetic component comprises the at least one magnetic element,

and the at least one magnetic element comprises Co;

x is between 40 and 64; and

t c is greater than 0.4 nm and less than 1.8 nm.

4. The magnetic structure according to claim 2 wherein:

the at least one non-magnetic substance comprises Ru;

the at least one magnetic component comprises the at least one magnetic element,

and the at least one magnetic element comprises Fe;

x is between 66 and 82; and

t c is greater than 0.4 nm and less than 1.8 nm.

5. The magnetic structure according to claim 2 wherein:

the at least one non-magnetic element comprises Ru;

the at least one magnetic component comprises the at least one magnetic element, and the at least one magnetic element comprises Co and Fe;

x is between 40 and 94 and is dependent on the ratio of Co:Fe; and

t c is greater than 0.4 nm and less than 1.8 nm.

6. The magnetic structure according to claim 2 , wherein the at least one non-magnetic element that comprises the coupling layer is Ru.

7. The magnetic structure according to claim 1 wherein the at least one non-magnetic element is selected from the group consisting of Ru, Ir, Re, Rh, and Cr.

8. The magnetic structure according to claim 1 wherein the at least one non-magnetic element comprises Ru.

9. The magnetic structure according to claim 1 wherein the magnetic structure is annealed at a temperature of at least 200° C. and after annealing, the first magnetic layer is non-collinearly coupled to the second magnetic layer.

10. The magnetic structure according to claim 1 further comprising Mn wherein the at least one magnetic component comprises the at least one magnetic element, and wherein the atomic concentration parameter x reflects the combined atomic concentration of Mn and the at least one magnetic element.

11. The magnetic structure according to claim 1 wherein:

the at least one magnetic component selected from the at least one magnetic element.

12. A method for fabricating the magnetic structure according to claim 1 , the method comprising:

layering a coupling layer between a first magnetic layer having a first magnetization direction and a second magnetic layer having a second magnetization direction, the coupling layer comprising:

at least one non-magnetic element selected from frons the group consisting of: Ag, Cr, Ru, Mo, Ir, Rh, Cu, V, Nb, W, Ta, Ti, Re, Os, Au, Al and Si; and

at least one magnetic component selected from the group consisting of at least one magnetic element, at least one magnetic compound, and any combination thereof, wherein the at least one magnetic element is selected from the group consisting of Ni, Co, and Fe, and wherein the at least one magnetic compound is selected from the group consisting of NiPt, NiPd, CoPt, CoPd, FePt, and FePd;

wherein a composition of the coupling layer provides non-collinear coupling between the first magnetic layer and the second magnetic layer;

wherein the atomic ratio of the at least one non-magnetic element to the at least one magnetic component is (100−x):x; and

wherein x is an atomic concentration parameter and x is selected such that the first magnetic layer is non-collinearly coupled to the second magnetic layer, such that, in the absence of external magnetic field, the first magnetization direction is oriented at a non-collinear angle relative to the second magnetization direction

wherein said composition excludes the group consisting of:

RuCo alloys where atomic concentration of Co is less than 40;

RuCoCr alloys where atomic concentration of Co is less than 40;

CoCr alloys where atomic concentration of Co is less than 60; and

CoCrB alloys where atomic concentration of Co is less than 60.

13. The method according to claim 12 wherein layering the coupling layer between the first magnetic layer and the second magnetic layer comprises:

depositing the coupling layer on the first magnetic layer and wherein depositing the coupling layer on the first magnetic layer comprises using a chemical vapor deposition (CVD), atomic layer deposition (ALD) or physical vapor deposition (PVD) process; and

depositing the second magnetic layer on the coupling layer.

14. The method according to claim 13 further comprising annealing the magnetic structure after depositing the coupling layer on the first magnetic layer and depositing the second magnetic layer on the coupling layer.

15. The method according to claim 12 wherein layering the coupling layer between the first magnetic layer and the second magnetic layer comprises:

depositing an intermediate layer comprising the at least one non-magnetic element on the first magnetic layer;

depositing the second magnetic layer on the intermediate layer; and

annealing the resultant structure comprising the first magnetic layer, the intermediate layer and the second magnetic layer and thereby diffusing the at least one magnetic element from the first and second magnetic layers into the intermediate layer to thereby form the coupling layer.

16. The magnetic structure according to claim 1 , further comprising:

a third magnetic layer having a third magnetization direction;

a magnetoresistive layer interposed between the third magnetic layer and the second magnetic layer; and

a circuit connected to the third magnetic layer and the first magnetic layer to determine a change in resistance across the third magnetic layer, the magnetic structure and the magnetoresistive layer, the change in resistance based at least in part on a change in an angular relationship between the third magnetization direction and the second magnetization direction caused by an external magnetic field.

17. The magnetic structure according to claim 1 , further comprising:

a third magnetic layer having a third magnetization direction;

a magnetoresistive layer interposed between the third magnetic layer and the second magnetic layer; and:

a circuit connected to the second magnetic layer and the first magnetic layer to determine a resistance across the third magnetic layer, the magnetic structure and the magnetoresistive layer, the resistance based at least in part on an angular relationship between the third magnetization direction and the second magnetization direction such that the resistance changes in response to a change of the second magnetization direction from the first state angle to the second state angle;

wherein the first magnetization direction is fixed and the second magnetization direction is free to move between a first state angle and a second state angle in response to a current applied to the magnetic structure.

18. The magnetic structure according to claim 1 , further comprising:

a third magnetic layer having a third magnetization direction;

a magnetoresistive layer interposed between the third magnetic layer and the second magnetic layer; and

a circuit connected to the second magnetic layer and the first magnetic layer to apply direct current across the third magnetic layer, the magnetic structure and the magnetoresistive layer to create an oscillating signal based at least in part on an angular relationship between the third magnetization direction and the second magnetization direction;

wherein the second magnetization direction is free to precess at a first angle relative to the first magnetization direction in response to a current applied to the magnetic structure.

19. The magnetic structure according to claim 1 wherein the at least one non-magnetic element is selected from the group consisting of Ru, Ir, Re, Rh, Cr, Mo, V, W, Nb and Ta.

20. The magnetic structure according to claim 1 , wherein:

the first magnetic layer comprises Fe, Co, Ni, or any combination thereof;

the second magnetic layer comprises Fe, Co, Ni, or any combination thereof;

the at least one non-magnetic element that comprises the coupling layer is selected from the group consisting of Ru and Ir; and

the at least one magnetic element that comprises the coupling layer is selected from the group consisting of Co and Fe.

21. A magnetic structure comprising:

a first magnetic layer having a first magnetization direction;

a second magnetic layer having a second magnetization direction;

a coupling layer interposed between the first magnetic layer and the second magnetic layer, a composition of the coupling layer providing non-collinear coupling between the first magnetic layer and the second magnetic layer, the coupling layer comprising:

at least one non-magnetic element selected from the group consisting of: Cr, and Re; and

at least one magnetic element selected from the group consisting of: Fe, Ni and Co;

wherein the atomic ratio of the at least one non-magnetic element to the at least one magnetic element is (100−x):x; and

wherein x is an atomic concentration parameter which causes, or is selected to cause, the first magnetic layer to be antiferromagnetically coupled to the second magnetic layer such that, in the absence of external magnetic field, the first magnetization direction is oriented at an antiferromagnetic angle relative to the second magnetization direction

wherein said composition excludes the group consisting of:

RuCoCr alloys where atomic concentration of Co is less than 40;

CoCr alloys where atomic concentration of Co is less than 60; and

CoCrB alloys where atomic concentration of Co is less than 60.

22. A method for fabricating a magnetic structure, the method comprising:

forming an initial magnetic structure by layering a coupling layer between a first magnetic layer having a first magnetization direction and a second magnetic layer having a second magnetization direction, the coupling layer comprising:

at least one non-magnetic element selected from the group consisting of: Ag, Cr, Ru, Mo, Ir, Rh, Cu, V, Nb, W, Ta, Ti, Re, Os, Au, Al and Si;

the first magnetic layer and the second magnetic layer each comprising at least one magnetic element selected from the group consisting of: Ni, Co, and Fe;

annealing the initial magnetic structure at a temperature over 100° C. to cause at least some of the at least one magnetic element of the first and second magnetic layers to diffuse into the coupling layer such that an atomic ratio of the at least one non-magnetic element to the at least one magnetic element in the coupling layer is (100−x):x, wherein x is an atomic concentration parameter; and

continuing to anneal the initial structure until the atomic concentration parameter x is such that the first magnetic layer is non-collinearly coupled to the second magnetic layer such that, in the absence of external magnetic field, the first magnetization direction is oriented at a non-collinear angle relative to the second magnetization direction,

wherein said composition excludes the group consisting of:

RuCo alloys where atomic concentration of Co is less than 40;

RuCoCr alloys where atomic concentration of Co is less than 40;

CoCr alloys where atomic concentration of Co is less than 60; and

CoCrB alloys where atomic concentration of Co is less than 60.

23. The method according to claim 22 comprising annealing the initial magnetic structure at a temperature over 200° C.

24. The method according to claim 22 wherein before annealing, the coupling layer has an atomic ratio of the at least one non-magnetic element to any magnetic elements contained in the coupling layer of (100−y):y, where y is less than x.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 10, 2019
From: GIRT, EROL; NUNN, ZACHARY RAYMOND
To: SIMON FRASER UNIVERSITY
Reel/Frame 050330/0885 →
Continuity (4)
Continuation PCTCA2017051419 · Nov 24, 2017
Provisional Application 62555625 · Sep 7, 2017
Provisional Application 62470123 · Mar 10, 2017
Related Publication 20200076369A1 · Mar 5, 2020